[Scan]
initial_time=2016-01-28T22:50:07
final_time=2016-01-28T22:50:26
ip_count=19
run=1026
dataset=10
scan=763
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-8.16011E-1
ql1_imon=1.38418E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=2.02854E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=3.19183E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-1.80137E-10
mult1=-9.86583E-9
mult2=-2.85652E-9
rf_tmon=-4.60386E-3
rf_agc=3.29906E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.68273E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6415E0
bslens_imon=2.63869E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20055E1
lens5a_imon=1.98848E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.05244E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.18488E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04958E1
cs_ea1_imon=1.10202E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37316E0
lens1_imon=2.6423E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.9791E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04195E1
cs_ea2_imon=1.4189E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=3.0364E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.20155E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11448E1
os_restr1_imon=4.29599E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15378E1
os_ea1_imon=2.44883E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26712E0
cs_ionrep_imon=9.47729E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93287E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01905E1
cs_anode1_imon=1.95917E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20458E0
olens4_imon=3.19752E-8
tplens_vset=1.4E-1
tplens_vmon=1.64444E0
tplens_imon=-1.22703E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.48595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26266E1
iondef2_imon=1.59193E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.9827E-4
ql6_vset=1.0E-1
ql6_vmon=9.41277E-2
ql6_imon=3.97054E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=8.86805E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33574E1
lens5b_imon=2.17341E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.14019E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50324E0
os_ea2_imon=-5.44483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00504E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.2011E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23853E-1
os_ef2bup_imon=-5.1603E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.3795E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.30757E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.09108E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72526E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68059E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.05038E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.46735E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-8.57164E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.82479E-6
window_vset=0.0E0
window_vmon=2.38966E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.3934E-4
mask2_vset=0.0E0
mask2_vmon=-1.86746E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.36478E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.88172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50169E3
multb_neg_imon=7.15209E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.70232E0
defgridb_imon=6.00572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33169E1
os_fil1_imon=9.40588E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07906E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62172E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31447E1
cs_fil1_imon=7.18487E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.28118E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64387E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88625E-2
os_fil2_imon=-2.29956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01919E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.3452E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2166E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40017E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.35576E-1
res40_imon=-2.28073E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16107E-1	-7.98512E-1	-9.13134E0	-9.14154E0	4.36306E-3	9.36985E-2	2.73818E1	-3.26679E1	-3.26219E1	2.68124E1	1.20278E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00302E-1
2.0E0	5.5E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.15797E-1	-7.9875E-1	-9.13143E0	-9.14176E0	4.26769E-3	9.34124E-2	2.72095E1	-3.26531E1	-3.259E1	2.68016E1	1.19749E-7	2.51847E-3	2.51847E-3	6.29128E-3	3.03286E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.15773E-1	-7.98678E-1	-9.13136E0	-9.14195E0	4.62532E-3	9.37223E-2	2.71927E1	-3.26573E1	-3.26302E1	2.67989E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00197E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.15773E-1	-7.98512E-1	-9.13155E0	-9.14211E0	4.33922E-3	9.37462E-2	2.72927E1	-3.26667E1	-3.26419E1	2.67932E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.15701E-1	-7.98512E-1	-9.13138E0	-9.14204E0	4.673E-3	9.38654E-2	2.7346E1	-3.26579E1	-3.26494E1	2.68082E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.15749E-1	-7.98607E-1	-9.13131E0	-9.1418E0	4.31538E-3	9.37939E-2	2.74864E1	-3.2644E1	-3.2633E1	2.68105E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.03449E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.15916E-1	-7.98869E-1	-9.13138E0	-9.1418E0	4.64916E-3	9.39131E-2	2.72644E1	-3.26432E1	-3.26235E1	2.68144E1	1.20293E-7	2.52342E-3	2.52342E-3	6.32858E-3	3.00097E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.1594E-1	-7.98488E-1	-9.13177E0	-9.14195E0	4.45843E-3	9.38177E-2	2.71175E1	-3.26378E1	-3.26307E1	2.6789E1	1.20171E-7	2.51296E-3	2.51296E-3	6.33648E-3	3.00916E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.15892E-1	-7.98249E-1	-9.1316E0	-9.14176E0	4.43459E-3	9.38654E-2	2.72168E1	-3.26488E1	-3.26398E1	2.68046E1	1.20158E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.15773E-1	-7.98392E-1	-9.13138E0	-9.14185E0	4.52995E-3	9.38654E-2	2.72414E1	-3.26717E1	-3.26452E1	2.68022E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.15821E-1	-7.98464E-1	-9.13153E0	-9.14147E0	4.3869E-3	9.38416E-2	2.71008E1	-3.26446E1	-3.26284E1	2.67872E1	1.20278E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.15916E-1	-7.98416E-1	-9.1315E0	-9.14164E0	4.76837E-3	9.38654E-2	2.72961E1	-3.26248E1	-3.26506E1	2.67704E1	1.19861E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16131E-1	-7.98345E-1	-9.13148E0	-9.14176E0	4.79221E-3	9.40323E-2	2.7537E1	-3.26524E1	-3.2602E1	2.67824E1	1.19809E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.15916E-1	-7.98225E-1	-9.13141E0	-9.14207E0	4.57764E-3	9.41992E-2	2.7449E1	-3.26891E1	-3.26154E1	2.67955E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01085E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.15821E-1	-7.98512E-1	-9.13148E0	-9.14168E0	4.74453E-3	9.43899E-2	2.7412E1	-3.26561E1	-3.26693E1	2.68118E1	1.20055E-7	2.51203E-3	2.51203E-3	6.33436E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16011E-1	-7.98512E-1	-9.13136E0	-9.14161E0	4.8399E-3	9.41277E-2	2.72833E1	-3.26531E1	-3.26307E1	2.68172E1	1.20383E-7	2.52538E-3	2.52538E-3	6.30192E-3	2.9978E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.16035E-1	-7.98678E-1	-9.13184E0	-9.14185E0	4.64916E-3	9.41038E-2	2.72282E1	-3.26723E1	-3.26332E1	2.68118E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.98665E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16083E-1	-7.98821E-1	-9.13172E0	-9.14183E0	4.86374E-3	9.38416E-2	2.73472E1	-3.26741E1	-3.25852E1	2.68118E1	1.19953E-7	2.51632E-3	2.51632E-3	6.28056E-3	2.97394E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.16083E-1	-7.98821E-1	-9.13126E0	-9.14176E0	4.41074E-3	9.41277E-2	2.73654E1	-3.26243E1	-3.25009E1	2.68041E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16011E-1	-7.98631E-1	-9.13146E0	-9.14204E0	4.57764E-3	9.41277E-2	2.72526E1	-3.26266E1	-3.26425E1	2.68059E1	1.20106E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.9943E-1