[Scan]
initial_time=2016-01-28T22:58:38
final_time=2016-01-28T22:59:01
ip_count=19
run=1026
dataset=10
scan=782
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=1.38621E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.05672E-9
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=3.00598E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=-1.77944E-10
mult1=-1.00294E-8
mult2=-2.81842E-9
rf_tmon=-5.44971E-3
rf_agc=3.25645E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.63624E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64691E0
bslens_imon=2.55938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20217E1
lens5a_imon=1.99569E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=3.18791E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04778E1
cs_ea1_imon=1.07498E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39539E0
lens1_imon=2.69277E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65251E1
os_ef1alow_imon=2.98634E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03738E1
cs_ea2_imon=1.4088E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84504E1
cs_ef1a_imon=3.03639E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.15441E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11315E1
os_restr1_imon=4.31563E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.4665E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.09408E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26712E0
cs_ionrep_imon=9.39437E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01943E1
cs_anode1_imon=1.95593E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.14422E-8
tplens_vset=1.4E-1
tplens_vmon=1.64864E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26398E1
iondef3_imon=1.50722E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.58544E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=4.06616E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=8.38499E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33459E1
lens5b_imon=2.17449E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74548E1
cs_ef2b_imon=3.14377E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48582E0
os_ea2_imon=-4.79594E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.0045E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71113E1
cs_ef2a_imon=3.19382E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08178E0
os_ef2alow_imon=-2.55026E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.31656E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=3.3787E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.31046E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01549E1
cs_anode2_imon=2.1012E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.0894E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6786E1
iondef4_imon=1.09059E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.01436E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.25756E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12319E0
cs_ionaccel_imon=-9.13411E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02037E2
cs_ionfocb_imon=1.47386E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56168E1
einzel_imon=7.81295E-6
window_vset=0.0E0
window_vmon=2.19423E-1
window_imon=-1.09065E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39286E-4
mask2_vset=0.0E0
mask2_vmon=-1.86796E1
mask2_imon=-5.97163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.47654E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.42389E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.33594E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42562E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33081E1
os_fil1_imon=9.40619E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08378E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60746E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31347E1
cs_fil1_imon=7.42642E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.5637E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61012E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00233E-2
os_fil2_imon=-2.50701E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09191E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.55555E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-2.31008E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38528E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21066E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.22919E-1
res40_imon=-2.38692E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.15988E-1	-7.98011E-1	-9.13129E0	-9.14185E0	4.52995E-3	9.41992E-2	2.72514E1	-3.26555E1	-3.2613E1	2.68106E1	1.20004E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.99175E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.16083E-1	-7.9813E-1	-9.13181E0	-9.14171E0	4.43459E-3	9.42469E-2	2.73117E1	-3.26729E1	-3.26278E1	2.6807E1	1.19646E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.98156E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16011E-1	-7.98082E-1	-9.13186E0	-9.14195E0	4.74453E-3	9.41277E-2	2.72915E1	-3.26449E1	-3.26732E1	2.67794E1	1.20137E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00676E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.1594E-1	-7.98321E-1	-9.13153E0	-9.14183E0	4.64916E-3	9.39846E-2	2.73003E1	-3.26711E1	-3.26338E1	2.68186E1	1.19902E-7	2.52276E-3	2.52276E-3	6.29128E-3	3.03027E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16154E-1	-7.98202E-1	-9.1316E0	-9.14207E0	4.43459E-3	9.37939E-2	2.73104E1	-3.26844E1	-3.26183E1	2.67896E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.16417E-1	-7.98059E-1	-9.13162E0	-9.1418E0	4.33922E-3	9.41515E-2	2.73556E1	-3.26711E1	-3.26314E1	2.68052E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16274E-1	-7.98082E-1	-9.13169E0	-9.14195E0	4.48227E-3	9.377E-2	2.73249E1	-3.26458E1	-3.26146E1	2.68112E1	1.19713E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16321E-1	-7.98273E-1	-9.13186E0	-9.14197E0	4.43459E-3	9.38177E-2	2.73201E1	-3.26434E1	-3.26242E1	2.67926E1	1.20209E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16226E-1	-7.98488E-1	-9.1316E0	-9.14209E0	4.45843E-3	9.37462E-2	2.72644E1	-3.26467E1	-3.26638E1	2.68244E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09665E0	-8.16035E-1	-7.9844E-1	-9.13146E0	-9.14171E0	4.45843E-3	9.39846E-2	2.73111E1	-3.26687E1	-3.26254E1	2.67956E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.15988E-1	-7.98297E-1	-9.13148E0	-9.14183E0	4.72069E-3	9.4223E-2	2.72961E1	-3.26711E1	-3.26092E1	2.68268E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9892E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16035E-1	-7.98178E-1	-9.1316E0	-9.14173E0	4.673E-3	9.41753E-2	2.72739E1	-3.2632E1	-3.26476E1	2.68094E1	1.20191E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.00676E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16298E-1	-7.9782E-1	-9.13188E0	-9.14183E0	4.52995E-3	9.42469E-2	2.73222E1	-3.26773E1	-3.26331E1	2.67908E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01995E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.16154E-1	-7.97963E-1	-9.13155E0	-9.1418E0	4.55379E-3	9.38177E-2	2.7209E1	-3.26567E1	-3.2623E1	2.68046E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.01871E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16298E-1	-7.98011E-1	-9.13143E0	-9.14211E0	4.74453E-3	9.38177E-2	2.73234E1	-3.26602E1	-3.26183E1	2.67758E1	1.19851E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.02511E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16274E-1	-7.98106E-1	-9.1316E0	-9.14152E0	4.57764E-3	9.40561E-2	2.73675E1	-3.26566E1	-3.26015E1	2.67914E1	1.19913E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.00563E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09696E0	-8.16178E-1	-7.98392E-1	-9.1316E0	-9.14192E0	4.76837E-3	9.37939E-2	2.72943E1	-3.26753E1	-3.25834E1	2.68208E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.16107E-1	-7.98559E-1	-9.1316E0	-9.14195E0	4.64916E-3	9.40561E-2	2.73105E1	-3.26272E1	-3.26765E1	2.67788E1	1.19872E-7	2.51248E-3	2.51248E-3	6.31858E-3	2.99879E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.16202E-1	-7.98512E-1	-9.13157E0	-9.14209E0	4.72069E-3	9.36508E-2	2.73155E1	-3.26544E1	-3.26625E1	2.68204E1	1.19749E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.16202E-1	-7.9844E-1	-9.13167E0	-9.14209E0	4.52995E-3	9.37939E-2	2.73045E1	-3.26927E1	-3.26398E1	2.6786E1	1.20004E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.00966E-1