[Scan]
initial_time=2016-01-28T22:47:00
final_time=2016-01-28T22:47:20
ip_count=19
run=1026
dataset=10
scan=756
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09688E0
qbias_imon=-1.08814E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=1.38568E-8
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=1.99381E-9
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=3.8805E-10
ql4_vset=
ql4_vmon=-9.14156E0
ql4_imon=-1.5403E-10
mult1=-9.98405E-9
mult2=-2.84084E-9
rf_tmon=-4.91651E-3
rf_agc=3.23535E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.73442E-9
bslens_vset=-6.2E0
bslens_vmon=-6.70939E0
bslens_imon=2.59641E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19755E1
lens5a_imon=1.97898E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53519E1
cs_ef1b_imon=3.14006E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02134E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04818E1
cs_ea1_imon=1.08351E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39896E0
lens1_imon=2.72179E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.642E1
os_ef1alow_imon=2.98403E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03965E1
cs_ea2_imon=1.3864E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85468E1
cs_ef1a_imon=3.07563E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.20261E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11224E1
os_restr1_imon=4.27217E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15476E1
os_ea1_imon=2.4287E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63255E1
os_ef1bup_imon=3.08335E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23395E0
cs_ionrep_imon=9.50216E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93318E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02022E1
cs_anode1_imon=1.99318E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.19099E-8
tplens_vset=1.4E-1
tplens_vmon=1.67553E0
tplens_imon=1.28421E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25995E1
iondef3_imon=1.49462E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26773E1
iondef2_imon=1.58206E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.9826E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.97383E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24825E0
ionrepsh_imon=8.72679E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33558E1
lens5b_imon=2.16903E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74736E1
cs_ef2b_imon=3.13368E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49791E0
os_ea2_imon=-6.27152E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00606E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70922E1
cs_ef2a_imon=3.17328E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07469E0
os_ef2alow_imon=-2.41196E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32283E-1
os_ef2bup_imon=-4.98557E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11073E1
os_restr2_imon=3.40279E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.30324E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02089E1
cs_anode2_imon=2.11028E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73257E1
iondef1_imon=1.07955E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68322E1
iondef4_imon=1.05165E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.04651E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.46176E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09044E0
cs_ionaccel_imon=-7.2419E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02132E2
cs_ionfocb_imon=1.47548E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5636E1
einzel_imon=7.23486E-6
window_vset=0.0E0
window_vmon=2.80081E-1
window_imon=-7.71166E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82696E2
mask1_imon=2.39483E-4
mask2_vset=0.0E0
mask2_vmon=-1.87216E1
mask2_imon=-5.16154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=6.77681E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.66133E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.16615E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=5.98824E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33171E1
os_fil1_imon=9.4284E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08319E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61903E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31563E1
cs_fil1_imon=8.177E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.72049E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64414E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.982E-2
