[Scan]
initial_time=2016-01-28T22:51:53
final_time=2016-01-28T22:52:13
ip_count=19
run=1026
dataset=10
scan=767
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.39031E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=2.02576E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=3.1991E-10
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=-2.27022E-10
mult1=-1.07997E-8
mult2=-2.77617E-9
rf_tmon=-4.04345E-3
rf_agc=3.30555E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.3869E-3
ql5_imon=1.69401E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.63148E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.98956E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53478E1
cs_ef1b_imon=3.1838E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02319E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0473E1
cs_ea1_imon=1.09445E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37196E0
lens1_imon=2.76486E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03576E1
cs_ea2_imon=1.39655E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84184E1
cs_ef1a_imon=3.04108E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.14572E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.31184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.45604E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22206E0
cs_ionrep_imon=9.53857E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93532E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=1.96746E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20461E0
olens4_imon=3.13242E-8
tplens_vset=1.4E-1
tplens_vmon=1.63903E0
tplens_imon=-2.52482E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26349E1
iondef3_imon=1.49063E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2652E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98548E-4
ql6_vset=1.0E-1
ql6_vmon=9.4223E-2
ql6_imon=4.00428E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=8.59407E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33886E1
lens5b_imon=2.19252E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.13154E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48101E0
os_ea2_imon=-7.10311E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06897E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10638E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10823E1
os_restr2_imon=3.3795E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30469E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.09793E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72019E1
iondef1_imon=1.09661E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6817E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71777E1
olens3_imon=5.86328E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.19374E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12113E0
cs_ionaccel_imon=-9.11223E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02032E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.89327E-6
window_vset=0.0E0
window_vmon=2.1494E-1
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.87023E1
mask2_imon=-4.75143E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.38281E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.55007E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.19896E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45269E0
defgridb_imon=6.04898E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33132E1
os_fil1_imon=9.41627E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08236E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6052E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31364E1
cs_fil1_imon=6.82448E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.76771E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60896E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07971E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13932E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.72956E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49661E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21279E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.39781E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16464E-1	-7.98154E-1	-9.13138E0	-9.14176E0	4.45843E-3	9.40084E-2	2.72001E1	-3.26431E1	-3.26054E1	2.68142E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.16584E-1	-7.98249E-1	-9.13141E0	-9.14173E0	4.50611E-3	9.38892E-2	2.71502E1	-3.26646E1	-3.2626E1	2.68022E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16345E-1	-7.98345E-1	-9.13134E0	-9.1418E0	4.57764E-3	9.41038E-2	2.7107E1	-3.2688E1	-3.26364E1	2.67992E1	1.19965E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.00563E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16512E-1	-7.98512E-1	-9.13146E0	-9.14185E0	4.22001E-3	9.39131E-2	2.7248E1	-3.26735E1	-3.26194E1	2.67816E1	1.20004E-7	2.52599E-3	2.52599E-3	6.32356E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16298E-1	-7.98225E-1	-9.13165E0	-9.14166E0	4.17233E-3	9.41038E-2	2.71521E1	-3.26511E1	-3.26162E1	2.68069E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16345E-1	-7.98464E-1	-9.13112E0	-9.14178E0	4.36306E-3	9.40323E-2	2.73198E1	-3.26514E1	-3.26119E1	2.6792E1	1.20383E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.03185E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16369E-1	-7.98488E-1	-9.13124E0	-9.1418E0	4.57764E-3	9.42469E-2	2.74691E1	-3.26621E1	-3.2608E1	2.67806E1	1.20174E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16202E-1	-7.98559E-1	-9.13124E0	-9.14218E0	4.43459E-3	9.42469E-2	2.72462E1	-3.26621E1	-3.26236E1	2.68298E1	1.19965E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09487E0	-8.1625E-1	-7.98512E-1	-9.13107E0	-9.14207E0	4.72069E-3	9.40323E-2	2.72528E1	-3.26524E1	-3.26344E1	2.681E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16298E-1	-7.98178E-1	-9.13115E0	-9.14202E0	4.41074E-3	9.39608E-2	2.73381E1	-3.26176E1	-3.2623E1	2.67992E1	1.2035E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.9829E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16226E-1	-7.98345E-1	-9.13146E0	-9.14221E0	4.3869E-3	9.408E-2	2.73982E1	-3.26693E1	-3.25978E1	2.67902E1	1.19851E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.97394E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16274E-1	-7.98535E-1	-9.1316E0	-9.14221E0	4.33922E-3	9.44614E-2	2.72943E1	-3.26591E1	-3.26044E1	2.67848E1	1.20122E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.98481E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.1625E-1	-7.98225E-1	-9.13148E0	-9.14185E0	4.31538E-3	9.42469E-2	2.7263E1	-3.26573E1	-3.26543E1	2.67998E1	1.20137E-7	2.52585E-3	2.52585E-3	6.31858E-3	3.01475E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09657E0	-8.16298E-1	-7.98488E-1	-9.13165E0	-9.14173E0	4.31538E-3	9.39369E-2	2.73442E1	-3.26621E1	-3.26176E1	2.67956E1	1.20004E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.02253E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09634E0	-8.15892E-1	-7.98416E-1	-9.13115E0	-9.14197E0	4.33922E-3	9.37939E-2	2.74481E1	-3.26999E1	-3.26062E1	2.67908E1	1.20174E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.16131E-1	-7.98678E-1	-9.13157E0	-9.14195E0	4.14848E-3	9.38177E-2	2.7452E1	-3.26514E1	-3.26296E1	2.68034E1	1.19809E-7	2.50898E-3	2.50898E-3	6.33486E-3	2.9874E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.15845E-1	-7.98655E-1	-9.13146E0	-9.14192E0	4.3869E-3	9.40084E-2	2.72727E1	-3.26325E1	-3.26101E1	2.67856E1	1.20278E-7	2.52318E-3	2.52318E-3	6.34037E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.16059E-1	-7.98726E-1	-9.13157E0	-9.14233E0	4.36306E-3	9.41753E-2	2.70948E1	-3.26266E1	-3.2611E1	2.67896E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.1625E-1	-7.98464E-1	-9.13129E0	-9.14218E0	4.31538E-3	9.41992E-2	2.71293E1	-3.26703E1	-3.26856E1	2.67872E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16417E-1	-7.98392E-1	-9.13141E0	-9.14221E0	4.3869E-3	9.4223E-2	2.72019E1	-3.2652E1	-3.26349E1	2.6817E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0071E-1