[Scan]
initial_time=2016-01-28T22:53:40
final_time=2016-01-28T22:54:00
ip_count=19
run=1026
dataset=10
scan=771
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.15749E-1
ql1_imon=1.38673E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.07373E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=3.45254E-10
ql4_vset=
ql4_vmon=-9.14233E0
ql4_imon=-2.15387E-10
mult1=-9.36713E-9
mult2=-2.85035E-9
rf_tmon=-5.13127E-3
rf_agc=3.30332E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.26769E-3
ql5_imon=1.66501E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64691E0
bslens_imon=2.44402E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=1.98451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12451E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53538E1
cs_ef1b_imon=3.18236E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02373E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04946E1
cs_ea1_imon=1.09986E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40861E0
lens1_imon=2.56299E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64572E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04393E1
cs_ea2_imon=1.42971E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=3.04108E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.15611E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11111E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15161E1
os_ea1_imon=2.46037E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24789E0
cs_ionrep_imon=9.47729E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93514E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=1.96422E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.13199E-8
tplens_vset=1.4E-1
tplens_vmon=1.63182E0
tplens_imon=-2.84926E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.50758E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.59302E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.9845E-4
ql6_vset=1.0E-1
ql6_vmon=9.41992E-2
ql6_imon=3.98362E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25871E0
ionrepsh_imon=8.71304E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.20946E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46179E0
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71162E1
cs_ef2a_imon=3.19389E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.37804E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=3.37806E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01785E1
cs_anode2_imon=2.10081E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72907E1
iondef1_imon=1.09048E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.10035E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.01131E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.22783E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-7.52649E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02137E2
cs_ionfocb_imon=1.47399E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.86083E-6
window_vset=0.0E0
window_vmon=2.25752E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39253E-4
mask2_vset=0.0E0
mask2_vmon=-1.86819E1
mask2_imon=-4.89559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.63876E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.89614E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=7.17012E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59706E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3313E1
os_fil1_imon=9.40504E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07912E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60664E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31354E1
cs_fil1_imon=7.95973E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.91187E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63126E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95074E-2
os_fil2_imon=-2.37164E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.44083E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.12537E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35245E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21484E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31014E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51935E-3
foreline_cvt_pmon=2.51935E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09748E-1
res40_imon=-2.37443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.15988E-1	-7.98512E-1	-9.13131E0	-9.14199E0	4.62532E-3	9.43184E-2	2.73187E1	-3.26785E1	-3.26372E1	2.6803E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.16059E-1	-7.98464E-1	-9.13172E0	-9.14211E0	4.31538E-3	9.41277E-2	2.73219E1	-3.26524E1	-3.26248E1	2.68046E1	1.20004E-7	2.51417E-3	2.51417E-3	6.33977E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.16083E-1	-7.98321E-1	-9.13177E0	-9.14185E0	4.24385E-3	9.40323E-2	2.72833E1	-3.26773E1	-3.26402E1	2.67956E1	1.19766E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.00942E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.15868E-1	-7.9844E-1	-9.13167E0	-9.14199E0	4.17233E-3	9.43184E-2	2.73225E1	-3.27071E1	-3.26206E1	2.68202E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16274E-1	-7.98464E-1	-9.1316E0	-9.14207E0	4.41074E-3	9.42469E-2	2.72974E1	-3.26838E1	-3.2629E1	2.68029E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.16107E-1	-7.98202E-1	-9.13172E0	-9.14204E0	4.43459E-3	9.41515E-2	2.73198E1	-3.26254E1	-3.26144E1	2.6829E1	1.19861E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16059E-1	-7.98035E-1	-9.13153E0	-9.14195E0	4.1008E-3	9.408E-2	2.73123E1	-3.26446E1	-3.26374E1	2.67866E1	1.19809E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.1594E-1	-7.98154E-1	-9.13155E0	-9.14204E0	4.19617E-3	9.38892E-2	2.72817E1	-3.26801E1	-3.26104E1	2.67968E1	1.19713E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.00676E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.15678E-1	-7.98321E-1	-9.13134E0	-9.14197E0	4.29153E-3	9.38654E-2	2.71969E1	-3.26627E1	-3.2614E1	2.6825E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.15773E-1	-7.98464E-1	-9.13174E0	-9.14176E0	4.12464E-3	9.408E-2	2.7288E1	-3.26921E1	-3.26225E1	2.67792E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00453E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.15749E-1	-7.98297E-1	-9.13148E0	-9.14171E0	4.22001E-3	9.38654E-2	2.72805E1	-3.26488E1	-3.26362E1	2.68028E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.15749E-1	-7.98321E-1	-9.13186E0	-9.14195E0	4.29153E-3	9.41753E-2	2.73832E1	-3.26663E1	-3.26296E1	2.67992E1	1.19809E-7	2.51007E-3	2.51007E-3	6.34037E-3	3.03449E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.15749E-1	-7.98368E-1	-9.13174E0	-9.1419E0	4.1008E-3	9.42945E-2	2.7206E1	-3.26873E1	-3.26128E1	2.67896E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.15892E-1	-7.98464E-1	-9.13193E0	-9.14202E0	4.33922E-3	9.42707E-2	2.74241E1	-3.26437E1	-3.26437E1	2.68198E1	1.20004E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.97901E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.15964E-1	-7.98225E-1	-9.1316E0	-9.14209E0	4.3869E-3	9.41992E-2	2.7356E1	-3.26508E1	-3.26076E1	2.67876E1	1.19683E-7	2.51265E-3	2.51265E-3	6.2815E-3	2.99506E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.15654E-1	-7.98488E-1	-9.13181E0	-9.14211E0	4.26769E-3	9.39608E-2	2.73267E1	-3.26242E1	-3.25821E1	2.68202E1	1.1973E-7	2.51411E-3	2.51411E-3	6.3016E-3	2.98161E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.15535E-1	-7.98345E-1	-9.13167E0	-9.14207E0	4.22001E-3	9.40323E-2	2.73021E1	-3.26478E1	-3.25953E1	2.67854E1	1.19809E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.15797E-1	-7.98655E-1	-9.13162E0	-9.14195E0	4.26769E-3	9.39846E-2	2.73173E1	-3.26671E1	-3.26457E1	2.67914E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99941E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09379E0	-8.15845E-1	-7.98583E-1	-9.1315E0	-9.14207E0	4.31538E-3	9.42945E-2	2.73275E1	-3.27003E1	-3.25883E1	2.6814E1	1.19991E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.01862E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.15749E-1	-7.98655E-1	-9.1316E0	-9.14233E0	4.26769E-3	9.41992E-2	2.72907E1	-3.26536E1	-3.26236E1	2.68106E1	1.19861E-7	2.51935E-3	2.51935E-3	6.31014E-3	2.9952E-1