[Scan]
initial_time=2016-01-28T23:02:11
final_time=2016-01-28T23:02:33
ip_count=19
run=1026
dataset=10
scan=789
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.0884E-4
ql1_vset=
ql1_vmon=-8.16178E-1
ql1_imon=1.38588E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=2.03366E-9
ql3_vset=
ql3_vmon=-9.13177E0
ql3_imon=2.65789E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-2.0076E-10
mult1=-1.03063E-8
mult2=-2.79247E-9
rf_tmon=-3.91761E-3
rf_agc=3.40185E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=1.67474E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65855E0
bslens_imon=2.59281E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19618E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.0499E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.18272E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02386E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04911E1
cs_ea1_imon=1.0829E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38141E0
lens1_imon=2.68837E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.40286E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=3.03928E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.14612E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.30319E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15075E1
os_ea1_imon=2.45265E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.0955E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=9.48404E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93572E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=1.97071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.125E-8
tplens_vset=1.4E-1
tplens_vmon=1.65441E0
tplens_imon=-4.75891E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26398E1
iondef3_imon=1.50445E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.58904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.9842E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=4.07538E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27274E0
ionrepsh_imon=8.42576E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.20631E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47449E0
os_ea2_imon=-5.64343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01629E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=3.37013E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23015E2
cs_ionfoca_imon=6.28796E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.10117E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72528E1
iondef1_imon=1.08927E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.09242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.99025E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.20239E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-8.06708E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=2.36564E-1
window_imon=-9.29243E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39336E-4
mask2_vset=0.0E0
mask2_vmon=-1.86825E1
mask2_imon=-5.54431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.64709E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.55341E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.1905E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41737E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33119E1
os_fil1_imon=9.42516E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08188E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60725E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31465E1
cs_fil1_imon=7.13682E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.58151E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60867E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.117E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15133E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.72234E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28746E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55668E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21163E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.82427E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.15797E-1	-7.98225E-1	-9.13181E0	-9.14178E0	4.43459E-3	9.36031E-2	2.73328E1	-3.26272E1	-3.26296E1	2.68094E1	1.19757E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.0958E0	-8.15868E-1	-7.98368E-1	-9.13165E0	-9.14147E0	4.45843E-3	9.39608E-2	2.73003E1	-3.26518E1	-3.26494E1	2.67926E1	1.20158E-7	2.52276E-3	2.52276E-3	6.33977E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.15916E-1	-7.98178E-1	-9.13165E0	-9.14178E0	4.72069E-3	9.38654E-2	2.73642E1	-3.26909E1	-3.26063E1	2.67839E1	1.19861E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00824E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.15892E-1	-7.9813E-1	-9.1315E0	-9.14185E0	4.57764E-3	9.377E-2	2.72913E1	-3.26777E1	-3.26308E1	2.6801E1	1.19941E-7	2.51498E-3	2.51498E-3	6.31798E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.16131E-1	-7.98225E-1	-9.13115E0	-9.14178E0	4.48227E-3	9.41992E-2	2.72084E1	-3.26603E1	-3.25978E1	2.68034E1	1.20017E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.16011E-1	-7.98607E-1	-9.13143E0	-9.14183E0	4.45843E-3	9.408E-2	2.73069E1	-3.26524E1	-3.26554E1	2.68112E1	1.20122E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09696E0	-8.16178E-1	-7.98631E-1	-9.1315E0	-9.14171E0	3.93391E-3	9.41515E-2	2.72913E1	-3.26482E1	-3.2623E1	2.67914E1	1.20122E-7	2.52099E-3	2.52099E-3	6.29098E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.1625E-1	-7.9844E-1	-9.13181E0	-9.14178E0	4.41074E-3	9.377E-2	2.74013E1	-3.26579E1	-3.26272E1	2.681E1	1.19809E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16226E-1	-7.98106E-1	-9.13165E0	-9.1418E0	4.33922E-3	9.38654E-2	2.7209E1	-3.26438E1	-3.26285E1	2.68118E1	1.19902E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.15988E-1	-7.98035E-1	-9.13208E0	-9.14168E0	4.88758E-3	9.408E-2	2.73213E1	-3.26705E1	-3.2614E1	2.67908E1	1.20137E-7	2.51804E-3	2.51804E-3	6.32978E-3	3.0201E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.16059E-1	-7.98368E-1	-9.13165E0	-9.14192E0	4.52995E-3	9.39846E-2	2.733E1	-3.26631E1	-3.26312E1	2.68053E1	1.20106E-7	2.50668E-3	2.50668E-3	6.31817E-3	3.02511E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.16178E-1	-7.98249E-1	-9.13186E0	-9.14183E0	4.55379E-3	9.38892E-2	2.73118E1	-3.26744E1	-3.26236E1	2.6768E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.15988E-1	-7.9844E-1	-9.13188E0	-9.14154E0	4.62532E-3	9.37223E-2	2.73364E1	-3.26673E1	-3.26248E1	2.6774E1	1.19925E-7	2.50914E-3	2.50914E-3	6.30182E-3	3.03618E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09642E0	-8.16154E-1	-7.98249E-1	-9.13169E0	-9.1419E0	4.76837E-3	9.38892E-2	2.73279E1	-3.26518E1	-3.25906E1	2.67968E1	1.19851E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.03027E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.15964E-1	-7.98249E-1	-9.13181E0	-9.1419E0	4.48227E-3	9.39608E-2	2.73027E1	-3.26723E1	-3.26248E1	2.6801E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.15845E-1	-7.97915E-1	-9.13181E0	-9.14166E0	4.55379E-3	9.40323E-2	2.73069E1	-3.26723E1	-3.262E1	2.67788E1	1.19705E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.02922E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.16059E-1	-7.98106E-1	-9.13174E0	-9.14164E0	4.14848E-3	9.41277E-2	2.72967E1	-3.26362E1	-3.26218E1	2.6825E1	1.2033E-7	2.52099E-3	2.52099E-3	6.34588E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16059E-1	-7.98368E-1	-9.13177E0	-9.14183E0	4.41074E-3	9.39846E-2	2.72684E1	-3.26591E1	-3.26296E1	2.68022E1	1.19601E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16202E-1	-7.98011E-1	-9.13165E0	-9.14161E0	4.45843E-3	9.40084E-2	2.73358E1	-3.26897E1	-3.26343E1	2.681E1	1.20226E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16178E-1	-7.98297E-1	-9.13177E0	-9.14168E0	4.43459E-3	9.377E-2	2.72528E1	-3.26663E1	-3.26398E1	2.67902E1	1.19902E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99175E-1