[Scan]
initial_time=2016-01-28T22:57:13
final_time=2016-01-28T22:57:33
ip_count=19
run=1026
dataset=10
scan=779
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08851E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=1.38961E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.99882E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=3.12209E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=-1.79219E-10
mult1=-9.463E-9
mult2=-2.86836E-9
rf_tmon=-4.48488E-3
rf_agc=3.30957E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=1.72839E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66313E0
bslens_imon=2.46926E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19893E1
lens5a_imon=1.9874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=3.19389E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02092E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05132E1
cs_ea1_imon=1.08724E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43625E0
lens1_imon=2.56299E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.97513E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03576E1
cs_ea2_imon=1.39943E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84586E1
cs_ef1a_imon=3.04721E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.15469E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=4.3104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15059E1
os_ea1_imon=2.46109E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63828E1
os_ef1bup_imon=3.07316E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21785E0
cs_ionrep_imon=9.57823E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01623E1
cs_anode1_imon=1.9671E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.13428E-8
tplens_vset=1.4E-1
tplens_vmon=1.64984E0
tplens_imon=-1.37123E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.50542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26689E1
iondef2_imon=1.57103E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.44138E-2
ql6_imon=3.98424E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24429E0
ionrepsh_imon=8.65175E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33676E1
lens5b_imon=2.21956E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74633E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49784E0
os_ea2_imon=-7.3915E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00742E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.2047E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99827E-1
os_ef2bup_imon=-5.13147E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.36184E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.30541E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.08856E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73443E1
iondef1_imon=1.09048E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.05857E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.23007E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11573E0
cs_ionaccel_imon=-8.89599E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02117E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=2.24551E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86921E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.57027E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.52483E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.5234E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.18236E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33118E1
os_fil1_imon=9.41723E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0799E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60581E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31379E1
cs_fil1_imon=7.4792E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.76771E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61071E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.22158E-2
os_fil2_imon=-2.41369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06123E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.47821E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40651E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21117E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.78223E-1
res40_imon=-2.31677E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	1.0E0	1.47E2	4.1E1	-2.09595E0	-8.16298E-1	-7.98392E-1	-9.13162E0	-9.14216E0	4.55379E-3	9.42707E-2	2.73027E1	-3.26691E1	-3.2626E1	2.67937E1	1.20226E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9978E-1
2.0E0	4.3E1	0.0E0	3.16E2	1.6E2	-2.09533E0	-8.16321E-1	-7.9844E-1	-9.13179E0	-9.14218E0	4.33922E-3	9.41277E-2	2.72041E1	-3.26517E1	-3.26297E1	2.67932E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16226E-1	-7.98607E-1	-9.13172E0	-9.14173E0	4.64916E-3	9.38416E-2	2.73069E1	-3.26408E1	-3.26225E1	2.6796E1	1.20031E-7	2.51248E-3	2.51248E-3	6.34099E-3	2.99613E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16488E-1	-7.98702E-1	-9.13184E0	-9.14161E0	4.45843E-3	9.39369E-2	2.73558E1	-3.26496E1	-3.26408E1	2.67908E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.97901E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16083E-1	-7.98368E-1	-9.13193E0	-9.14178E0	4.69685E-3	9.41992E-2	2.72967E1	-3.26554E1	-3.2632E1	2.67818E1	1.19965E-7	2.51334E-3	2.51334E-3	6.28552E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16226E-1	-7.98678E-1	-9.13203E0	-9.14202E0	4.12464E-3	9.41038E-2	2.73057E1	-3.26443E1	-3.26154E1	2.68016E1	1.20055E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.16274E-1	-7.98535E-1	-9.13191E0	-9.14168E0	4.3869E-3	9.42707E-2	2.71891E1	-3.26302E1	-3.2644E1	2.68112E1	1.19757E-7	2.51771E-3	2.51771E-3	6.34588E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.16202E-1	-7.98774E-1	-9.13157E0	-9.14159E0	4.33922E-3	9.42945E-2	2.73847E1	-3.26756E1	-3.26156E1	2.67926E1	1.20174E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.16011E-1	-7.9875E-1	-9.13181E0	-9.14164E0	4.41074E-3	9.42469E-2	2.73201E1	-3.26573E1	-3.25948E1	2.6804E1	1.20244E-7	2.5147E-3	2.5147E-3	6.29067E-3	3.0201E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16298E-1	-7.98678E-1	-9.13186E0	-9.14209E0	4.55379E-3	9.40561E-2	2.7285E1	-3.26708E1	-3.26124E1	2.68178E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16107E-1	-7.98917E-1	-9.13193E0	-9.14176E0	4.69685E-3	9.38892E-2	2.74163E1	-3.2653E1	-3.26494E1	2.68058E1	1.20209E-7	2.5131E-3	2.5131E-3	6.35059E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16035E-1	-7.9875E-1	-9.13193E0	-9.14207E0	4.52995E-3	9.44138E-2	2.72018E1	-3.26621E1	-3.26044E1	2.68142E1	1.2033E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.15868E-1	-7.98368E-1	-9.13184E0	-9.14192E0	4.24385E-3	9.43184E-2	2.73041E1	-3.26387E1	-3.26073E1	2.68254E1	1.20051E-7	2.51473E-3	2.51473E-3	6.30489E-3	3.00412E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.15916E-1	-7.98535E-1	-9.13198E0	-9.14197E0	4.17233E-3	9.41992E-2	2.73669E1	-3.26407E1	-3.26358E1	2.68076E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.15845E-1	-7.9844E-1	-9.13148E0	-9.1419E0	4.1008E-3	9.40323E-2	2.72672E1	-3.26573E1	-3.26272E1	2.67812E1	1.20031E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.0201E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16178E-1	-7.98631E-1	-9.1315E0	-9.14202E0	4.07696E-3	9.41277E-2	2.73664E1	-3.26496E1	-3.26301E1	2.68136E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02133E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.16035E-1	-7.98464E-1	-9.13143E0	-9.14185E0	4.31538E-3	9.41277E-2	2.71986E1	-3.26707E1	-3.26138E1	2.67878E1	1.19953E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.16202E-1	-7.98655E-1	-9.13131E0	-9.14159E0	4.12464E-3	9.43184E-2	2.74216E1	-3.26642E1	-3.26573E1	2.67868E1	1.20174E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.15988E-1	-7.98416E-1	-9.13134E0	-9.1418E0	4.43459E-3	9.41515E-2	2.73243E1	-3.26807E1	-3.26218E1	2.6798E1	1.20311E-7	2.51954E-3	2.51954E-3	6.28592E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.1625E-1	-7.98583E-1	-9.13141E0	-9.14216E0	4.33922E-3	9.44138E-2	2.73443E1	-3.26689E1	-3.26236E1	2.68154E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01871E-1