[Scan]
initial_time=2016-01-28T22:52:47
final_time=2016-01-28T22:53:06
ip_count=19
run=1026
dataset=10
scan=769
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08817E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=1.39481E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.01771E-9
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=3.59213E-10
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=-1.92595E-10
mult1=-1.00786E-8
mult2=-2.72914E-9
rf_tmon=-4.60976E-3
rf_agc=3.27074E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.73531E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62551E0
bslens_imon=2.43354E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12444E2
lens4a_imon=2.05288E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53835E1
cs_ef1b_imon=3.17748E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02482E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=1.09777E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41562E0
lens1_imon=2.67776E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03743E1
cs_ea2_imon=1.39826E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84215E1
cs_ef1a_imon=3.0416E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.14265E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11291E1
os_restr1_imon=4.32223E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15618E1
os_ea1_imon=2.44947E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.08991E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21552E0
cs_ionrep_imon=9.70348E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01775E1
cs_anode1_imon=1.96914E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.11695E-8
tplens_vset=1.4E-1
tplens_vmon=1.63494E0
tplens_imon=-7.2365E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26231E1
iondef3_imon=1.48604E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26608E1
iondef2_imon=1.58408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98236E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.96519E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30106E0
ionrepsh_imon=8.56379E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33469E1
lens5b_imon=2.19711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.14516E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46269E0
os_ea2_imon=-7.05919E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.0034E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71333E1
cs_ef2a_imon=3.20424E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07193E0
os_ef2alow_imon=-2.60586E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94335E-1
os_ef2bup_imon=-5.37216E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10932E1
os_restr2_imon=3.36549E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23105E2
cs_ionfoca_imon=6.31309E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01885E1
cs_anode2_imon=2.09147E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72231E1
iondef1_imon=1.11688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.09511E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=6.02852E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.21178E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11045E0
cs_ionaccel_imon=-9.23837E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02035E2
cs_ionfocb_imon=1.47216E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56283E1
einzel_imon=7.8477E-6
window_vset=0.0E0
window_vmon=2.30428E-1
window_imon=-1.10108E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.3924E-4
mask2_vset=0.0E0
mask2_vmon=-1.86871E1
mask2_imon=-6.28441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92732E3
multa_neg_imon=7.11971E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.77639E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.27899E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37898E0
defgridb_imon=6.18177E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.331E1
os_fil1_imon=9.42524E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06038E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60383E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31414E1
cs_fil1_imon=7.27004E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.19301E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60739E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.99037E-2
os_fil2_imon=-2.40275E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12666E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.56289E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29028E-1
cs_fil2_imon=-2.14211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3679E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21278E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.03027E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.82954E-1
res40_imon=-2.38692E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.15988E-1	-7.98512E-1	-9.13162E0	-9.14204E0	4.55379E-3	9.41277E-2	2.72108E1	-3.26969E1	-3.26314E1	2.68052E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.98222E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09657E0	-8.1594E-1	-7.98488E-1	-9.13146E0	-9.14183E0	4.50611E-3	9.4223E-2	2.70697E1	-3.2675E1	-3.26225E1	2.68112E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9892E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09719E0	-8.15916E-1	-7.98678E-1	-9.13165E0	-9.14197E0	4.36306E-3	9.40084E-2	2.73265E1	-3.26389E1	-3.26511E1	2.68136E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.16131E-1	-7.98559E-1	-9.13141E0	-9.14209E0	4.36306E-3	9.41753E-2	2.7265E1	-3.26472E1	-3.26296E1	2.68004E1	1.19925E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.0041E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09673E0	-8.15868E-1	-7.98345E-1	-9.13162E0	-9.14202E0	4.14848E-3	9.41992E-2	2.72306E1	-3.26567E1	-3.26164E1	2.6816E1	1.20174E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.03976E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16083E-1	-7.97987E-1	-9.13146E0	-9.14199E0	3.95775E-3	9.42469E-2	2.74409E1	-3.26639E1	-3.26392E1	2.68136E1	1.19913E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.16083E-1	-7.98154E-1	-9.13153E0	-9.14209E0	4.07696E-3	9.39369E-2	2.71759E1	-3.26549E1	-3.26472E1	2.6803E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09657E0	-8.15868E-1	-7.98106E-1	-9.13186E0	-9.14199E0	4.31538E-3	9.408E-2	2.71794E1	-3.26744E1	-3.26272E1	2.67866E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.15964E-1	-7.98249E-1	-9.1316E0	-9.14226E0	4.33922E-3	9.38654E-2	2.72727E1	-3.26308E1	-3.26092E1	2.67992E1	1.19809E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.15845E-1	-7.98392E-1	-9.13165E0	-9.14235E0	4.43459E-3	9.40323E-2	2.74277E1	-3.26849E1	-3.26104E1	2.68088E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01347E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.15988E-1	-7.98249E-1	-9.13172E0	-9.1424E0	4.48227E-3	9.38654E-2	2.7266E1	-3.26819E1	-3.26326E1	2.6807E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.02511E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16107E-1	-7.98178E-1	-9.13165E0	-9.14226E0	4.86374E-3	9.39608E-2	2.74835E1	-3.26648E1	-3.26295E1	2.68111E1	1.20122E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16107E-1	-7.98535E-1	-9.13153E0	-9.14216E0	4.74453E-3	9.37462E-2	2.73111E1	-3.26404E1	-3.26188E1	2.67986E1	1.19941E-7	2.52236E-3	2.52236E-3	6.33388E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16083E-1	-7.98535E-1	-9.13186E0	-9.14192E0	4.05312E-3	9.38177E-2	2.71651E1	-3.26789E1	-3.26488E1	2.68076E1	1.20297E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.00942E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16417E-1	-7.9844E-1	-9.13138E0	-9.14207E0	4.55379E-3	9.39608E-2	2.73748E1	-3.26386E1	-3.2647E1	2.67806E1	1.20311E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16083E-1	-7.98464E-1	-9.13143E0	-9.1424E0	4.3869E-3	9.39131E-2	2.73204E1	-3.26732E1	-3.26561E1	2.67902E1	1.20174E-7	2.51662E-3	2.51662E-3	6.35692E-3	3.01609E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16011E-1	-7.98678E-1	-9.13186E0	-9.14216E0	4.45843E-3	9.40084E-2	2.72558E1	-3.26897E1	-3.26374E1	2.6798E1	1.2054E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.02659E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16035E-1	-7.98774E-1	-9.13181E0	-9.14211E0	4.45843E-3	9.36747E-2	2.73321E1	-3.26669E1	-3.26074E1	2.68016E1	1.20158E-7	2.51632E-3	2.51632E-3	6.36144E-3	3.03286E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09356E0	-8.16035E-1	-7.98988E-1	-9.13177E0	-9.14221E0	4.55379E-3	9.37223E-2	2.72138E1	-3.26915E1	-3.26344E1	2.68082E1	1.19978E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.02545E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16059E-1	-7.98416E-1	-9.13172E0	-9.14221E0	4.74453E-3	9.38177E-2	2.72231E1	-3.26608E1	-3.26231E1	2.6801E1	1.20106E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.03027E-1