[Scan]
initial_time=2016-01-28T22:59:39
final_time=2016-01-28T23:00:01
ip_count=19
run=1026
dataset=10
scan=784
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.16202E-1
ql1_imon=1.38621E-8
ql2_vset=
ql2_vmon=-7.98202E-1
ql2_imon=2.05693E-9
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=3.27325E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-1.94335E-10
mult1=-1.00414E-8
mult2=-2.73258E-9
rf_tmon=-4.68066E-3
rf_agc=3.19757E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.68169E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61146E0
bslens_imon=2.72881E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05143E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53674E1
cs_ef1b_imon=3.17788E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=1.08904E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41101E0
lens1_imon=2.67835E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64677E1
os_ef1alow_imon=2.98252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.39078E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84363E1
cs_ef1a_imon=3.03754E-5
olens2_vset=9.7E-1
olens2_vmon=9.69672E-1
olens2_imon=1.15513E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11329E1
os_restr1_imon=4.30328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.48164E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63741E1
os_ef1bup_imon=3.09255E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=9.5566E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01722E1
cs_anode1_imon=1.96604E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20444E0
olens4_imon=3.12966E-8
tplens_vset=1.4E-1
tplens_vmon=1.63062E0
tplens_imon=-2.56087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26242E1
iondef3_imon=1.5101E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.59626E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98472E-4
ql6_vset=1.0E-1
ql6_vmon=9.41277E-2
ql6_imon=3.98366E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=8.60849E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.17774E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7452E1
cs_ef2b_imon=3.13035E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47741E0
os_ea2_imon=-6.02162E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06078E2
lens4b_imon=2.00536E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71077E1
cs_ef2a_imon=3.20558E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07826E0
os_ef2alow_imon=-2.60426E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84533E-1
os_ef2bup_imon=-5.13424E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=3.37175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.3101E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.10152E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73165E1
iondef1_imon=1.10815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.09813E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.00759E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.24578E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12765E0
cs_ionaccel_imon=-8.86411E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47301E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56193E1
einzel_imon=7.85626E-6
window_vset=0.0E0
window_vmon=2.33191E-1
window_imon=-1.07354E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39294E-4
mask2_vset=0.0E0
mask2_vmon=-1.86749E1
mask2_imon=-5.42094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.49456E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.42029E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.18814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34743E0
defgridb_imon=6.17875E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33114E1
os_fil1_imon=9.40175E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08209E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60837E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31356E1
cs_fil1_imon=7.05573E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.69425E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61117E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19579E-2
os_fil2_imon=-2.43795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57102E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30459E-1
cs_fil2_imon=-2.3631E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36701E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21084E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.4006E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.53573E-1
res40_imon=-2.34976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.15892E-1	-7.98702E-1	-9.13143E0	-9.14185E0	4.36306E-3	9.39131E-2	2.73529E1	-3.2672E1	-3.25918E1	2.67775E1	1.19757E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.02922E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.15916E-1	-7.9844E-1	-9.13148E0	-9.14168E0	4.50611E-3	9.39608E-2	2.72797E1	-3.26579E1	-3.26425E1	2.67944E1	1.19913E-7	2.51334E-3	2.51334E-3	6.26371E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.15821E-1	-7.98512E-1	-9.13165E0	-9.14166E0	4.19617E-3	9.4223E-2	2.73315E1	-3.26681E1	-3.26242E1	2.67842E1	1.20004E-7	2.51417E-3	2.51417E-3	6.33977E-3	2.9841E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.15892E-1	-7.98392E-1	-9.13141E0	-9.14171E0	4.48227E-3	9.40323E-2	2.72883E1	-3.26687E1	-3.2629E1	2.68394E1	1.19646E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.15701E-1	-7.98249E-1	-9.13162E0	-9.14168E0	4.64916E-3	9.40084E-2	2.72853E1	-3.26585E1	-3.26272E1	2.68022E1	1.20191E-7	2.51359E-3	2.51359E-3	6.29624E-3	2.99613E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.15868E-1	-7.98059E-1	-9.13179E0	-9.14159E0	4.26769E-3	9.39608E-2	2.72853E1	-3.26675E1	-3.26284E1	2.6804E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16107E-1	-7.98225E-1	-9.13184E0	-9.14178E0	4.17233E-3	9.41753E-2	2.72799E1	-3.26837E1	-3.26194E1	2.6798E1	1.20004E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09441E0	-8.16154E-1	-7.98345E-1	-9.13162E0	-9.14226E0	4.02927E-3	9.38177E-2	2.72738E1	-3.26632E1	-3.25977E1	2.67902E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.15701E-1	-7.98273E-1	-9.13157E0	-9.14195E0	4.12464E-3	9.39369E-2	2.737E1	-3.26633E1	-3.26446E1	2.68046E1	1.20069E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.16083E-1	-7.98225E-1	-9.1315E0	-9.14178E0	3.95775E-3	9.40323E-2	2.72805E1	-3.26723E1	-3.26597E1	2.68028E1	1.19757E-7	2.5188E-3	2.5188E-3	6.3514E-3	3.01871E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.16154E-1	-7.98416E-1	-9.13172E0	-9.14204E0	4.17233E-3	9.40084E-2	2.73255E1	-3.26621E1	-3.26356E1	2.68028E1	1.20209E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16107E-1	-7.98392E-1	-9.13157E0	-9.14214E0	4.45843E-3	9.40323E-2	2.72886E1	-3.26667E1	-3.26543E1	2.68146E1	1.20069E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01085E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16154E-1	-7.98416E-1	-9.13167E0	-9.14185E0	4.29153E-3	9.41515E-2	2.72432E1	-3.26815E1	-3.26006E1	2.67962E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16035E-1	-7.98059E-1	-9.13167E0	-9.14209E0	4.50611E-3	9.41753E-2	2.73736E1	-3.26494E1	-3.26314E1	2.68028E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9892E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16035E-1	-7.98273E-1	-9.13172E0	-9.14192E0	4.55379E-3	9.41753E-2	2.72805E1	-3.26921E1	-3.26008E1	2.67914E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9874E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.16107E-1	-7.98154E-1	-9.13155E0	-9.14185E0	4.3869E-3	9.38654E-2	2.72853E1	-3.26879E1	-3.2614E1	2.67908E1	1.20174E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.99E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16226E-1	-7.98249E-1	-9.1315E0	-9.14168E0	4.07696E-3	9.41038E-2	2.72751E1	-3.26993E1	-3.25984E1	2.67902E1	1.19913E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16035E-1	-7.98297E-1	-9.13181E0	-9.1418E0	4.36306E-3	9.38892E-2	2.73341E1	-3.26498E1	-3.25924E1	2.6792E1	1.20017E-7	2.52538E-3	2.52538E-3	6.29645E-3	3.00041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16202E-1	-7.98345E-1	-9.13162E0	-9.14159E0	4.52995E-3	9.39608E-2	2.73249E1	-3.26344E1	-3.26098E1	2.67914E1	1.19941E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.01356E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16202E-1	-7.98202E-1	-9.13172E0	-9.14204E0	4.57764E-3	9.41277E-2	2.73165E1	-3.265E1	-3.26242E1	2.67956E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01347E-1