[Scan]
initial_time=2016-01-28T22:47:53
final_time=2016-01-28T22:48:13
ip_count=19
run=1026
dataset=10
scan=758
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08806E-4
ql1_vset=
ql1_vmon=-8.16011E-1
ql1_imon=1.38751E-8
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=2.01033E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=4.1672E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-1.86276E-10
mult1=-9.48754E-9
mult2=-2.7246E-9
rf_tmon=-4.01374E-3
rf_agc=3.30151E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.67098E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66606E0
bslens_imon=2.66427E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19933E1
lens5a_imon=1.98024E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05199E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53954E1
cs_ef1b_imon=3.21044E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02396E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04841E1
cs_ea1_imon=1.08403E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43316E0
lens1_imon=2.66427E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65151E1
os_ef1alow_imon=2.993E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.38081E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83708E1
cs_ef1a_imon=3.0076E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.19017E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11042E1
os_restr1_imon=4.33584E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14932E1
os_ea1_imon=2.45588E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64066E1
os_ef1bup_imon=3.10303E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22761E0
cs_ionrep_imon=9.49967E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93383E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01616E1
cs_anode1_imon=1.94433E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.17389E-8
tplens_vset=1.4E-1
tplens_vmon=1.65735E0
tplens_imon=-1.63922E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2605E1
iondef3_imon=1.50495E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.56923E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98463E-4
ql6_vset=1.0E-1
ql6_vmon=9.40323E-2
ql6_imon=3.98182E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27291E0
ionrepsh_imon=8.70998E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33401E1
lens5b_imon=2.18115E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74258E1
cs_ef2b_imon=3.13222E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48962E0
os_ea2_imon=-6.34062E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00535E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71632E1
cs_ef2a_imon=3.21306E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11319E0
os_ef2alow_imon=-2.5818E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84533E-1
os_ef2bup_imon=-5.57212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10487E1
os_restr2_imon=3.35116E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.32573E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01703E1
cs_anode2_imon=2.07195E-5
iondef1_vset=2.763E1
iondef1_vmon=2.74793E1
iondef1_imon=1.09505E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.14903E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.01376E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.42051E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12827E0
cs_ionaccel_imon=-1.10348E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02007E2
cs_ionfocb_imon=1.4717E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56181E1
einzel_imon=7.93859E-6
window_vset=0.0E0
window_vmon=1.74557E-1
window_imon=-7.59164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82595E2
mask1_imon=2.38717E-4
mask2_vset=0.0E0
mask2_vmon=-1.86469E1
mask2_imon=-3.51222E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.89458E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.87716E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=6.98735E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47709E0
defgridb_imon=6.1242E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33153E1
os_fil1_imon=9.4189E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08096E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61696E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31515E1
cs_fil1_imon=8.1286E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.6194E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63685E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10672E-2
