[Scan]
initial_time=2016-01-28T23:01:10
final_time=2016-01-28T23:01:32
ip_count=19
run=1026
dataset=10
scan=787
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08845E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=1.38806E-8
ql2_vset=
ql2_vmon=-7.97987E-1
ql2_imon=2.05213E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=2.83384E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-2.22576E-10
mult1=-9.64406E-9
mult2=-3.03599E-9
rf_tmon=-7.81096E-3
rf_agc=2.95844E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.66268E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68273E0
bslens_imon=2.97153E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19459E1
lens5a_imon=1.95572E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5382E1
cs_ef1b_imon=3.1838E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.01802E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.052E1
cs_ea1_imon=1.1236E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37905E0
lens1_imon=2.50079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64807E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04233E1
cs_ea2_imon=1.39118E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.03892E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.15079E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.31328E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15058E1
os_ea1_imon=2.45407E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.30047E0
cs_ionrep_imon=9.39201E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.93487E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=1.9689E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.12977E-8
tplens_vset=1.4E-1
tplens_vmon=1.65028E0
tplens_imon=-4.05069E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26338E1
iondef3_imon=1.52887E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26512E1
iondef2_imon=1.57665E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0289E2
lens6_imon=2.98463E-4
ql6_vset=1.0E-1
ql6_vmon=9.41753E-2
ql6_imon=3.98105E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25387E0
ionrepsh_imon=8.45761E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34177E1
lens5b_imon=2.20737E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43969E0
os_ea2_imon=-7.16537E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00817E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.20434E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0894E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.37409E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.29857E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.08603E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73297E1
iondef1_imon=1.12821E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.98549E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82928E-1
olens1_imon=7.23558E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10732E0
cs_ionaccel_imon=-8.39144E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47345E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-9.00411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39326E-4
mask2_vset=0.0E0
mask2_vmon=-1.86801E1
mask2_imon=-4.96767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.36747E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93753E3
defgrida_imon=6.75162E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=6.96044E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32878E0
defgridb_imon=5.85614E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33063E1
os_fil1_imon=9.4251E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07744E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60448E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31374E1
cs_fil1_imon=7.5753E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.32923E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61162E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00303E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19338E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.68944E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21042E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.16355E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.15868E-1	-7.98607E-1	-9.13174E0	-9.14176E0	4.74453E-3	9.40084E-2	2.73151E1	-3.26655E1	-3.26166E1	2.68244E1	1.20004E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.01223E-1
2.0E0	4.5E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16083E-1	-7.98655E-1	-9.13198E0	-9.14154E0	4.48227E-3	9.40561E-2	2.72823E1	-3.26663E1	-3.26278E1	2.68208E1	1.198E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16107E-1	-7.98392E-1	-9.13136E0	-9.14159E0	4.52995E-3	9.41515E-2	2.73452E1	-3.26596E1	-3.25985E1	2.67925E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.16035E-1	-7.98273E-1	-9.13131E0	-9.14161E0	4.72069E-3	9.38892E-2	2.73082E1	-3.26622E1	-3.26603E1	2.682E1	1.20194E-7	2.52123E-3	2.52123E-3	6.3074E-3	3.00532E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16274E-1	-7.98178E-1	-9.13134E0	-9.14159E0	4.86374E-3	9.37223E-2	2.72721E1	-3.26567E1	-3.26272E1	2.67962E1	1.19505E-7	2.51952E-3	2.51952E-3	6.31879E-3	2.9971E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16178E-1	-7.98416E-1	-9.13167E0	-9.14171E0	4.76837E-3	9.40084E-2	2.73147E1	-3.26579E1	-3.26062E1	2.68022E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.97704E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16107E-1	-7.98416E-1	-9.13162E0	-9.14149E0	4.33922E-3	9.41277E-2	2.72585E1	-3.26885E1	-3.2616E1	2.68076E1	1.20383E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09642E0	-8.16274E-1	-7.9813E-1	-9.13162E0	-9.14178E0	4.52995E-3	9.40084E-2	2.72642E1	-3.26561E1	-3.26056E1	2.68136E1	1.20158E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16274E-1	-7.98082E-1	-9.13167E0	-9.14159E0	4.64916E-3	9.40084E-2	2.72855E1	-3.26473E1	-3.26316E1	2.68026E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.02922E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0965E0	-8.16131E-1	-7.98225E-1	-9.1315E0	-9.14173E0	4.48227E-3	9.37462E-2	2.73452E1	-3.26286E1	-3.26266E1	2.67895E1	1.19822E-7	2.51752E-3	2.51752E-3	6.31251E-3	3.01365E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.15964E-1	-7.98154E-1	-9.13186E0	-9.14195E0	4.55379E-3	9.41515E-2	2.73063E1	-3.26536E1	-3.26182E1	2.68113E1	1.20226E-7	2.5199E-3	2.5199E-3	6.31902E-3	3.00916E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.16441E-1	-7.98297E-1	-9.13177E0	-9.14192E0	4.74453E-3	9.38654E-2	2.73676E1	-3.26478E1	-3.26207E1	2.67978E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01871E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16464E-1	-7.98321E-1	-9.13157E0	-9.14199E0	4.74453E-3	9.37223E-2	2.72138E1	-3.27005E1	-3.26374E1	2.67878E1	1.19953E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.16488E-1	-7.98273E-1	-9.13169E0	-9.14185E0	4.72069E-3	9.38416E-2	2.7382E1	-3.26765E1	-3.25978E1	2.68094E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.02922E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.16274E-1	-7.98368E-1	-9.13172E0	-9.14168E0	4.76837E-3	9.38892E-2	2.7288E1	-3.26573E1	-3.26001E1	2.68076E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16131E-1	-7.98225E-1	-9.13157E0	-9.14173E0	4.72069E-3	9.377E-2	2.72919E1	-3.26699E1	-3.26056E1	2.67872E1	1.20311E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.0071E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.15892E-1	-7.98202E-1	-9.13177E0	-9.14149E0	4.62532E-3	9.36508E-2	2.72378E1	-3.26579E1	-3.26218E1	2.68226E1	1.2033E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01347E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.15892E-1	-7.97915E-1	-9.13157E0	-9.14173E0	4.72069E-3	9.40323E-2	2.73532E1	-3.26492E1	-3.26202E1	2.68169E1	1.19965E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.02659E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16035E-1	-7.9813E-1	-9.13146E0	-9.14202E0	4.64916E-3	9.41753E-2	2.72696E1	-3.26194E1	-3.26831E1	2.6807E1	1.20004E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.16131E-1	-7.97987E-1	-9.13148E0	-9.14187E0	5.05447E-3	9.41753E-2	2.73297E1	-3.26512E1	-3.26338E1	2.681E1	1.19851E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.0071E-1