[Scan]
initial_time=2016-01-28T22:50:33
final_time=2016-01-28T22:50:53
ip_count=19
run=1026
dataset=10
scan=764
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09441E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=1.38321E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=1.9944E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=3.389E-10
ql4_vset=
ql4_vmon=-9.14149E0
ql4_imon=-1.47545E-10
mult1=-1.04199E-8
mult2=-2.75243E-9
rf_tmon=-3.86659E-3
rf_agc=3.37508E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.29153E-3
ql5_imon=1.68149E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62889E0
bslens_imon=2.51612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05096E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53478E1
cs_ef1b_imon=3.182E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=1.08688E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42483E0
lens1_imon=2.66032E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.97693E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.3933E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.04937E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.22081E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.28662E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=2.44126E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.10271E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23167E0
cs_ionrep_imon=9.57102E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.919E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01977E1
cs_anode1_imon=1.95953E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.2233E-8
tplens_vset=1.4E-1
tplens_vmon=1.67448E0
tplens_imon=-1.62358E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26297E1
iondef3_imon=1.5119E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26432E1
iondef2_imon=1.57932E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=3.99656E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=8.43546E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3385E1
lens5b_imon=2.19288E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.14019E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52127E0
os_ea2_imon=-5.30063E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.18308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0936E0
os_ef2alow_imon=-2.41768E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01028E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10673E1
os_restr2_imon=3.3867E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.31334E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.10297E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73835E1
iondef1_imon=1.06273E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67901E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.07699E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.45438E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-7.88688E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02038E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56123E1
einzel_imon=7.77434E-6
window_vset=0.0E0
window_vmon=2.25151E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86891E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=6.70868E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.62577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.09441E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48277E0
defgridb_imon=6.29411E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33172E1
os_fil1_imon=9.40318E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07545E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62314E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31346E1
cs_fil1_imon=8.206E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.62356E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64216E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57671E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15133E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.41481E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.06531E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.17226E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21766E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.16355E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=185
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.15892E-1	-7.98631E-1	-9.13172E0	-9.14178E0	4.50611E-3	9.43422E-2	2.71543E1	-3.26663E1	-3.26134E1	2.6792E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01347E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.15821E-1	-7.98583E-1	-9.1315E0	-9.14183E0	4.22001E-3	9.38654E-2	2.71481E1	-3.26874E1	-3.2637E1	2.68319E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.15868E-1	-7.98559E-1	-9.13174E0	-9.1419E0	4.50611E-3	9.38654E-2	2.74349E1	-3.26585E1	-3.26358E1	2.68076E1	1.20243E-7	2.52131E-3	2.52131E-3	6.30212E-3	2.99845E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.15797E-1	-7.98535E-1	-9.13165E0	-9.1418E0	4.3869E-3	9.38654E-2	2.74211E1	-3.26675E1	-3.25978E1	2.6822E1	1.20137E-7	2.52139E-3	2.52139E-3	6.27954E-3	3.00676E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.15797E-1	-7.98488E-1	-9.13179E0	-9.14178E0	4.3869E-3	9.408E-2	2.73261E1	-3.26446E1	-3.26104E1	2.68082E1	1.20158E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.15725E-1	-7.98345E-1	-9.13167E0	-9.14164E0	4.41074E-3	9.377E-2	2.72084E1	-3.26508E1	-3.26331E1	2.68148E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02922E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.15654E-1	-7.9844E-1	-9.13165E0	-9.14166E0	4.31538E-3	9.39846E-2	2.72925E1	-3.26332E1	-3.26158E1	2.68052E1	1.20383E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.15749E-1	-7.98345E-1	-9.13141E0	-9.14149E0	4.33922E-3	9.40561E-2	2.73952E1	-3.26705E1	-3.26212E1	2.67848E1	1.19965E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.15964E-1	-7.9844E-1	-9.13148E0	-9.14178E0	4.3869E-3	9.36508E-2	2.72702E1	-3.26086E1	-3.26434E1	2.68088E1	1.20226E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.15773E-1	-7.98368E-1	-9.13146E0	-9.14166E0	4.33922E-3	9.377E-2	2.74066E1	-3.26999E1	-3.2611E1	2.68106E1	1.20174E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00302E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.15916E-1	-7.98345E-1	-9.13143E0	-9.14156E0	4.673E-3	9.38654E-2	2.74392E1	-3.26884E1	-3.26266E1	2.67962E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.1594E-1	-7.9813E-1	-9.13141E0	-9.1418E0	4.76837E-3	9.38892E-2	2.75322E1	-3.26785E1	-3.26225E1	2.67932E1	1.20191E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.0041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16107E-1	-7.98225E-1	-9.13136E0	-9.14171E0	4.74453E-3	9.40561E-2	2.7255E1	-3.26413E1	-3.26054E1	2.67905E1	1.20414E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.16512E-1	-7.98345E-1	-9.13138E0	-9.14149E0	4.48227E-3	9.38177E-2	2.71633E1	-3.26554E1	-3.2605E1	2.68076E1	1.19902E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16083E-1	-7.98082E-1	-9.13138E0	-9.14166E0	4.57764E-3	9.39369E-2	2.74373E1	-3.26404E1	-3.26128E1	2.68016E1	1.19913E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16035E-1	-7.98702E-1	-9.13143E0	-9.14166E0	4.00543E-3	9.38892E-2	2.73135E1	-3.26657E1	-3.2626E1	2.67944E1	1.20017E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00563E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16202E-1	-7.98821E-1	-9.13148E0	-9.1418E0	3.93391E-3	9.4223E-2	2.71273E1	-3.27017E1	-3.26116E1	2.67902E1	1.20158E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.04063E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16417E-1	-7.98655E-1	-9.1316E0	-9.14168E0	4.19617E-3	9.38416E-2	2.72591E1	-3.26443E1	-3.26508E1	2.67992E1	1.19713E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.01209E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16464E-1	-7.98488E-1	-9.13148E0	-9.14195E0	4.57764E-3	9.377E-2	2.73482E1	-3.26166E1	-3.27522E1	2.6796E1	1.19902E-7	2.52276E-3	2.52276E-3	6.31278E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09441E0	-8.16274E-1	-7.98631E-1	-9.13131E0	-9.14149E0	4.29153E-3	9.38416E-2	2.73835E1	-3.26432E1	-3.26297E1	2.67901E1	1.198E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99175E-1