[Scan]
initial_time=2016-01-28T23:03:41
final_time=2016-01-28T23:04:02
ip_count=19
run=1026
dataset=10
scan=792
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.16011E-1
ql1_imon=1.38763E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=1.97254E-9
ql3_vset=
ql3_vmon=-9.13174E0
ql3_imon=2.66492E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-2.20573E-10
mult1=-1.02323E-8
mult2=-2.73306E-9
rf_tmon=-4.12014E-3
rf_agc=3.36277E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.65919E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66208E0
bslens_imon=2.74146E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19724E1
lens5a_imon=2.00669E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53496E1
cs_ef1b_imon=3.17155E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02032E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04876E1
cs_ea1_imon=1.09317E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39144E0
lens1_imon=2.69899E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03826E1
cs_ea2_imon=1.40994E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84142E1
cs_ef1a_imon=3.04108E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.14312E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.30896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15158E1
os_ea1_imon=2.45619E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25682E0
cs_ionrep_imon=9.41679E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93374E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=1.95881E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.12712E-8
tplens_vset=1.4E-1
tplens_vmon=1.65736E0
tplens_imon=-1.71468E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.51365E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26278E1
iondef2_imon=1.59258E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98608E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.97913E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25682E0
ionrepsh_imon=8.43637E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33392E1
lens5b_imon=2.1964E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48629E0
os_ea2_imon=-8.08562E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00736E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.19714E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.16044E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.37337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23057E2
cs_ionfoca_imon=6.30919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01995E1
cs_anode2_imon=2.09432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7308E1
iondef1_imon=1.10414E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6792E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.00176E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=7.21277E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11272E0
cs_ionaccel_imon=-9.07619E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.4746E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.31758E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86734E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.83467E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.71976E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=6.84718E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52072E0
defgridb_imon=5.96233E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33128E1
os_fil1_imon=9.41183E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0766E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60577E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31537E1
cs_fil1_imon=7.04071E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.60554E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61003E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00303E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.11529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.56668E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29911E-1
cs_fil2_imon=-2.18544E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21349E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3445E-3
inlet_lpb_pmon=3.01104E-1
chamber_ion_pmon=1.19841E-7
chamber_cvt_pmon=2.51393E-3
foreline_cvt_pmon=2.51393E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.19048E-1
res40_imon=-2.35281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.1594E-1	-7.98297E-1	-9.13172E0	-9.14211E0	4.55379E-3	9.41753E-2	2.72835E1	-3.26585E1	-3.26272E1	2.68016E1	1.19953E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.98665E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16059E-1	-7.98082E-1	-9.13169E0	-9.14195E0	4.48227E-3	9.408E-2	2.7272E1	-3.26397E1	-3.26173E1	2.67782E1	1.2033E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.98481E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.16178E-1	-7.98249E-1	-9.13153E0	-9.14192E0	4.64916E-3	9.408E-2	2.73034E1	-3.26391E1	-3.26596E1	2.68267E1	1.19766E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.00676E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16321E-1	-7.98225E-1	-9.13172E0	-9.14166E0	4.55379E-3	9.40084E-2	2.73099E1	-3.26374E1	-3.265E1	2.6798E1	1.20142E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.16154E-1	-7.98202E-1	-9.13181E0	-9.1418E0	4.24385E-3	9.377E-2	2.72594E1	-3.26639E1	-3.2617E1	2.68088E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16321E-1	-7.98202E-1	-9.13177E0	-9.14183E0	4.19617E-3	9.38416E-2	2.73874E1	-3.27077E1	-3.26038E1	2.68238E1	1.19757E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16464E-1	-7.98178E-1	-9.13212E0	-9.14207E0	4.50611E-3	9.36508E-2	2.72811E1	-3.26565E1	-3.26365E1	2.68057E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16345E-1	-7.97939E-1	-9.13193E0	-9.1418E0	4.55379E-3	9.36985E-2	2.73095E1	-3.26511E1	-3.26349E1	2.68236E1	1.1998E-7	2.51838E-3	2.51838E-3	6.32107E-3	3.00848E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.15964E-1	-7.97915E-1	-9.13203E0	-9.14192E0	4.69685E-3	9.377E-2	2.72594E1	-3.26621E1	-3.26813E1	2.67978E1	1.20139E-7	2.51944E-3	2.51944E-3	6.32118E-3	3.01444E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16202E-1	-7.98059E-1	-9.13186E0	-9.14187E0	4.50611E-3	9.40084E-2	2.73273E1	-3.26567E1	-3.2635E1	2.68232E1	1.19749E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0148E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.16369E-1	-7.98297E-1	-9.13169E0	-9.14187E0	4.57764E-3	9.38177E-2	2.72835E1	-3.26573E1	-3.26176E1	2.67751E1	1.19607E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.00144E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.16131E-1	-7.98416E-1	-9.13146E0	-9.14199E0	4.19617E-3	9.38177E-2	2.7373E1	-3.27065E1	-3.25834E1	2.67992E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.15845E-1	-7.98512E-1	-9.13169E0	-9.14166E0	4.36306E-3	9.39131E-2	2.73147E1	-3.26663E1	-3.26464E1	2.6795E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09657E0	-8.16011E-1	-7.98106E-1	-9.1316E0	-9.14173E0	4.41074E-3	9.35078E-2	2.72204E1	-3.26356E1	-3.26711E1	2.67932E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16083E-1	-7.98154E-1	-9.13119E0	-9.14164E0	4.31538E-3	9.36031E-2	2.73375E1	-3.26531E1	-3.26313E1	2.68186E1	1.19913E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16226E-1	-7.98202E-1	-9.13131E0	-9.14183E0	4.62532E-3	9.3627E-2	2.73273E1	-3.26362E1	-3.26218E1	2.68046E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16059E-1	-7.98464E-1	-9.13167E0	-9.14183E0	4.60148E-3	9.38177E-2	2.73021E1	-3.26699E1	-3.26164E1	2.67986E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.16178E-1	-7.98535E-1	-9.1315E0	-9.1418E0	4.98295E-3	9.39608E-2	2.73222E1	-3.26537E1	-3.26248E1	2.68064E1	1.19757E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00824E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09619E0	-8.15964E-1	-7.98082E-1	-9.13177E0	-9.14197E0	4.74453E-3	9.36508E-2	2.72957E1	-3.26815E1	-3.2603E1	2.67914E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16011E-1	-7.98297E-1	-9.13174E0	-9.14202E0	4.76837E-3	9.36747E-2	2.7308E1	-3.26278E1	-3.26425E1	2.6792E1	1.19841E-7	2.51393E-3	2.51393E-3	6.3445E-3	3.01104E-1