os_fil2_imon=-2.50656E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.29018E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.74814E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30593E-1
cs_fil2_imon=-2.39428E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21554E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=3.01209E-1
chamber_ion_pmon=1.20031E-7
chamber_cvt_pmon=2.51581E-3
foreline_cvt_pmon=2.51581E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-6.65652E-1
res40_imon=-2.70905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16035E-1	-7.98678E-1	-9.13162E0	-9.14204E0	4.93526E-3	9.41277E-2	2.74175E1	-3.26621E1	-3.26116E1	2.6795E1	1.20403E-7	2.51581E-3	2.51581E-3	6.31858E-3	2.9829E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16059E-1	-7.98607E-1	-9.13131E0	-9.14226E0	4.22001E-3	9.41992E-2	2.74225E1	-3.26531E1	-3.26166E1	2.67984E1	1.20069E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.97187E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16011E-1	-7.98941E-1	-9.13126E0	-9.14195E0	4.673E-3	9.41992E-2	2.73252E1	-3.2659E1	-3.25936E1	2.68065E1	1.20209E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.9841E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16131E-1	-7.98798E-1	-9.1316E0	-9.14195E0	4.72069E-3	9.40323E-2	2.71672E1	-3.2641E1	-3.26497E1	2.683E1	1.20113E-7	2.5216E-3	2.5216E-3	6.32273E-3	2.98937E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16369E-1	-7.9875E-1	-9.13134E0	-9.14187E0	4.3869E-3	9.41515E-2	2.73844E1	-3.2647E1	-3.26422E1	2.68016E1	1.19883E-7	2.50931E-3	2.50931E-3	6.3074E-3	3.02699E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.16131E-1	-7.98988E-1	-9.13148E0	-9.1418E0	4.26769E-3	9.41038E-2	2.71553E1	-3.26567E1	-3.26065E1	2.68184E1	1.19913E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-8.16154E-1	-7.98678E-1	-9.13122E0	-9.14207E0	4.55379E-3	9.43899E-2	2.71553E1	-3.26697E1	-3.26119E1	2.68076E1	1.20069E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16059E-1	-7.98893E-1	-9.13177E0	-9.14199E0	4.673E-3	9.4223E-2	2.74147E1	-3.26793E1	-3.26266E1	2.68119E1	1.20414E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09657E0	-8.16298E-1	-7.98965E-1	-9.13181E0	-9.1419E0	4.48227E-3	9.42945E-2	2.75028E1	-3.26422E1	-3.26356E1	2.68052E1	1.20174E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16655E-1	-7.98821E-1	-9.13153E0	-9.14195E0	4.57764E-3	9.40323E-2	2.7531E1	-3.26621E1	-3.26536E1	2.68016E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00302E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16345E-1	-7.98726E-1	-9.13155E0	-9.14176E0	4.52995E-3	9.4223E-2	2.74817E1	-3.26657E1	-3.26855E1	2.68064E1	1.19705E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16464E-1	-7.98702E-1	-9.13167E0	-9.14195E0	4.673E-3	9.41753E-2	2.72823E1	-3.2635E1	-3.26164E1	2.67788E1	1.19705E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.1656E-1	-7.98655E-1	-9.13138E0	-9.14199E0	4.8399E-3	9.38177E-2	2.7157E1	-3.26573E1	-3.26632E1	2.6803E1	1.20122E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.16321E-1	-7.98416E-1	-9.13141E0	-9.14187E0	4.93526E-3	9.408E-2	2.73243E1	-3.26645E1	-3.26404E1	2.68013E1	1.19902E-7	2.52492E-3	2.52492E-3	6.28592E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16512E-1	-7.98416E-1	-9.13146E0	-9.14214E0	5.07832E-3	9.41038E-2	2.74811E1	-3.26458E1	-3.26362E1	2.67984E1	1.19554E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.01209E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16751E-1	-7.98535E-1	-9.1315E0	-9.14204E0	4.95911E-3	9.408E-2	2.75086E1	-3.27098E1	-3.25824E1	2.67968E1	1.198E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16298E-1	-7.98726E-1	-9.13138E0	-9.14178E0	4.45843E-3	9.408E-2	2.74529E1	-3.26633E1	-3.26543E1	2.68196E1	1.19902E-7	2.52492E-3	2.52492E-3	6.32896E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16464E-1	-7.98821E-1	-9.1316E0	-9.1414E0	4.43459E-3	9.40323E-2	2.71747E1	-3.26455E1	-3.26266E1	2.67792E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02396E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16512E-1	-7.98965E-1	-9.13129E0	-9.14145E0	4.62532E-3	9.41038E-2	2.73442E1	-3.27546E1	-3.25954E1	2.67914E1	1.19953E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.03286E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16011E-1	-7.98821E-1	-9.13155E0	-9.14176E0	4.69685E-3	9.40323E-2	2.74793E1	-3.26693E1	-3.2605E1	2.68118E1	1.20031E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.01209E-1