[Scan]
initial_time=2016-01-28T22:56:20
final_time=2016-01-28T22:56:39
ip_count=19
run=1026
dataset=10
scan=777
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08833E-4
ql1_vset=
ql1_vmon=-8.15797E-1
ql1_imon=1.38456E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.05859E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=2.6685E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-2.08473E-10
mult1=-9.93304E-9
mult2=-2.8264E-9
rf_tmon=-4.01975E-3
rf_agc=3.35739E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.75781E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63442E0
bslens_imon=2.59376E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19828E1
lens5a_imon=2.00269E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.04947E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53719E1
cs_ef1b_imon=3.16984E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02389E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04832E1
cs_ea1_imon=1.09088E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41369E0
lens1_imon=2.77452E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64637E1
os_ef1alow_imon=2.98912E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03916E1
cs_ea2_imon=1.41104E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84458E1
cs_ef1a_imon=3.04681E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.15439E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11343E1
os_restr1_imon=4.30833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14738E1
os_ea1_imon=2.44243E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63687E1
os_ef1bup_imon=3.08295E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24051E0
cs_ionrep_imon=9.56355E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02006E1
cs_anode1_imon=1.97122E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.14141E-8
tplens_vset=1.4E-1
tplens_vmon=1.66982E0
tplens_imon=-4.8158E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.483E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.59667E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.99296E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=8.59369E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33704E1
lens5b_imon=2.18867E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74855E1
cs_ef2b_imon=3.13647E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42881E0
os_ea2_imon=-5.17446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06121E2
lens4b_imon=2.00508E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.1959E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08236E0
os_ef2alow_imon=-2.37302E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84488E-1
os_ef2bup_imon=-5.1984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10764E1
os_restr2_imon=3.38044E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.29546E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0196E1
cs_anode2_imon=2.09911E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73303E1
iondef1_imon=1.10479E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.1038E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.02009E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.26001E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09713E0
cs_ionaccel_imon=-9.06461E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47515E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.64266E-6
window_vset=0.0E0
window_vmon=1.52235E-1
window_imon=-7.91778E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86657E1
mask2_imon=-7.25748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.47087E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.34458E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.53345E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51091E0
defgridb_imon=6.21944E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33132E1
os_fil1_imon=9.42907E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07364E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6051E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31334E1
cs_fil1_imon=6.85301E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.64479E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62253E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.94152E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03978E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.68307E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27404E-1
cs_fil2_imon=-2.17686E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.64592E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21143E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.03226E-1
res40_imon=-2.35912E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16226E-1	-7.98583E-1	-9.13153E0	-9.1419E0	4.79221E-3	9.38892E-2	2.73291E1	-3.26518E1	-3.26206E1	2.67992E1	1.20004E-7	2.51417E-3	2.51417E-3	6.29128E-3	2.98665E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.15964E-1	-7.98392E-1	-9.13119E0	-9.14176E0	4.72069E-3	9.35078E-2	2.73009E1	-3.26476E1	-3.26362E1	2.67986E1	1.19913E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.9874E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.15892E-1	-7.98512E-1	-9.13153E0	-9.14168E0	4.60148E-3	9.38654E-2	2.72333E1	-3.26417E1	-3.26289E1	2.67989E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9978E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.15797E-1	-7.98869E-1	-9.13177E0	-9.14176E0	4.74453E-3	9.42945E-2	2.73285E1	-3.26506E1	-3.2617E1	2.68094E1	1.20042E-7	2.51498E-3	2.51498E-3	6.31269E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.15964E-1	-7.98631E-1	-9.13174E0	-9.14199E0	4.673E-3	9.41038E-2	2.72913E1	-3.26693E1	-3.26266E1	2.68064E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16298E-1	-7.98631E-1	-9.13155E0	-9.14197E0	4.64916E-3	9.40561E-2	2.72228E1	-3.26482E1	-3.25978E1	2.6789E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.15988E-1	-7.98631E-1	-9.13157E0	-9.14195E0	4.48227E-3	9.41038E-2	2.72261E1	-3.26838E1	-3.25806E1	2.67932E1	1.19913E-7	2.52647E-3	2.52647E-3	6.32386E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.1625E-1	-7.9875E-1	-9.13134E0	-9.14164E0	4.52995E-3	9.40323E-2	2.74166E1	-3.26496E1	-3.26248E1	2.68053E1	1.19902E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.9943E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16202E-1	-7.98225E-1	-9.13134E0	-9.14154E0	4.41074E-3	9.41753E-2	2.72172E1	-3.26183E1	-3.26626E1	2.68022E1	1.20042E-7	2.51919E-3	2.51919E-3	6.30212E-3	2.99093E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16035E-1	-7.9844E-1	-9.13141E0	-9.14156E0	4.673E-3	9.40084E-2	2.73167E1	-3.27025E1	-3.26187E1	2.6792E1	1.2033E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.1625E-1	-7.98559E-1	-9.13146E0	-9.14185E0	4.673E-3	9.39369E-2	2.73181E1	-3.26691E1	-3.26113E1	2.68292E1	1.2033E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16345E-1	-7.98488E-1	-9.13177E0	-9.14183E0	4.60148E-3	9.39369E-2	2.7242E1	-3.26735E1	-3.26446E1	2.68064E1	1.19925E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.02277E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16178E-1	-7.98416E-1	-9.13141E0	-9.14209E0	4.98295E-3	9.36508E-2	2.72961E1	-3.26452E1	-3.2617E1	2.68088E1	1.19595E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16131E-1	-7.98321E-1	-9.13162E0	-9.14187E0	4.57764E-3	9.40323E-2	2.72979E1	-3.26488E1	-3.26717E1	2.67758E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16107E-1	-7.98583E-1	-9.13157E0	-9.14197E0	4.45843E-3	9.39608E-2	2.72702E1	-3.26591E1	-3.26176E1	2.67832E1	1.19697E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.16107E-1	-7.98702E-1	-9.13141E0	-9.14176E0	4.74453E-3	9.38892E-2	2.73159E1	-3.26561E1	-3.26374E1	2.68094E1	1.20297E-7	2.51248E-3	2.51248E-3	6.31299E-3	3.00676E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.1594E-1	-7.98583E-1	-9.13167E0	-9.14178E0	4.62532E-3	9.41753E-2	2.7311E1	-3.26402E1	-3.26296E1	2.67908E1	1.20278E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.02659E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09348E0	-8.16011E-1	-7.98416E-1	-9.13162E0	-9.14171E0	4.43459E-3	9.41038E-2	2.72781E1	-3.26699E1	-3.26536E1	2.67926E1	1.19749E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.00453E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.16131E-1	-7.98321E-1	-9.13172E0	-9.1418E0	4.3869E-3	9.42707E-2	2.73411E1	-3.26458E1	-3.26338E1	2.67938E1	1.19809E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00824E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.15797E-1	-7.98249E-1	-9.1315E0	-9.14176E0	4.22001E-3	9.39369E-2	2.73303E1	-3.26651E1	-3.26056E1	2.68052E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1