[Scan]
initial_time=2016-01-28T23:04:37
final_time=2016-01-28T23:04:58
ip_count=19
run=1026
dataset=10
scan=794
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08843E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.38743E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.95439E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=2.55966E-10
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=-1.79327E-10
mult1=-1.00432E-8
mult2=-2.77225E-9
rf_tmon=-5.30584E-3
rf_agc=3.2613E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.73382E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66687E0
bslens_imon=2.58333E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20152E1
lens5a_imon=1.98601E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05138E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5369E1
cs_ef1b_imon=3.18999E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02121E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=1.08567E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37314E0
lens1_imon=2.73976E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64718E1
os_ef1alow_imon=2.98878E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04067E1
cs_ea2_imon=1.39922E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=3.05411E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.15218E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11332E1
os_restr1_imon=4.29895E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15085E1
os_ea1_imon=2.45877E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63577E1
os_ef1bup_imon=3.09477E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27122E0
cs_ionrep_imon=9.53922E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93389E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01624E1
cs_anode1_imon=1.96427E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.13757E-8
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-2.49778E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26113E1
iondef3_imon=1.51011E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26502E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98565E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=4.01804E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.266E0
ionrepsh_imon=8.4755E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33739E1
lens5b_imon=2.18485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74478E1
cs_ef2b_imon=3.13821E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47573E0
os_ea2_imon=-5.90446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.712E1
cs_ef2a_imon=3.19729E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06035E0
os_ef2alow_imon=-2.49813E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00706E-1
os_ef2bup_imon=-5.16365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.37105E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.30345E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0174E1
cs_anode2_imon=2.09529E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7255E1
iondef1_imon=1.10027E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68166E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.02988E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.23166E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13941E0
cs_ionaccel_imon=-8.96035E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56179E1
einzel_imon=7.73302E-6
window_vset=0.0E0
window_vmon=2.35641E-1
window_imon=-9.75966E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86871E1
mask2_imon=-5.90213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.93669E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.46277E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=6.9842E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43841E0
defgridb_imon=6.16382E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33133E1
os_fil1_imon=9.40486E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07984E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60639E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31485E1
cs_fil1_imon=7.45538E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00444E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61044E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.12808E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14983E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.59358E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30651E-1
cs_fil2_imon=-2.368E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.48953E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21328E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.67894E-1
res40_imon=-2.40777E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.16202E-1	-7.98345E-1	-9.13177E0	-9.14204E0	4.60148E-3	9.35793E-2	2.73427E1	-3.26733E1	-3.26254E1	2.68094E1	1.19941E-7	2.52025E-3	2.52025E-3	6.2863E-3	2.99343E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.16393E-1	-7.98416E-1	-9.13165E0	-9.14195E0	4.76837E-3	9.38892E-2	2.72745E1	-3.26499E1	-3.26738E1	2.68148E1	1.20127E-7	2.52093E-3	2.52093E-3	6.29703E-3	2.99753E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09696E0	-8.16059E-1	-7.98202E-1	-9.13167E0	-9.14209E0	4.69685E-3	9.35316E-2	2.73399E1	-3.2635E1	-3.27263E1	2.68232E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9874E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.16226E-1	-7.9844E-1	-9.13155E0	-9.14199E0	4.57764E-3	9.36985E-2	2.72518E1	-3.26597E1	-3.25232E1	2.67854E1	1.19925E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00676E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.16107E-1	-7.98345E-1	-9.13155E0	-9.14195E0	4.76837E-3	9.37939E-2	2.7312E1	-3.27152E1	-3.25808E1	2.67968E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16131E-1	-7.98559E-1	-9.13155E0	-9.14214E0	4.88758E-3	9.38177E-2	2.72873E1	-3.26805E1	-3.25832E1	2.6801E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16321E-1	-7.98321E-1	-9.13141E0	-9.14178E0	4.50611E-3	9.36508E-2	2.73316E1	-3.26655E1	-3.26189E1	2.68046E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00563E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16369E-1	-7.98631E-1	-9.13138E0	-9.1419E0	4.45843E-3	9.39608E-2	2.72955E1	-3.26428E1	-3.26296E1	2.67982E1	1.19653E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16059E-1	-7.98583E-1	-9.1315E0	-9.14211E0	4.48227E-3	9.41277E-2	2.73003E1	-3.26627E1	-3.26422E1	2.67587E1	1.20106E-7	2.52276E-3	2.52276E-3	6.34518E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16083E-1	-7.98512E-1	-9.13208E0	-9.14214E0	4.60148E-3	9.377E-2	2.7285E1	-3.26685E1	-3.2636E1	2.67619E1	1.20069E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.02133E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16107E-1	-7.98321E-1	-9.13198E0	-9.14214E0	4.41074E-3	9.40084E-2	2.73345E1	-3.26524E1	-3.26164E1	2.68178E1	1.19965E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16107E-1	-7.98559E-1	-9.13155E0	-9.14197E0	4.31538E-3	9.40323E-2	2.72841E1	-3.26296E1	-3.26314E1	2.67704E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.15868E-1	-7.98535E-1	-9.13153E0	-9.14207E0	4.86374E-3	9.39369E-2	2.72961E1	-3.26434E1	-3.25984E1	2.68406E1	1.19757E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16178E-1	-7.98249E-1	-9.13172E0	-9.1423E0	4.62532E-3	9.39608E-2	2.73225E1	-3.26518E1	-3.26272E1	2.67818E1	1.19851E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00453E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16321E-1	-7.98416E-1	-9.13155E0	-9.14178E0	4.57764E-3	9.40323E-2	2.73087E1	-3.26651E1	-3.2644E1	2.67998E1	1.19809E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.15988E-1	-7.98392E-1	-9.13162E0	-9.14156E0	4.3869E-3	9.39369E-2	2.73104E1	-3.26791E1	-3.26472E1	2.68076E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00824E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16369E-1	-7.98106E-1	-9.13167E0	-9.14187E0	4.60148E-3	9.36031E-2	2.72913E1	-3.26585E1	-3.26218E1	2.67908E1	1.20004E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16536E-1	-7.98512E-1	-9.13148E0	-9.14152E0	4.55379E-3	9.38892E-2	2.73434E1	-3.26632E1	-3.26148E1	2.68088E1	1.2033E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16393E-1	-7.98178E-1	-9.13177E0	-9.14164E0	4.72069E-3	9.38654E-2	2.73135E1	-3.26783E1	-3.26182E1	2.67884E1	1.20278E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16441E-1	-7.98655E-1	-9.13146E0	-9.14161E0	4.72069E-3	9.36747E-2	2.7255E1	-3.26502E1	-3.26113E1	2.68166E1	1.20055E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.00197E-1