[Scan]
initial_time=2016-01-28T23:06:29
final_time=2016-01-28T23:06:50
ip_count=19
run=1026
dataset=10
scan=798
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08923E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=1.38371E-8
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=2.02341E-9
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=2.53356E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-2.02894E-10
mult1=-9.78308E-9
mult2=-2.78205E-9
rf_tmon=-4.3797E-3
rf_agc=3.27251E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.31538E-3
ql5_imon=1.70974E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65147E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19807E1
lens5a_imon=1.98722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5382E1
cs_ef1b_imon=3.18344E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.0234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=1.09706E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39793E0
lens1_imon=2.51494E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64518E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03513E1
cs_ea2_imon=1.40747E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.69672E-1
olens2_imon=1.16817E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=4.3068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=2.45336E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25918E0
cs_ionrep_imon=9.54775E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91928E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=1.96062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.14239E-8
tplens_vset=1.4E-1
tplens_vmon=1.64379E0
tplens_imon=-3.37821E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26791E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26526E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98523E-4
ql6_vset=1.0E-1
ql6_vmon=9.41992E-2
ql6_imon=3.98576E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25741E0
ionrepsh_imon=8.59919E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33504E1
lens5b_imon=2.17941E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73979E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46564E0
os_ea2_imon=-4.86476E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.37986E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.31946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.09036E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73257E1
iondef1_imon=1.09494E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.03839E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.3008E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-8.82392E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47316E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.7383E-6
window_vset=0.0E0
window_vmon=2.23349E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=8.24525E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.90381E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.0737E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52662E0
defgridb_imon=6.05081E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33196E1
os_fil1_imon=9.4227E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0805E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61169E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31536E1
cs_fil1_imon=7.76151E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.92389E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61647E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91439E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02519E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.05287E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.13138E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21498E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.49681E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09696E0	-8.15845E-1	-7.98249E-1	-9.13153E0	-9.14178E0	4.22001E-3	9.35555E-2	2.73363E1	-3.26464E1	-3.26332E1	2.68053E1	1.20106E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.9943E-1
2.0E0	4.0E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.15845E-1	-7.97796E-1	-9.13169E0	-9.14197E0	4.14848E-3	9.38892E-2	2.72947E1	-3.26776E1	-3.26167E1	2.67866E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.97704E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.1563E-1	-7.98202E-1	-9.1316E0	-9.14187E0	4.60148E-3	9.40561E-2	2.72841E1	-3.26579E1	-3.26543E1	2.68076E1	1.198E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00197E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16035E-1	-7.98106E-1	-9.13172E0	-9.14209E0	4.26769E-3	9.40323E-2	2.73153E1	-3.26585E1	-3.26585E1	2.6798E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.1625E-1	-7.98082E-1	-9.1315E0	-9.14216E0	4.19617E-3	9.38177E-2	2.72811E1	-3.26651E1	-3.2629E1	2.67986E1	1.20278E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.1563E-1	-7.98345E-1	-9.13146E0	-9.14199E0	4.26769E-3	9.41038E-2	2.73022E1	-3.26425E1	-3.26197E1	2.67984E1	1.19972E-7	2.51883E-3	2.51883E-3	6.31808E-3	2.99893E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.15725E-1	-7.98678E-1	-9.13155E0	-9.14185E0	4.48227E-3	9.40084E-2	2.72864E1	-3.26279E1	-3.26104E1	2.68151E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.15845E-1	-7.98297E-1	-9.1315E0	-9.14211E0	4.41074E-3	9.37939E-2	2.73171E1	-3.26813E1	-3.26008E1	2.67962E1	1.19895E-7	2.51642E-3	2.51642E-3	6.29581E-3	3.02303E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.15988E-1	-7.98416E-1	-9.13153E0	-9.14197E0	4.55379E-3	9.39369E-2	2.72781E1	-3.2644E1	-3.26086E1	2.68034E1	1.20017E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16178E-1	-7.98368E-1	-9.13165E0	-9.14211E0	4.3869E-3	9.40323E-2	2.72793E1	-3.26639E1	-3.26338E1	2.67764E1	1.20174E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16202E-1	-7.98488E-1	-9.13198E0	-9.14228E0	4.62532E-3	9.39846E-2	2.72841E1	-3.26711E1	-3.26554E1	2.67944E1	1.20278E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16512E-1	-7.98512E-1	-9.13155E0	-9.14204E0	4.74453E-3	9.37462E-2	2.73267E1	-3.26512E1	-3.26512E1	2.68064E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99941E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.16083E-1	-7.98416E-1	-9.13165E0	-9.14166E0	4.673E-3	9.39131E-2	2.73853E1	-3.26207E1	-3.26207E1	2.67879E1	1.19913E-7	2.51443E-3	2.51443E-3	6.29098E-3	2.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.1625E-1	-7.98297E-1	-9.13208E0	-9.14185E0	4.81606E-3	9.39846E-2	2.72426E1	-3.2652E1	-3.26325E1	2.68064E1	1.20055E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00966E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16011E-1	-7.98464E-1	-9.13169E0	-9.14187E0	4.86374E-3	9.41277E-2	2.73271E1	-3.26591E1	-3.26468E1	2.68016E1	1.20158E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16274E-1	-7.98488E-1	-9.13165E0	-9.1418E0	4.64916E-3	9.39131E-2	2.73682E1	-3.26494E1	-3.26452E1	2.67746E1	1.20031E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.00942E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16131E-1	-7.98464E-1	-9.13155E0	-9.14168E0	4.36306E-3	9.38892E-2	2.73033E1	-3.26602E1	-3.26366E1	2.67908E1	1.19705E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16083E-1	-7.9844E-1	-9.13138E0	-9.14185E0	4.33922E-3	9.40323E-2	2.73086E1	-3.26649E1	-3.26083E1	2.67962E1	1.19861E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16393E-1	-7.98345E-1	-9.13143E0	-9.14214E0	4.64916E-3	9.39608E-2	2.72907E1	-3.26344E1	-3.26663E1	2.68111E1	1.19991E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.00852E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16298E-1	-7.98774E-1	-9.13157E0	-9.14211E0	4.31538E-3	9.41992E-2	2.73257E1	-3.26526E1	-3.26791E1	2.68076E1	1.20017E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.00563E-1