[Scan]
initial_time=2016-01-28T22:46:07
final_time=2016-01-28T22:46:26
ip_count=19
run=1026
dataset=10
scan=754
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=1.39225E-8
ql2_vset=
ql2_vmon=-7.9813E-1
ql2_imon=2.01069E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=4.43757E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-2.41685E-10
mult1=-1.02236E-8
mult2=-2.85412E-9
rf_tmon=-4.50936E-3
rf_agc=3.27223E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.71273E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63023E0
bslens_imon=2.64236E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20043E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53694E1
cs_ef1b_imon=3.18849E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=1.08609E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36843E0
lens1_imon=2.745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.98775E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.4103E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=3.04289E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.15861E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=4.30103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14804E1
os_ea1_imon=2.44557E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=9.5796E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=1.95701E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.14211E-8
tplens_vset=1.4E-1
tplens_vmon=1.67329E0
tplens_imon=-3.30742E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26089E1
iondef3_imon=1.50409E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26695E1
iondef2_imon=1.58337E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98463E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=4.08211E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=8.46823E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33522E1
lens5b_imon=2.18366E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.14524E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49455E0
os_ea2_imon=-5.18331E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.19678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07678E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10038E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.3849E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.31698E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.09685E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72671E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67722E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.95107E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=7.27675E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-9.18431E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.74911E-6
window_vset=0.0E0
window_vmon=2.2395E-1
window_imon=-9.32847E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86837E1
mask2_imon=-4.71539E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.42764E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.7056E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.38517E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36126E0
defgridb_imon=6.32335E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.41387E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0772E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62319E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31579E1
cs_fil1_imon=7.14883E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.0289E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64091E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.78776E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15734E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.47705E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27969E-1
cs_fil2_imon=-1.92115E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.62876E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21826E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.2116E-1
res40_imon=-2.33119E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.16011E-1	-7.98178E-1	-9.13138E0	-9.1418E0	4.50611E-3	9.36747E-2	2.73237E1	-3.26416E1	-3.26356E1	2.6822E1	1.20226E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.16131E-1	-7.98535E-1	-9.13131E0	-9.14171E0	4.52995E-3	9.3627E-2	2.72871E1	-3.26527E1	-3.26463E1	2.67879E1	1.19646E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.16417E-1	-7.98321E-1	-9.13124E0	-9.1418E0	4.33922E-3	9.37462E-2	2.74122E1	-3.26456E1	-3.26321E1	2.68076E1	1.1979E-7	2.51603E-3	2.51603E-3	6.33388E-3	2.98592E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.16274E-1	-7.98273E-1	-9.13115E0	-9.14192E0	4.3869E-3	9.36508E-2	2.72733E1	-3.26386E1	-3.26344E1	2.67884E1	1.19883E-7	2.52066E-3	2.52066E-3	6.3245E-3	3.00522E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.16083E-1	-7.98607E-1	-9.13138E0	-9.14192E0	4.14848E-3	9.3627E-2	2.73865E1	-3.26372E1	-3.26301E1	2.68016E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09441E0	-8.16131E-1	-7.98726E-1	-9.1315E0	-9.14197E0	4.36306E-3	9.38177E-2	2.72084E1	-3.26855E1	-3.26104E1	2.68262E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16321E-1	-7.98607E-1	-9.13105E0	-9.14159E0	4.24385E-3	9.39131E-2	2.74148E1	-3.26484E1	-3.26301E1	2.68082E1	1.19851E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16226E-1	-7.98249E-1	-9.1315E0	-9.14178E0	4.26769E-3	9.40084E-2	2.71417E1	-3.26609E1	-3.26296E1	2.67938E1	1.20122E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.97963E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09665E0	-8.15988E-1	-7.98345E-1	-9.13131E0	-9.1419E0	4.45843E-3	9.38177E-2	2.73688E1	-3.26443E1	-3.26419E1	2.68028E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.1594E-1	-7.98583E-1	-9.13134E0	-9.14183E0	4.57764E-3	9.36747E-2	2.7224E1	-3.26867E1	-3.26254E1	2.67734E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.16035E-1	-7.98225E-1	-9.13107E0	-9.14209E0	4.52995E-3	9.37462E-2	2.74547E1	-3.273E1	-3.26038E1	2.68274E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16464E-1	-7.98321E-1	-9.13112E0	-9.14192E0	4.57764E-3	9.34839E-2	2.73556E1	-3.27059E1	-3.26428E1	2.68034E1	1.20191E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.98819E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16417E-1	-7.98154E-1	-9.13129E0	-9.14204E0	4.41074E-3	9.34601E-2	2.72336E1	-3.26759E1	-3.26242E1	2.68118E1	1.20278E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.97187E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.16488E-1	-7.98345E-1	-9.13122E0	-9.14185E0	4.673E-3	9.36747E-2	2.74024E1	-3.26981E1	-3.26374E1	2.68064E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.96414E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.16274E-1	-7.98273E-1	-9.13131E0	-9.14197E0	4.72069E-3	9.38416E-2	2.7215E1	-3.26765E1	-3.26332E1	2.68016E1	1.19809E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9874E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.16536E-1	-7.98535E-1	-9.13131E0	-9.14216E0	4.55379E-3	9.39846E-2	2.70479E1	-3.26903E1	-3.26308E1	2.67956E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9926E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16703E-1	-7.98464E-1	-9.13138E0	-9.14204E0	4.55379E-3	9.37462E-2	2.71357E1	-3.26687E1	-3.26158E1	2.67812E1	1.19965E-7	2.52647E-3	2.52647E-3	6.32936E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16345E-1	-7.98559E-1	-9.13098E0	-9.14218E0	4.55379E-3	9.39846E-2	2.72049E1	-3.26764E1	-3.26521E1	2.68082E1	1.19851E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.00966E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.15821E-1	-7.98559E-1	-9.13155E0	-9.14185E0	4.60148E-3	9.36985E-2	2.73213E1	-3.26813E1	-3.26308E1	2.681E1	1.19902E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.15988E-1	-7.9813E-1	-9.1315E0	-9.14178E0	4.64916E-3	9.36985E-2	2.72671E1	-3.26695E1	-3.26089E1	2.67722E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00563E-1