[Scan]
initial_time=2016-01-28T22:54:07
final_time=2016-01-28T22:54:26
ip_count=19
run=1026
dataset=10
scan=772
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08831E-4
ql1_vset=
ql1_vmon=-8.16011E-1
ql1_imon=1.39705E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.07404E-9
ql3_vset=
ql3_vmon=-9.13196E0
ql3_imon=3.56984E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=-2.33567E-10
mult1=-9.93304E-9
mult2=-2.7246E-9
rf_tmon=-4.5665E-3
rf_agc=3.26126E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=3.95775E-3
ql5_imon=1.68133E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67275E0
bslens_imon=2.53415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.98271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.18128E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02276E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04706E1
cs_ea1_imon=1.09048E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41822E0
lens1_imon=2.84417E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03504E1
cs_ea2_imon=1.38357E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84436E1
cs_ef1a_imon=3.03964E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.14513E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=4.30247E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15125E1
os_ea1_imon=2.4564E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.09587E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22927E0
cs_ionrep_imon=9.45926E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=1.97251E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.12186E-8
tplens_vset=1.4E-1
tplens_vmon=1.68349E0
tplens_imon=-2.09222E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2653E1
iondef2_imon=1.5941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98479E-4
ql6_vset=1.0E-1
ql6_vmon=9.44376E-2
ql6_imon=3.99882E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26652E0
ionrepsh_imon=8.6842E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33934E1
lens5b_imon=2.1954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46599E0
os_ea2_imon=-6.70656E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71252E1
cs_ef2a_imon=3.1784E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10817E1
os_restr2_imon=3.36796E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.32307E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.09504E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72402E1
iondef1_imon=1.08688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.98513E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.20825E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-8.49956E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55949E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-7.88688E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39398E-4
mask2_vset=0.0E0
mask2_vmon=-1.86728E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.47293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.53564E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.34676E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56397E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33131E1
os_fil1_imon=9.4221E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07497E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60411E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31398E1
cs_fil1_imon=7.12481E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.91187E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62379E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1571E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61227E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.26353E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35245E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21088E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06144E-1
res40_imon=-2.24109E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.16059E-1	-7.98702E-1	-9.13169E0	-9.14178E0	4.52995E-3	9.39608E-2	2.7363E1	-3.26967E1	-3.26411E1	2.67902E1	1.20017E-7	2.52538E-3	2.52538E-3	6.33486E-3	3.01609E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16035E-1	-7.98678E-1	-9.13174E0	-9.14178E0	4.33922E-3	9.37939E-2	2.728E1	-3.26493E1	-3.26266E1	2.68322E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.03027E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.15701E-1	-7.98607E-1	-9.13169E0	-9.14207E0	4.22001E-3	9.40323E-2	2.72845E1	-3.26815E1	-3.26319E1	2.68022E1	1.19913E-7	2.52428E-3	2.52428E-3	6.34588E-3	3.02922E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.15773E-1	-7.98345E-1	-9.13162E0	-9.14195E0	4.76837E-3	9.41277E-2	2.72768E1	-3.26673E1	-3.26443E1	2.67931E1	1.20055E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.15773E-1	-7.98345E-1	-9.13138E0	-9.14207E0	4.33922E-3	9.4223E-2	2.73057E1	-3.26591E1	-3.2638E1	2.68046E1	1.20017E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.03185E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.15892E-1	-7.98106E-1	-9.13138E0	-9.14211E0	4.41074E-3	9.42707E-2	2.73345E1	-3.2653E1	-3.26062E1	2.68124E1	1.20158E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.03545E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.15892E-1	-7.98273E-1	-9.13126E0	-9.14202E0	4.36306E-3	9.43899E-2	2.73279E1	-3.26676E1	-3.26357E1	2.67995E1	1.19978E-7	2.52027E-3	2.52027E-3	6.34099E-3	3.03618E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.15892E-1	-7.98035E-1	-9.13141E0	-9.14192E0	4.50611E-3	9.44138E-2	2.72843E1	-3.26652E1	-3.25948E1	2.6786E1	1.20113E-7	2.5165E-3	2.5165E-3	6.3074E-3	3.02097E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.15916E-1	-7.98297E-1	-9.13169E0	-9.1423E0	4.45843E-3	9.43184E-2	2.72823E1	-3.26639E1	-3.26422E1	2.6801E1	1.2035E-7	2.51581E-3	2.51581E-3	6.34099E-3	3.01742E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16011E-1	-7.98416E-1	-9.13155E0	-9.14168E0	4.22001E-3	9.43422E-2	2.73216E1	-3.26602E1	-3.26119E1	2.67589E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16035E-1	-7.98512E-1	-9.13153E0	-9.14164E0	4.31538E-3	9.41038E-2	2.72829E1	-3.26633E1	-3.26278E1	2.6813E1	1.20036E-7	2.51701E-3	2.51701E-3	6.32099E-3	3.02584E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16083E-1	-7.98035E-1	-9.13167E0	-9.14211E0	4.48227E-3	9.41992E-2	2.73015E1	-3.26735E1	-3.26356E1	2.6795E1					
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09588E0	-8.15845E-1	-7.98082E-1	-9.13191E0	-9.14216E0	4.22001E-3	9.38416E-2	2.73039E1	-3.26633E1	-3.26488E1	2.67974E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02659E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0965E0	-8.15845E-1	-7.9813E-1	-9.132E0	-9.14218E0	4.3869E-3	9.408E-2	2.73766E1	-3.26651E1	-3.26242E1	2.6825E1	1.19861E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.02133E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09634E0	-8.15988E-1	-7.98202E-1	-9.13169E0	-9.14223E0	4.31538E-3	9.39369E-2	2.72853E1	-3.26723E1	-3.26068E1	2.67992E1	1.20278E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.15678E-1	-7.98488E-1	-9.13193E0	-9.14209E0	4.43459E-3	9.41038E-2	2.72642E1	-3.26398E1	-3.26152E1	2.68184E1	1.20017E-7	2.52428E-3	2.52428E-3	6.29645E-3	3.01085E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.15821E-1	-7.98392E-1	-9.13193E0	-9.14207E0	4.74453E-3	9.43184E-2	2.72803E1	-3.26909E1	-3.26266E1	2.67943E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.15845E-1	-7.98368E-1	-9.132E0	-9.14199E0	4.1008E-3	9.39608E-2	2.7311E1	-3.26614E1	-3.26366E1	2.68184E1	1.20055E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.15988E-1	-7.98559E-1	-9.13181E0	-9.14199E0	4.36306E-3	9.38654E-2	2.73063E1	-3.26791E1	-3.26119E1	2.68001E1	1.20158E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16011E-1	-7.9844E-1	-9.13196E0	-9.14214E0	3.95775E-3	9.44376E-2	2.72402E1	-3.2653E1	-3.26302E1	2.68082E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99686E-1