[Scan]
initial_time=2016-01-28T23:05:05
final_time=2016-01-28T23:05:26
ip_count=19
run=1026
dataset=10
scan=795
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08745E-4
ql1_vset=
ql1_vmon=-8.15964E-1
ql1_imon=1.387E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.05917E-9
ql3_vset=
ql3_vmon=-9.13188E0
ql3_imon=3.18074E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-1.91581E-10
mult1=-1.04387E-8
mult2=-2.84037E-9
rf_tmon=-5.09523E-3
rf_agc=3.30812E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.68526E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64131E0
bslens_imon=2.64249E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20036E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.05056E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53661E1
cs_ef1b_imon=3.17644E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04703E1
cs_ea1_imon=1.09517E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43005E0
lens1_imon=2.66639E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64574E1
os_ef1alow_imon=2.98461E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03935E1
cs_ea2_imon=1.40527E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8418E1
cs_ef1a_imon=3.04021E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.15823E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11343E1
os_restr1_imon=4.3059E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15015E1
os_ea1_imon=2.47697E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63763E1
os_ef1bup_imon=3.08991E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=9.50025E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.93321E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01908E1
cs_anode1_imon=1.96531E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.12995E-8
tplens_vset=1.4E-1
tplens_vmon=1.62606E0
tplens_imon=-3.69737E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.51115E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26747E1
iondef2_imon=1.57672E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98554E-4
ql6_vset=1.0E-1
ql6_vmon=9.408E-2
ql6_imon=3.99352E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27771E0
ionrepsh_imon=8.51325E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33686E1
lens5b_imon=2.19692E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74553E1
cs_ef2b_imon=3.13647E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47523E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71229E1
cs_ef2a_imon=3.18652E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07541E0
os_ef2alow_imon=-2.62324E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94914E-1
os_ef2bup_imon=-5.24705E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=3.37731E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.31807E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01757E1
cs_anode2_imon=2.09633E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.10064E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.10449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.04624E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.29225E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11624E0
cs_ionaccel_imon=-8.96035E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02114E2
cs_ionfocb_imon=1.4739E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56434E1
einzel_imon=7.7643E-6
window_vset=0.0E0
window_vmon=2.29849E-1
window_imon=-9.48164E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39289E-4
mask2_vset=0.0E0
mask2_vmon=-1.86888E1
mask2_imon=-6.84045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.73799E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.8637E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.33158E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53849E0
defgridb_imon=6.2353E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33184E1
os_fil1_imon=9.41186E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08349E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61063E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31539E1
cs_fil1_imon=6.74875E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.45366E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61523E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00436E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0977E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.29837E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30026E-1
cs_fil2_imon=-2.32166E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.30998E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21506E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40072E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98013E-1
res40_imon=-2.33131E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16011E-1	-7.98559E-1	-9.13174E0	-9.14195E0	4.19617E-3	9.34839E-2	2.72588E1	-3.26579E1	-3.26176E1	2.67995E1	1.20307E-7	2.52262E-3	2.52262E-3	6.32273E-3	3.01365E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16131E-1	-7.98535E-1	-9.13181E0	-9.14204E0	4.14848E-3	9.377E-2	2.72943E1	-3.26621E1	-3.26326E1	2.68051E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.1625E-1	-7.98583E-1	-9.13177E0	-9.14161E0	3.86238E-3	9.39608E-2	2.73151E1	-3.2652E1	-3.2626E1	2.68012E1	1.19819E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.98554E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.15821E-1	-7.98535E-1	-9.13188E0	-9.14176E0	4.02927E-3	9.39131E-2	2.72576E1	-3.26729E1	-3.2638E1	2.67866E1	1.20042E-7	2.51814E-3	2.51814E-3	6.33388E-3	2.99093E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.15654E-1	-7.98535E-1	-9.13153E0	-9.14161E0	3.91006E-3	9.38177E-2	2.72803E1	-3.26567E1	-3.26166E1	2.67878E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.15582E-1	-7.98464E-1	-9.13165E0	-9.14176E0	3.88622E-3	9.37939E-2	2.72811E1	-3.26705E1	-3.26296E1	2.68059E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02659E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.15606E-1	-7.98035E-1	-9.13167E0	-9.14197E0	4.24385E-3	9.36747E-2	2.73135E1	-3.26651E1	-3.2608E1	2.68032E1	1.198E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.1563E-1	-7.9813E-1	-9.13174E0	-9.14178E0	4.02927E-3	9.37939E-2	2.72727E1	-3.26645E1	-3.26404E1	2.68036E1	1.20191E-7	2.5225E-3	2.5225E-3	6.31858E-3	2.99879E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16083E-1	-7.98392E-1	-9.13165E0	-9.14176E0	4.05312E-3	9.34839E-2	2.72997E1	-3.26458E1	-3.26392E1	2.68009E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01738E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.15988E-1	-7.98154E-1	-9.13157E0	-9.1414E0	4.36306E-3	9.39608E-2	2.72827E1	-3.26413E1	-3.26478E1	2.68082E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16178E-1	-7.98416E-1	-9.13174E0	-9.14152E0	4.33922E-3	9.39131E-2	2.72973E1	-3.26338E1	-3.26284E1	2.68172E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.15892E-1	-7.98297E-1	-9.13177E0	-9.14166E0	4.1008E-3	9.39608E-2	2.73375E1	-3.2675E1	-3.26384E1	2.68082E1	1.20004E-7	2.52276E-3	2.52276E-3	6.33977E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.15606E-1	-7.98392E-1	-9.13186E0	-9.14183E0	4.64916E-3	9.38416E-2	2.72685E1	-3.26856E1	-3.26938E1	2.68227E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.1594E-1	-7.98535E-1	-9.13153E0	-9.1418E0	4.62532E-3	9.38416E-2	2.73339E1	-3.26693E1	-3.26134E1	2.68076E1	1.20092E-7	2.51814E-3	2.51814E-3	6.32858E-3	3.01356E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.15988E-1	-7.98583E-1	-9.13177E0	-9.14159E0	4.31538E-3	9.38177E-2	2.72974E1	-3.26697E1	-3.26543E1	2.678E1	1.20069E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16154E-1	-7.98631E-1	-9.13167E0	-9.14149E0	4.24385E-3	9.39846E-2	2.73222E1	-3.26829E1	-3.26132E1	2.68472E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00197E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.1594E-1	-7.98726E-1	-9.13162E0	-9.1419E0	4.24385E-3	9.40323E-2	2.72833E1	-3.26661E1	-3.2629E1	2.67373E1	1.20031E-7	2.51248E-3	2.51248E-3	6.29624E-3	3.01475E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16011E-1	-7.98488E-1	-9.13162E0	-9.14161E0	4.1008E-3	9.4223E-2	2.72815E1	-3.26502E1	-3.26225E1	2.67856E1	1.19861E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.15797E-1	-7.98655E-1	-9.13184E0	-9.14171E0	4.45843E-3	9.42945E-2	2.73063E1	-3.26697E1	-3.25835E1	2.67932E1	1.20158E-7	2.52707E-3	2.52707E-3	6.32896E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.15964E-1	-7.98416E-1	-9.13188E0	-9.14204E0	4.57764E-3	9.408E-2	2.73069E1	-3.26747E1	-3.26386E1	2.67914E1	1.19953E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.9943E-1