[Scan]
initial_time=2016-01-28T22:55:27
final_time=2016-01-28T22:55:46
ip_count=19
run=1026
dataset=10
scan=775
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=1.39082E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=2.00714E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=3.04735E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-1.73604E-10
mult1=-9.85401E-9
mult2=-2.76833E-9
rf_tmon=-4.47408E-3
rf_agc=3.39639E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.71849E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64734E0
bslens_imon=2.69191E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=1.97731E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.0515E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.18344E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02107E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05124E1
cs_ea1_imon=1.09741E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39616E0
lens1_imon=2.67068E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.99279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03796E1
cs_ea2_imon=1.40357E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.0382E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.15209E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.30319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15247E1
os_ea1_imon=2.43637E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2344E0
cs_ionrep_imon=9.70702E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=1.96638E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20456E0
olens4_imon=3.13664E-8
tplens_vset=1.4E-1
tplens_vmon=1.59247E0
tplens_imon=-1.0068E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26484E1
iondef3_imon=1.49949E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2649E1
iondef2_imon=1.59328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.41277E-2
ql6_imon=4.07721E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26803E0
ionrepsh_imon=8.65582E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33398E1
lens5b_imon=2.17198E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.14236E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4916E0
os_ea2_imon=-4.86476E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00403E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.18885E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0283E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.37409E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.32654E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.08928E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72951E1
iondef1_imon=1.0914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67897E1
iondef4_imon=1.07945E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.99754E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.26887E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-7.59857E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02039E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=2.58188E-1
window_imon=-1.07701E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86927E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.55152E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.62774E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.17988E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51777E0
defgridb_imon=5.84199E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33143E1
os_fil1_imon=9.40204E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07816E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6059E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31364E1
cs_fil1_imon=8.36217E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.27517E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62848E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93972E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52872E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30429E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.61675E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21451E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.98481E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.50898E-3
foreline_cvt_pmon=2.50898E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09147E-1
res40_imon=-2.40687E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=222
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.15868E-1	-7.98297E-1	-9.13165E0	-9.14214E0	4.52995E-3	9.40323E-2	2.73898E1	-3.26621E1	-3.26332E1	2.67938E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.16154E-1	-7.98464E-1	-9.13153E0	-9.14204E0	4.55379E-3	9.38892E-2	2.72609E1	-3.26685E1	-3.26305E1	2.68121E1	1.19913E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16107E-1	-7.9844E-1	-9.13155E0	-9.14233E0	4.72069E-3	9.38654E-2	2.72218E1	-3.2682E1	-3.26063E1	2.68069E1	1.2021E-7	2.52568E-3	2.52568E-3	6.32273E-3	3.02586E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0934E0	-8.15988E-1	-7.98559E-1	-9.13136E0	-9.14211E0	4.60148E-3	9.38654E-2	2.72354E1	-3.26729E1	-3.26536E1	2.67908E1	1.1984E-7	2.51642E-3	2.51642E-3	6.31902E-3	3.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.15868E-1	-7.98464E-1	-9.13138E0	-9.14197E0	4.95911E-3	9.38177E-2	2.73735E1	-3.26974E1	-3.26236E1	2.68151E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16202E-1	-7.98416E-1	-9.13136E0	-9.14195E0	4.50611E-3	9.38416E-2	2.71651E1	-3.26879E1	-3.26104E1	2.68256E1	1.20055E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.97901E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.1625E-1	-7.98321E-1	-9.13131E0	-9.14223E0	4.45843E-3	9.38654E-2	2.72827E1	-3.27009E1	-3.26248E1	2.6804E1	1.20278E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.16083E-1	-7.98178E-1	-9.13138E0	-9.14195E0	4.50611E-3	9.39608E-2	2.72582E1	-3.26687E1	-3.26308E1	2.68196E1	1.20158E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16226E-1	-7.9844E-1	-9.13136E0	-9.14197E0	4.29153E-3	9.38177E-2	2.73484E1	-3.26777E1	-3.26152E1	2.68058E1	1.19705E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.16298E-1	-7.98321E-1	-9.13153E0	-9.14214E0	4.3869E-3	9.43422E-2	2.72823E1	-3.2623E1	-3.26458E1	2.68117E1	1.20017E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.02396E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.16131E-1	-7.98488E-1	-9.13153E0	-9.14226E0	4.36306E-3	9.41515E-2	2.72258E1	-3.26699E1	-3.26296E1	2.67999E1	1.19965E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16059E-1	-7.98512E-1	-9.13131E0	-9.14204E0	4.45843E-3	9.40323E-2	2.73741E1	-3.26756E1	-3.2603E1	2.6795E1	1.19933E-7	2.51755E-3	2.51755E-3	6.30469E-3	2.99732E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16226E-1	-7.98631E-1	-9.13124E0	-9.14192E0	4.43459E-3	9.40561E-2	2.71243E1	-3.26549E1	-3.265E1	2.6783E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.1594E-1	-7.98702E-1	-9.13162E0	-9.14192E0	4.50611E-3	9.38416E-2	2.74433E1	-3.26759E1	-3.2644E1	2.6798E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16298E-1	-7.98559E-1	-9.13138E0	-9.14178E0	4.64916E-3	9.4223E-2	2.72901E1	-3.26921E1	-3.26074E1	2.68286E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16131E-1	-7.98535E-1	-9.1315E0	-9.14211E0	4.57764E-3	9.41038E-2	2.71843E1	-3.26308E1	-3.26278E1	2.6822E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00041E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.15916E-1	-7.9844E-1	-9.1311E0	-9.14207E0	4.52995E-3	9.41038E-2	2.73694E1	-3.26927E1	-3.26189E1	2.6816E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16488E-1	-7.98535E-1	-9.13134E0	-9.14202E0	4.69685E-3	9.41277E-2	2.73081E1	-3.26554E1	-3.26254E1	2.6807E1	1.20363E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01738E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09611E0	-8.15868E-1	-7.98297E-1	-9.13141E0	-9.14185E0	4.86374E-3	9.44376E-2	2.72684E1	-3.26957E1	-3.26152E1	2.68442E1	1.19913E-7	2.5188E-3	2.5188E-3	6.36244E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.1625E-1	-7.98631E-1	-9.13143E0	-9.1418E0	4.69685E-3	9.41277E-2	2.72951E1	-3.2649E1	-3.26484E1	2.67897E1	1.19913E-7	2.50898E-3	2.50898E-3	6.31288E-3	2.98481E-1