[Scan]
initial_time=2016-01-28T22:48:20
final_time=2016-01-28T22:48:40
ip_count=19
run=1026
dataset=10
scan=759
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08845E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=1.38736E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=2.04451E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=4.35531E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-1.63198E-10
mult1=-9.78308E-9
mult2=-2.81733E-9
rf_tmon=-4.67465E-3
rf_agc=3.28726E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=1.69823E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.46565E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20055E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53664E1
cs_ef1b_imon=3.15749E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02334E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05036E1
cs_ea1_imon=1.07318E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40621E0
lens1_imon=2.92348E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64158E1
os_ef1alow_imon=2.96252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04297E1
cs_ea2_imon=1.40159E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=3.0746E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.19241E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11838E1
os_restr1_imon=4.29454E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15324E1
os_ea1_imon=2.46614E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62999E1
os_ef1bup_imon=3.06127E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=9.64312E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9193E2
cs_nozzle_imon=1.93708E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=1.98692E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20461E0
olens4_imon=3.18249E-8
tplens_vset=1.4E-1
tplens_vmon=1.65165E0
tplens_imon=-2.38062E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26319E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26874E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.42469E-2
ql6_imon=3.97066E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24729E0
ionrepsh_imon=8.54E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33471E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74988E1
cs_ef2b_imon=3.14452E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51466E0
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00507E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70993E1
cs_ef2a_imon=3.16686E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03233E0
os_ef2alow_imon=-2.41408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.46678E-1
os_ef2bup_imon=-5.03416E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1122E1
os_restr2_imon=3.4141E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.30541E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02386E1
cs_anode2_imon=2.1073E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7196E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.06863E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.04825E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.43591E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07428E0
cs_ionaccel_imon=-1.03015E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02125E2
cs_ionfocb_imon=1.47644E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56699E1
einzel_imon=7.58332E-6
window_vset=0.0E0
window_vmon=2.75006E-1
window_imon=-1.12025E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39484E-4
mask2_vset=0.0E0
mask2_vmon=-1.87491E1
mask2_imon=-4.28292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93749E3
defgrida_imon=6.68345E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.20256E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.31214E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33187E1
os_fil1_imon=9.40438E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07605E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61202E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3157E1
cs_fil1_imon=7.27497E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.8427E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63772E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.86045E-2
os_fil2_imon=-2.37164E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.17659E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.25151E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.70684E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21732E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-1.52064E-1
res40_imon=-2.17622E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.16083E-1	-7.98464E-1	-9.13117E0	-9.14187E0	4.64916E-3	9.38177E-2	2.71747E1	-3.26627E1	-3.26092E1	2.68581E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01085E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.16441E-1	-7.98821E-1	-9.13141E0	-9.14173E0	4.93526E-3	9.40323E-2	2.72544E1	-3.2659E1	-3.26459E1	2.67984E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9874E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16464E-1	-7.98583E-1	-9.13134E0	-9.14159E0	4.88758E-3	9.3627E-2	2.74538E1	-3.26826E1	-3.26148E1	2.6807E1	1.20078E-7	2.52093E-3	2.52093E-3	6.30221E-3	2.99753E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09673E0	-8.16464E-1	-7.98559E-1	-9.13129E0	-9.14187E0	4.8399E-3	9.38416E-2	2.72496E1	-3.26785E1	-3.26077E1	2.67998E1	1.20209E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.1656E-1	-7.98631E-1	-9.13112E0	-9.14176E0	4.41074E-3	9.40323E-2	2.71591E1	-3.26452E1	-3.26212E1	2.68028E1	1.19757E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.16178E-1	-7.98726E-1	-9.13141E0	-9.1419E0	4.79221E-3	9.38892E-2	2.71812E1	-3.2652E1	-3.2626E1	2.68244E1	1.19825E-7	2.51686E-3	2.51686E-3	6.31278E-3	3.02898E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.16131E-1	-7.98345E-1	-9.13153E0	-9.14168E0	5.03063E-3	9.40084E-2	2.73676E1	-3.26425E1	-3.26413E1	2.68142E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16035E-1	-7.98655E-1	-9.13143E0	-9.14168E0	4.79221E-3	9.38177E-2	2.71843E1	-3.26609E1	-3.262E1	2.67998E1	1.19965E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.16107E-1	-7.98535E-1	-9.13134E0	-9.14187E0	4.55379E-3	9.39131E-2	2.73225E1	-3.26909E1	-3.2608E1	2.68118E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09711E0	-8.16178E-1	-7.98416E-1	-9.13129E0	-9.14171E0	4.31538E-3	9.41515E-2	2.74649E1	-3.26669E1	-3.26338E1	2.68016E1	1.20069E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01609E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0968E0	-8.16131E-1	-7.98559E-1	-9.13129E0	-9.14176E0	4.43459E-3	9.38654E-2	2.73822E1	-3.26254E1	-3.26254E1	2.67932E1	1.20191E-7	2.51025E-3	2.51025E-3	6.34099E-3	2.99613E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.1625E-1	-7.98345E-1	-9.13153E0	-9.14171E0	4.48227E-3	9.43422E-2	2.7257E1	-3.2653E1	-3.2644E1	2.68184E1	1.19913E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16154E-1	-7.98416E-1	-9.13157E0	-9.14192E0	4.62532E-3	9.37939E-2	2.73311E1	-3.26478E1	-3.26219E1	2.678E1	1.19965E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.1625E-1	-7.98488E-1	-9.13124E0	-9.14173E0	4.60148E-3	9.38177E-2	2.74125E1	-3.26478E1	-3.26431E1	2.67908E1	1.20174E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9952E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.15892E-1	-7.98249E-1	-9.13134E0	-9.14183E0	4.69685E-3	9.41277E-2	2.72348E1	-3.26585E1	-3.26206E1	2.681E1	1.19891E-7	2.51077E-3	2.51077E-3	6.3445E-3	3.00097E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.15892E-1	-7.98512E-1	-9.13119E0	-9.14173E0	4.79221E-3	9.42945E-2	2.74042E1	-3.26711E1	-3.2611E1	2.67836E1	1.19601E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.15821E-1	-7.98416E-1	-9.13119E0	-9.14183E0	4.64916E-3	9.41992E-2	2.73476E1	-3.26325E1	-3.26296E1	2.68052E1	1.2033E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.15892E-1	-7.98368E-1	-9.13126E0	-9.14171E0	4.673E-3	9.41277E-2	2.71889E1	-3.26514E1	-3.26555E1	2.68227E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00582E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16202E-1	-7.98392E-1	-9.13136E0	-9.14187E0	4.88758E-3	9.42469E-2	2.70449E1	-3.25317E1	-3.26951E1	2.6816E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16226E-1	-7.98464E-1	-9.13129E0	-9.14187E0	4.29153E-3	9.42469E-2	2.7196E1	-3.26874E1	-3.26319E1	2.6804E1	1.19913E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00041E-1