[Scan]
initial_time=2016-01-28T23:00:40
final_time=2016-01-28T23:01:02
ip_count=19
run=1026
dataset=10
scan=786
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.1594E-1
ql1_imon=1.38952E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.01355E-9
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=2.5593E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-2.17462E-10
mult1=-1.04267E-8
mult2=-2.83838E-9
rf_tmon=-4.70469E-3
rf_agc=3.31653E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.68906E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68568E0
bslens_imon=2.745E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=1.97979E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05383E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=3.18596E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05029E1
cs_ea1_imon=1.09989E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40559E0
lens1_imon=2.5291E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03926E1
cs_ea2_imon=1.41808E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84118E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.15252E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.31184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15123E1
os_ea1_imon=2.44628E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27569E0
cs_ionrep_imon=9.66455E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=1.96026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.13388E-8
tplens_vset=1.4E-1
tplens_vmon=1.6727E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26332E1
iondef2_imon=1.57948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98463E-4
ql6_vset=1.0E-1
ql6_vmon=9.408E-2
ql6_imon=3.98967E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28867E0
ionrepsh_imon=8.55671E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33451E1
lens5b_imon=2.20135E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4798E0
os_ea2_imon=-8.12101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7145E1
cs_ef2a_imon=3.19714E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05816E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.23853E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10823E1
os_restr2_imon=3.37301E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.30601E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.10622E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73429E1
iondef1_imon=1.10378E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67998E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.04804E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.23536E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15297E0
cs_ionaccel_imon=-8.7158E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=2.53983E-1
window_imon=-1.00132E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86801E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.69664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=7.03831E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.17988E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42032E0
defgridb_imon=6.03665E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33099E1
os_fil1_imon=9.39993E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07654E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60774E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31536E1
cs_fil1_imon=7.31702E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01461E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6113E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.12966E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.25945E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.72741E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-1.90914E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21127E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.83318E-1
res40_imon=-2.39606E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.16226E-1	-7.98225E-1	-9.13167E0	-9.14204E0	4.26769E-3	9.41277E-2	2.7275E1	-3.26425E1	-3.26301E1	2.6847E1	1.19953E-7	2.51954E-3	2.51954E-3	6.35601E-3	3.0071E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.1625E-1	-7.98035E-1	-9.13186E0	-9.14185E0	4.29153E-3	9.38416E-2	2.72541E1	-3.267E1	-3.25959E1	2.67845E1	1.20055E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.0071E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.16131E-1	-7.98202E-1	-9.13167E0	-9.14211E0	4.48227E-3	9.40323E-2	2.73079E1	-3.26539E1	-3.25879E1	2.68065E1	1.20517E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16393E-1	-7.98178E-1	-9.13157E0	-9.14233E0	4.72069E-3	9.39369E-2	2.73382E1	-3.26505E1	-3.26383E1	2.67992E1	1.20404E-7	2.51549E-3	2.51549E-3	6.3074E-3	3.01121E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.16298E-1	-7.98202E-1	-9.13169E0	-9.14211E0	4.55379E-3	9.38892E-2	2.72246E1	-3.26498E1	-3.26144E1	2.67989E1	1.20011E-7	2.51809E-3	2.51809E-3	6.31827E-3	3.02064E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16107E-1	-7.98392E-1	-9.13198E0	-9.14168E0	4.26769E-3	9.40323E-2	2.73129E1	-3.26714E1	-3.26013E1	2.68114E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.15964E-1	-7.98154E-1	-9.13169E0	-9.14159E0	4.24385E-3	9.38177E-2	2.72745E1	-3.26308E1	-3.26212E1	2.68112E1	1.20076E-7	2.52147E-3	2.52147E-3	6.31925E-3	2.98232E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.15821E-1	-7.98082E-1	-9.13181E0	-9.14216E0	4.62532E-3	9.3627E-2	2.72775E1	-3.26813E1	-3.26314E1	2.67998E1	1.20122E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.15797E-1	-7.98011E-1	-9.13162E0	-9.14197E0	4.43459E-3	9.38654E-2	2.73069E1	-3.26903E1	-3.2613E1	2.67671E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.15582E-1	-7.98178E-1	-9.13157E0	-9.14233E0	4.26769E-3	9.377E-2	2.72672E1	-3.26645E1	-3.26476E1	2.68174E1	1.20106E-7	2.52599E-3	2.52599E-3	6.33436E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.15678E-1	-7.98321E-1	-9.13188E0	-9.14199E0	4.79221E-3	9.39131E-2	2.73122E1	-3.26691E1	-3.26514E1	2.67946E1	1.20017E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.15773E-1	-7.98059E-1	-9.13148E0	-9.14183E0	4.8399E-3	9.39846E-2	2.73556E1	-3.26488E1	-3.26176E1	2.68034E1	1.198E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.15988E-1	-7.98321E-1	-9.1315E0	-9.14178E0	4.33922E-3	9.39846E-2	2.73568E1	-3.26603E1	-3.2587E1	2.68202E1	1.2033E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9874E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.15797E-1	-7.98297E-1	-9.13136E0	-9.14211E0	4.69685E-3	9.36747E-2	2.73153E1	-3.26675E1	-3.26056E1	2.67884E1	1.2033E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9978E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.15821E-1	-7.98249E-1	-9.13165E0	-9.14187E0	4.52995E-3	9.38177E-2	2.73167E1	-3.26863E1	-3.26695E1	2.68024E1	1.19653E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.15845E-1	-7.98488E-1	-9.13153E0	-9.14209E0	4.48227E-3	9.36747E-2	2.72604E1	-3.26364E1	-3.26419E1	2.68188E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01738E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.15868E-1	-7.98154E-1	-9.13146E0	-9.14197E0	4.74453E-3	9.37223E-2	2.73057E1	-3.27152E1	-3.26156E1	2.67746E1	1.20069E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.15988E-1	-7.98297E-1	-9.13134E0	-9.1419E0	4.79221E-3	9.37939E-2	2.72522E1	-3.26681E1	-3.2623E1	2.68046E1	1.20142E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.99845E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16107E-1	-7.98726E-1	-9.13172E0	-9.14176E0	4.50611E-3	9.38654E-2	2.73027E1	-3.26524E1	-3.26236E1	2.67827E1	1.20017E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.02133E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.1594E-1	-7.98512E-1	-9.13167E0	-9.1419E0	4.8399E-3	9.408E-2	2.73429E1	-3.26332E1	-3.26152E1	2.67998E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00824E-1