[Scan]
initial_time=2016-01-28T22:53:13
final_time=2016-01-28T22:53:33
ip_count=19
run=1026
dataset=10
scan=770
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08777E-4
ql1_vset=
ql1_vmon=-8.15821E-1
ql1_imon=1.39122E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=2.01626E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=3.04139E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-2.14183E-10
mult1=-9.83671E-9
mult2=-2.74656E-9
rf_tmon=-4.87893E-3
rf_agc=3.33877E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.70648E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65352E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19839E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05136E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53412E1
cs_ef1b_imon=3.17659E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05024E1
cs_ea1_imon=1.0894E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41282E0
lens1_imon=2.8658E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.39727E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.05045E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.14388E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11532E1
os_restr1_imon=4.31653E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=2.45568E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=9.4124E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=1.96782E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.12779E-8
tplens_vset=1.4E-1
tplens_vmon=1.66126E0
tplens_imon=-1.65963E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.50253E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98425E-4
ql6_vset=1.0E-1
ql6_vmon=9.39846E-2
ql6_imon=3.98045E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=8.52918E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33718E1
lens5b_imon=2.1954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46058E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00507E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05516E0
os_ef2alow_imon=-2.48976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.14588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.36472E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.31262E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.10838E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.09589E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=5.96207E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.19655E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13555E0
cs_ionaccel_imon=-9.86907E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02041E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56417E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=2.43772E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82663E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.8659E1
mask2_imon=-4.24688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.26745E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.651E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.46572E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4948E0
defgridb_imon=6.04898E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3309E1
os_fil1_imon=9.41573E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08032E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60529E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31361E1
cs_fil1_imon=8.60844E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.3893E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6083E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18289E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57617E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.09534E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68031E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21278E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.27461E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.77912E-1
res40_imon=-2.29515E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=217
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16369E-1	-7.98726E-1	-9.13134E0	-9.14223E0	4.57764E-3	9.41277E-2	2.72992E1	-3.26626E1	-3.26632E1	2.6801E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.99941E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16011E-1	-7.98941E-1	-9.13167E0	-9.14199E0	4.673E-3	9.39131E-2	2.73137E1	-3.2667E1	-3.26162E1	2.6801E1	1.19809E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.1594E-1	-7.98869E-1	-9.13186E0	-9.14223E0	4.76837E-3	9.41515E-2	2.72947E1	-3.26585E1	-3.26017E1	2.67717E1	1.19872E-7	2.52362E-3	2.52362E-3	6.30182E-3	3.00676E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.15892E-1	-7.98702E-1	-9.1315E0	-9.14223E0	4.76837E-3	9.40323E-2	2.72959E1	-3.26297E1	-3.26217E1	2.68069E1	1.19991E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16011E-1	-7.98535E-1	-9.13143E0	-9.14218E0	4.93526E-3	9.41515E-2	2.73252E1	-3.26785E1	-3.26337E1	2.67937E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09495E0	-8.16059E-1	-7.98583E-1	-9.13115E0	-9.14207E0	4.60148E-3	9.43899E-2	2.72839E1	-3.26608E1	-3.26278E1	2.68052E1	1.19933E-7	2.51863E-3	2.51863E-3	6.29926E-3	3.00378E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16131E-1	-7.98559E-1	-9.13131E0	-9.14195E0	4.64916E-3	9.39846E-2	2.72665E1	-3.26242E1	-3.26585E1	2.6825E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16083E-1	-7.98488E-1	-9.13146E0	-9.14173E0	4.52995E-3	9.39846E-2	2.73942E1	-3.26744E1	-3.26254E1	2.68214E1	1.19913E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16154E-1	-7.98845E-1	-9.13131E0	-9.14199E0	4.64916E-3	9.39846E-2	2.73021E1	-3.26313E1	-3.2649E1	2.682E1	1.20106E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.9943E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.15988E-1	-7.98464E-1	-9.13122E0	-9.14197E0	4.31538E-3	9.39608E-2	2.72025E1	-3.26661E1	-3.26119E1	2.68247E1	1.20278E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16154E-1	-7.98249E-1	-9.13136E0	-9.14211E0	4.33922E-3	9.41992E-2	2.74632E1	-3.26579E1	-3.26172E1	2.68256E1	1.19841E-7	2.51393E-3	2.51393E-3	6.33388E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16298E-1	-7.98345E-1	-9.13143E0	-9.14249E0	4.1008E-3	9.43422E-2	2.72806E1	-3.26658E1	-3.26487E1	2.68013E1	1.20278E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.1594E-1	-7.98607E-1	-9.13143E0	-9.14209E0	4.22001E-3	9.41992E-2	2.73057E1	-3.26638E1	-3.26331E1	2.68186E1	1.19933E-7	2.5208E-3	2.5208E-3	6.32099E-3	3.00249E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.15916E-1	-7.98297E-1	-9.13141E0	-9.1423E0	4.29153E-3	9.43422E-2	2.72498E1	-3.26699E1	-3.265E1	2.68046E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.15988E-1	-7.98416E-1	-9.13179E0	-9.14199E0	4.57764E-3	9.42469E-2	2.72868E1	-3.2685E1	-3.26101E1	2.68148E1	1.20383E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.15797E-1	-7.98631E-1	-9.13165E0	-9.14207E0	4.74453E-3	9.41753E-2	2.73116E1	-3.2649E1	-3.26331E1	2.68128E1	1.19959E-7	2.51214E-3	2.51214E-3	6.31555E-3	2.99346E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.15892E-1	-7.98678E-1	-9.13155E0	-9.1418E0	4.45843E-3	9.43184E-2	2.73014E1	-3.26653E1	-3.26073E1	2.67982E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.1625E-1	-7.98583E-1	-9.13148E0	-9.14192E0	4.3869E-3	9.42469E-2	2.72952E1	-3.26619E1	-3.26486E1	2.67817E1	1.19872E-7	2.51359E-3	2.51359E-3	6.30182E-3	2.99879E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16226E-1	-7.98774E-1	-9.13131E0	-9.14199E0	4.43459E-3	9.40323E-2	2.73027E1	-3.26753E1	-3.26236E1	2.68168E1	1.19851E-7	2.52492E-3	2.52492E-3	6.34518E-3	3.03286E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09634E0	-8.15821E-1	-7.9875E-1	-9.13155E0	-9.14202E0	4.74453E-3	9.39846E-2	2.73027E1	-3.26567E1	-3.2623E1	2.6792E1	1.19913E-7	2.52209E-3	2.52209E-3	6.27461E-3	3.01871E-1