[Scan]
initial_time=2016-01-28T22:58:08
final_time=2016-01-28T22:58:30
ip_count=19
run=1026
dataset=10
scan=781
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09634E0
qbias_imon=-1.08843E-4
ql1_vset=
ql1_vmon=-8.15797E-1
ql1_imon=1.38919E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.03683E-9
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=2.59185E-10
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=-2.12789E-10
mult1=-9.70033E-9
mult2=-2.74873E-9
rf_tmon=-4.85162E-3
rf_agc=3.2908E-2
counter1=0
counter2=2
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.22001E-3
ql5_imon=1.73237E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.75765E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20085E1
lens5a_imon=1.98379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05172E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.18416E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02024E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=1.11536E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45607E0
lens1_imon=2.68556E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64224E1
os_ef1alow_imon=2.98198E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03648E1
cs_ea2_imon=1.40664E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84598E1
cs_ef1a_imon=3.04108E-5
olens2_vset=9.7E-1
olens2_vmon=9.69601E-1
olens2_imon=1.15596E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.29815E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.46325E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20583E0
cs_ionrep_imon=9.45205E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93586E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=1.95773E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.13705E-8
tplens_vset=1.4E-1
tplens_vmon=1.63122E0
tplens_imon=-3.24581E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26142E1
iondef3_imon=1.50614E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98598E-4
ql6_vset=1.0E-1
ql6_vmon=9.40561E-2
ql6_imon=3.99119E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30377E0
ionrepsh_imon=8.56523E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33357E1
lens5b_imon=2.18927E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.14344E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49423E0
os_ea2_imon=-5.44483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83609E-1
os_ef2bup_imon=-5.23959E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10769E1
os_restr2_imon=3.3658E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.31659E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72886E1
iondef1_imon=1.08724E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.04379E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.24099E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-9.29243E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47489E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.85362E-6
window_vset=0.0E0
window_vmon=2.44973E-1
window_imon=-1.07701E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.3938E-4
mask2_vset=0.0E0
mask2_vmon=-1.86861E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92662E3
multa_neg_imon=7.42607E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.77718E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.18093E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35946E0
defgridb_imon=6.03816E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.331E1
os_fil1_imon=9.42811E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08446E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60816E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31352E1
cs_fil1_imon=6.8425E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02122E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61025E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07971E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.49884E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27451E-1
cs_fil2_imon=-2.06531E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.68882E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21068E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.9413E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=222
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.16202E-1	-7.98488E-1	-9.13179E0	-9.14197E0	4.74453E-3	9.40084E-2	2.7301E1	-3.26422E1	-3.26405E1	2.67873E1	1.20084E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.00676E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09657E0	-8.16154E-1	-7.98583E-1	-9.13198E0	-9.14202E0	4.60148E-3	9.40084E-2	2.73613E1	-3.26718E1	-3.2615E1	2.6796E1	1.19991E-7	2.51814E-3	2.51814E-3	6.3074E-3	3.02621E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.16441E-1	-7.9875E-1	-9.13217E0	-9.14187E0	4.64916E-3	9.40323E-2	2.72715E1	-3.26567E1	-3.26349E1	2.6803E1	1.1979E-7	2.51814E-3	2.51814E-3	6.3445E-3	3.00348E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.16274E-1	-7.9844E-1	-9.13196E0	-9.14202E0	4.673E-3	9.40323E-2	2.73381E1	-3.26891E1	-3.26254E1	2.6813E1	1.19902E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09595E0	-8.16345E-1	-7.98631E-1	-9.13184E0	-9.1419E0	4.93526E-3	9.38892E-2	2.7269E1	-3.2635E1	-3.26452E1	2.68028E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16393E-1	-7.98488E-1	-9.13188E0	-9.14218E0	4.69685E-3	9.39131E-2	2.73225E1	-3.2653E1	-3.26086E1	2.68148E1	1.20137E-7	2.51248E-3	2.51248E-3	6.31858E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16298E-1	-7.98488E-1	-9.13181E0	-9.14192E0	4.57764E-3	9.38654E-2	2.72849E1	-3.26664E1	-3.26217E1	2.67857E1	1.20069E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16393E-1	-7.98535E-1	-9.13169E0	-9.14204E0	4.31538E-3	9.42469E-2	2.72797E1	-3.26413E1	-3.26266E1	2.68146E1	1.19965E-7	2.51662E-3	2.51662E-3	6.28006E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16274E-1	-7.98512E-1	-9.13157E0	-9.14192E0	4.55379E-3	9.4223E-2	2.73443E1	-3.26799E1	-3.25734E1	2.67995E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16083E-1	-7.98798E-1	-9.13153E0	-9.1419E0	4.45843E-3	9.40561E-2	2.72632E1	-3.26762E1	-3.26508E1	2.67891E1	1.20045E-7	2.52635E-3	2.52635E-3	6.3074E-3	2.98361E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0948E0	-8.16059E-1	-7.98464E-1	-9.1315E0	-9.14192E0	4.74453E-3	9.4223E-2	2.72913E1	-3.26645E1	-3.26254E1	2.68076E1	1.19851E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.9892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16035E-1	-7.98178E-1	-9.13169E0	-9.14185E0	4.36306E-3	9.39608E-2	2.7358E1	-3.273E1	-3.26116E1	2.68094E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.99175E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16154E-1	-7.98321E-1	-9.13169E0	-9.14183E0	4.57764E-3	9.4223E-2	2.72775E1	-3.26681E1	-3.26074E1	2.6795E1	1.19872E-7	2.52027E-3	2.52027E-3	6.33538E-3	3.00676E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16131E-1	-7.98488E-1	-9.1316E0	-9.14185E0	4.3869E-3	9.37223E-2	2.73149E1	-3.26744E1	-3.26456E1	2.6774E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.15988E-1	-7.98512E-1	-9.13157E0	-9.14211E0	4.55379E-3	9.3627E-2	2.72715E1	-3.26747E1	-3.2608E1	2.67876E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16059E-1	-7.98345E-1	-9.13174E0	-9.14192E0	4.3869E-3	9.39131E-2	2.72841E1	-3.26717E1	-3.26434E1	2.681E1	1.19809E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9874E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16083E-1	-7.98488E-1	-9.13181E0	-9.14159E0	4.50611E-3	9.38892E-2	2.73381E1	-3.26738E1	-3.2629E1	2.68192E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.97187E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16083E-1	-7.98488E-1	-9.13191E0	-9.14192E0	4.33922E-3	9.39608E-2	2.72959E1	-3.26744E1	-3.26211E1	2.6787E1	1.19861E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16226E-1	-7.98655E-1	-9.13196E0	-9.14164E0	4.52995E-3	9.40323E-2	2.72845E1	-3.26903E1	-3.2652E1	2.67914E1	1.19861E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01085E-1
2.3E1	0.0E0	2.0E0	9.3E2	6.47E2	-2.09634E0	-8.15797E-1	-7.98512E-1	-9.13172E0	-9.14161E0	4.22001E-3	9.40561E-2	2.72886E1	-3.26661E1	-3.26142E1	2.6807E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01085E-1