[Scan]
initial_time=2016-01-28T22:51:00
final_time=2016-01-28T22:51:19
ip_count=19
run=1026
dataset=10
scan=765
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08741E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=1.39083E-8
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=2.01749E-9
ql3_vset=
ql3_vmon=-9.13196E0
ql3_imon=3.68822E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-1.98221E-10
mult1=-9.76447E-9
mult2=-2.82241E-9
rf_tmon=-4.64461E-3
rf_agc=3.28649E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.69678E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65412E0
bslens_imon=2.54496E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20067E1
lens5a_imon=2.00038E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05021E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53693E1
cs_ef1b_imon=3.19045E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04838E1
cs_ea1_imon=1.10346E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44947E0
lens1_imon=2.96314E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64422E1
os_ef1alow_imon=2.98849E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03883E1
cs_ea2_imon=1.39799E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84312E1
cs_ef1a_imon=3.03843E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.15136E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11038E1
os_restr1_imon=4.27478E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15558E1
os_ea1_imon=2.43189E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63638E1
os_ef1bup_imon=3.10599E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2533E0
cs_ionrep_imon=9.64312E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01858E1
cs_anode1_imon=1.96805E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.12839E-8
tplens_vset=1.4E-1
tplens_vmon=1.64744E0
tplens_imon=-2.45272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.49027E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26957E1
iondef2_imon=1.584E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98227E-4
ql6_vset=1.0E-1
ql6_vmon=9.39608E-2
ql6_imon=4.01901E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2503E0
ionrepsh_imon=8.63373E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33988E1
lens5b_imon=2.19E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74893E1
cs_ef2b_imon=3.13206E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49002E0
os_ea2_imon=-6.56236E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70988E1
cs_ef2a_imon=3.19632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09648E0
os_ef2alow_imon=-2.53124E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85592E-1
os_ef2bup_imon=-5.33295E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10628E1
os_restr2_imon=3.36633E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.31478E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.10171E-5
iondef1_vset=2.763E1
iondef1_vmon=2.70612E1
iondef1_imon=1.09697E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.1044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.96807E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.21984E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11668E0
cs_ionaccel_imon=-7.20961E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55934E1
einzel_imon=7.66214E-6
window_vset=0.0E0
window_vmon=2.29095E-1
window_imon=-8.23776E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.86834E1
mask2_imon=-5.44707E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.32874E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93687E3
defgrida_imon=6.68345E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.28908E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33101E1
os_fil1_imon=9.4406E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07195E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60686E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31368E1
cs_fil1_imon=7.65395E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.68578E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61007E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1313E-2
os_fil2_imon=-2.31543E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18885E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.46017E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29454E-1
cs_fil2_imon=-2.26035E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51565E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21315E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.18028E-1
res40_imon=-2.33295E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=191
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.16083E-1	-7.98678E-1	-9.13169E0	-9.14166E0	4.64916E-3	9.377E-2	2.71807E1	-3.26639E1	-3.26549E1	2.67879E1	1.20017E-7	2.51334E-3	2.51334E-3	6.29098E-3	3.00563E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09711E0	-8.1594E-1	-7.98345E-1	-9.13165E0	-9.14142E0	4.57764E-3	9.40561E-2	2.72847E1	-3.26629E1	-3.26288E1	2.67887E1	1.19851E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16178E-1	-7.98249E-1	-9.1315E0	-9.14166E0	4.64916E-3	9.40084E-2	2.72094E1	-3.26635E1	-3.26333E1	2.68171E1	1.20132E-7	2.51941E-3	2.51941E-3	6.32592E-3	2.99318E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.16059E-1	-7.98178E-1	-9.13148E0	-9.1418E0	4.76837E-3	9.38177E-2	2.72727E1	-3.26458E1	-3.26278E1	2.67656E1	1.20016E-7	2.51345E-3	2.51345E-3	6.33297E-3	3.00878E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16083E-1	-7.98488E-1	-9.13138E0	-9.14161E0	4.45843E-3	9.38177E-2	2.72426E1	-3.26765E1	-3.2626E1	2.6816E1	1.19861E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.16178E-1	-7.98321E-1	-9.13131E0	-9.14149E0	4.45843E-3	9.377E-2	2.74827E1	-3.26502E1	-3.26526E1	2.68007E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16035E-1	-7.98512E-1	-9.13131E0	-9.14178E0	4.43459E-3	9.33647E-2	2.72941E1	-3.2656E1	-3.25911E1	2.68294E1	1.19965E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16202E-1	-7.98416E-1	-9.13146E0	-9.14192E0	4.48227E-3	9.38177E-2	2.71939E1	-3.26554E1	-3.25984E1	2.67926E1	1.2035E-7	2.52585E-3	2.52585E-3	6.31299E-3	2.99879E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16178E-1	-7.98345E-1	-9.13134E0	-9.14173E0	4.52995E-3	9.3627E-2	2.72931E1	-3.26735E1	-3.26092E1	2.6807E1	1.20122E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.1594E-1	-7.9844E-1	-9.13129E0	-9.1419E0	4.62532E-3	9.39131E-2	2.72775E1	-3.26561E1	-3.26368E1	2.68022E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16131E-1	-7.98368E-1	-9.13126E0	-9.14178E0	4.76837E-3	9.38654E-2	2.71279E1	-3.26849E1	-3.26092E1	2.67968E1	1.19953E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16083E-1	-7.98512E-1	-9.1316E0	-9.14207E0	4.3869E-3	9.39846E-2	2.71074E1	-3.26741E1	-3.26675E1	2.68148E1	1.20244E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.01475E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.15964E-1	-7.98321E-1	-9.13155E0	-9.14183E0	4.3869E-3	9.39608E-2	2.72645E1	-3.26556E1	-3.26046E1	2.68238E1	1.19902E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0965E0	-8.16059E-1	-7.98321E-1	-9.13124E0	-9.14178E0	4.33922E-3	9.39608E-2	2.74239E1	-3.26652E1	-3.26174E1	2.68088E1	1.20055E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00453E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.16202E-1	-7.98321E-1	-9.1315E0	-9.14166E0	4.29153E-3	9.39608E-2	2.7406E1	-3.2672E1	-3.26189E1	2.68106E1	1.20069E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16226E-1	-7.98249E-1	-9.13179E0	-9.14178E0	4.62532E-3	9.38892E-2	2.72803E1	-3.26531E1	-3.26366E1	2.67885E1	1.19861E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01609E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.1625E-1	-7.98225E-1	-9.132E0	-9.14171E0	4.74453E-3	9.38177E-2	2.71321E1	-3.26831E1	-3.26146E1	2.6792E1	1.20106E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16011E-1	-7.98392E-1	-9.13174E0	-9.14195E0	4.48227E-3	9.40084E-2	2.71311E1	-3.26762E1	-3.26077E1	2.68136E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16059E-1	-7.98273E-1	-9.1316E0	-9.14185E0	4.43459E-3	9.39369E-2	2.71116E1	-3.26116E1	-3.25677E1	2.67998E1	1.20004E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.15988E-1	-7.98345E-1	-9.13196E0	-9.14204E0	4.57764E-3	9.39608E-2	2.70612E1	-3.26957E1	-3.26176E1	2.68136E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02511E-1