[Scan]
initial_time=2016-01-28T23:02:41
final_time=2016-01-28T23:03:04
ip_count=19
run=1026
dataset=10
scan=790
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08773E-4
ql1_vset=
ql1_vmon=-8.16011E-1
ql1_imon=1.38641E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=2.04799E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=2.95579E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-2.06602E-10
mult1=-9.67509E-9
mult2=-2.83316E-9
rf_tmon=-4.04447E-3
rf_agc=3.32169E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=1.715E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64616E0
bslens_imon=2.67776E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19913E1
lens5a_imon=2.00244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.05008E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=3.17227E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=1.09175E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40972E0
lens1_imon=2.58219E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64579E1
os_ef1alow_imon=2.97939E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.40074E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84168E1
cs_ef1a_imon=3.03256E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.14858E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11378E1
os_restr1_imon=4.30277E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15347E1
os_ea1_imon=2.46221E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6356E1
os_ef1bup_imon=3.09095E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24856E0
cs_ionrep_imon=9.4982E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01734E1
cs_anode1_imon=1.96636E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.12627E-8
tplens_vset=1.4E-1
tplens_vmon=1.64202E0
tplens_imon=-2.8473E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2631E1
iondef3_imon=1.49737E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2684E1
iondef2_imon=1.57453E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98484E-4
ql6_vset=1.0E-1
ql6_vmon=9.40561E-2
ql6_imon=3.99995E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27569E0
ionrepsh_imon=8.65936E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.17658E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74594E1
cs_ef2b_imon=3.13995E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48511E0
os_ea2_imon=-5.39567E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71078E1
cs_ef2a_imon=3.18791E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07773E0
os_ef2alow_imon=-2.49813E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94335E-1
os_ef2bup_imon=-5.28528E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10753E1
os_restr2_imon=3.3641E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.31592E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.08521E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72789E1
iondef1_imon=1.08927E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67876E1
iondef4_imon=1.08781E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.00473E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.19415E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1006E0
cs_ionaccel_imon=-8.36956E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47282E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56353E1
einzel_imon=7.76777E-6
window_vset=0.0E0
window_vmon=2.23478E-1
window_imon=-1.07675E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39209E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-4.92906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.48427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.53571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=6.38352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33102E1
os_fil1_imon=9.41128E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07879E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60451E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31493E1
cs_fil1_imon=7.98826E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.7838E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61044E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00303E-2
os_fil2_imon=-2.34483E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17879E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.72108E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29527E-1
cs_fil2_imon=-1.98572E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21208E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3126E-3
inlet_lpb_pmon=3.0223E-1
chamber_ion_pmon=1.19782E-7
chamber_cvt_pmon=2.51472E-3
foreline_cvt_pmon=2.51472E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.17706E-1
res40_imon=-2.43905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16131E-1	-7.98297E-1	-9.13167E0	-9.14166E0	4.60148E-3	9.377E-2	2.7308E1	-3.27003E1	-3.26242E1	2.68022E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01609E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.16178E-1	-7.98202E-1	-9.13167E0	-9.1419E0	4.3869E-3	9.37939E-2	2.73309E1	-3.26925E1	-3.25996E1	2.6802E1	1.19851E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09619E0	-8.16083E-1	-7.98297E-1	-9.13165E0	-9.14202E0	4.48227E-3	9.39846E-2	2.72373E1	-3.26857E1	-3.26272E1	2.68082E1	1.20003E-7	2.52324E-3	2.52324E-3	6.31242E-3	3.00054E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.16059E-1	-7.98202E-1	-9.1315E0	-9.14176E0	4.3869E-3	9.38892E-2	2.73484E1	-3.26981E1	-3.26128E1	2.6801E1	1.19891E-7	2.51498E-3	2.51498E-3	6.3445E-3	2.99093E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.15916E-1	-7.98345E-1	-9.13148E0	-9.14159E0	4.22001E-3	9.39846E-2	2.7321E1	-3.26476E1	-3.26334E1	2.68004E1	1.20069E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16083E-1	-7.98368E-1	-9.1315E0	-9.14152E0	4.36306E-3	9.36031E-2	2.72845E1	-3.26603E1	-3.25954E1	2.67839E1	1.20078E-7	2.51783E-3	2.51783E-3	6.3126E-3	2.99014E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09611E0	-8.16107E-1	-7.98202E-1	-9.13186E0	-9.1418E0	4.64916E-3	9.39608E-2	2.72823E1	-3.26458E1	-3.26326E1	2.67722E1	1.19937E-7	2.51952E-3	2.51952E-3	6.31879E-3	2.989E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16464E-1	-7.98297E-1	-9.13186E0	-9.1418E0	4.3869E-3	9.408E-2	2.73093E1	-3.26657E1	-3.26446E1	2.68346E1	1.20122E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09611E0	-8.15845E-1	-7.9844E-1	-9.13162E0	-9.14178E0	4.43459E-3	9.40323E-2	2.73267E1	-3.26663E1	-3.26344E1	2.6807E1	1.19939E-7	2.51552E-3	2.51552E-3	6.31014E-3	3.02922E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.15964E-1	-7.98607E-1	-9.13186E0	-9.14195E0	4.3869E-3	9.39608E-2	2.73117E1	-3.26506E1	-3.2653E1	2.6807E1					
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.15964E-1	-7.98345E-1	-9.13174E0	-9.14166E0	4.48227E-3	9.41992E-2	2.72751E1	-3.26729E1	-3.26272E1	2.68136E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16178E-1	-7.98345E-1	-9.13169E0	-9.14185E0	4.62532E-3	9.42469E-2	2.72744E1	-3.26655E1	-3.2652E1	2.68004E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.02253E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16107E-1	-7.98154E-1	-9.13155E0	-9.14168E0	4.62532E-3	9.41753E-2	2.72504E1	-3.2632E1	-3.26458E1	2.67752E1	1.19913E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16083E-1	-7.98321E-1	-9.13188E0	-9.14185E0	4.86374E-3	9.43899E-2	2.73261E1	-3.26554E1	-3.26392E1	2.67788E1	1.19705E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.15797E-1	-7.98345E-1	-9.13165E0	-9.14204E0	4.74453E-3	9.43661E-2	2.73399E1	-3.26759E1	-3.26266E1	2.68221E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.15845E-1	-7.98345E-1	-9.13174E0	-9.14166E0	4.74453E-3	9.41038E-2	2.72823E1	-3.26969E1	-3.26224E1	2.67818E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01738E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.16202E-1	-7.98202E-1	-9.13169E0	-9.14149E0	4.76837E-3	9.40561E-2	2.72823E1	-3.26567E1	-3.26512E1	2.6804E1	1.19861E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.15988E-1	-7.98512E-1	-9.13148E0	-9.14147E0	4.64916E-3	9.408E-2	2.72962E1	-3.26472E1	-3.26207E1	2.68046E1	1.19872E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.00676E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.15916E-1	-7.98655E-1	-9.1316E0	-9.14164E0	4.17233E-3	9.37939E-2	2.7333E1	-3.26636E1	-3.26197E1	2.67694E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16011E-1	-7.9875E-1	-9.13153E0	-9.14185E0	4.36306E-3	9.40561E-2	2.72789E1	-3.2684E1	-3.2631E1	2.67876E1	1.19782E-7	2.51472E-3	2.51472E-3	6.3126E-3	3.0223E-1