os_fil2_imon=-2.40375E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01981E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.79696E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28687E-1
cs_fil2_imon=-2.16887E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19773E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21742E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-1.6619E-1
res40_imon=-2.13011E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=266
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.16464E-1	-7.98225E-1	-9.13143E0	-9.14178E0	4.24385E-3	9.34839E-2	2.72591E1	-3.26693E1	-3.26179E1	2.6816E1	1.20064E-7	2.51752E-3	2.51752E-3	6.3023E-3	3.00392E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16441E-1	-7.98774E-1	-9.13143E0	-9.1418E0	4.62532E-3	9.36747E-2	2.73183E1	-3.26518E1	-3.26248E1	2.68064E1	1.19804E-7	2.51793E-3	2.51793E-3	6.32716E-3	2.98792E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.1656E-1	-7.98631E-1	-9.13153E0	-9.14216E0	4.62532E-3	9.40323E-2	2.74203E1	-3.26747E1	-3.26372E1	2.68054E1	1.20069E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.98222E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.16441E-1	-7.98559E-1	-9.1315E0	-9.14211E0	4.52995E-3	9.38892E-2	2.72071E1	-3.26553E1	-3.2619E1	2.68063E1	1.19765E-7	2.51823E-3	2.51823E-3	6.31744E-3	2.98151E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16178E-1	-7.98512E-1	-9.13172E0	-9.1419E0	4.36306E-3	9.38654E-2	2.73596E1	-3.26712E1	-3.26399E1	2.68024E1	1.20171E-7	2.52454E-3	2.52454E-3	6.35399E-3	2.99811E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16393E-1	-7.98583E-1	-9.13143E0	-9.14209E0	4.57764E-3	9.37462E-2	2.74235E1	-3.26735E1	-3.26164E1	2.6834E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.02769E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.16321E-1	-7.98368E-1	-9.13143E0	-9.14199E0	4.74453E-3	9.37939E-2	2.71496E1	-3.26701E1	-3.26076E1	2.67902E1	1.20226E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.15892E-1	-7.98583E-1	-9.13126E0	-9.14178E0	4.74453E-3	9.39846E-2	2.73718E1	-3.265E1	-3.26338E1	2.68166E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.16154E-1	-7.9844E-1	-9.13122E0	-9.14164E0	4.55379E-3	9.38654E-2	2.72078E1	-3.26803E1	-3.26001E1	2.68076E1	1.20069E-7	2.5199E-3	2.5199E-3	6.35692E-3	3.03449E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.15988E-1	-7.98345E-1	-9.13126E0	-9.14192E0	4.69685E-3	9.34839E-2	2.73634E1	-3.2653E1	-3.25966E1	2.67625E1	1.20069E-7	2.50898E-3	2.50898E-3	6.32936E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.16274E-1	-7.98535E-1	-9.13134E0	-9.14166E0	4.673E-3	9.3317E-2	2.74897E1	-3.26992E1	-3.2675E1	2.67836E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0148E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09673E0	-8.16059E-1	-7.98583E-1	-9.13141E0	-9.14171E0	4.3869E-3	9.36747E-2	2.72919E1	-3.26801E1	-3.26458E1	2.68076E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09742E0	-8.16345E-1	-7.98631E-1	-9.13172E0	-9.14178E0	4.3869E-3	9.36985E-2	2.71331E1	-3.2656E1	-3.26211E1	2.6813E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09688E0	-8.16417E-1	-7.98702E-1	-9.13167E0	-9.1418E0	4.41074E-3	9.38654E-2	2.73454E1	-3.26164E1	-3.26524E1	2.67752E1	1.20069E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09711E0	-8.16369E-1	-7.98249E-1	-9.13167E0	-9.14173E0	4.57764E-3	9.38892E-2	2.71855E1	-3.26987E1	-3.26152E1	2.68082E1	1.20122E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09634E0	-8.16321E-1	-7.98631E-1	-9.13148E0	-9.1418E0	4.45843E-3	9.377E-2	2.73279E1	-3.26494E1	-3.26308E1	2.67962E1	1.20297E-7	2.52139E-3	2.52139E-3	6.33538E-3	3.00676E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.16202E-1	-7.98845E-1	-9.13129E0	-9.14187E0	4.74453E-3	9.39608E-2	2.73105E1	-3.26717E1	-3.26362E1	2.67956E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16059E-1	-7.98392E-1	-9.13141E0	-9.14178E0	4.62532E-3	9.35555E-2	2.73057E1	-3.26735E1	-3.25846E1	2.67998E1	1.19697E-7	2.51203E-3	2.51203E-3	6.34518E-3	3.00453E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.15916E-1	-7.98488E-1	-9.13138E0	-9.14147E0	4.50611E-3	9.37462E-2	2.73275E1	-3.27051E1	-3.2606E1	2.68059E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09688E0	-8.16059E-1	-7.98798E-1	-9.13157E0	-9.14156E0	4.52995E-3	9.35555E-2	2.73257E1	-3.26773E1	-3.25995E1	2.68322E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00453E-1