[Scan]
initial_time=2016-01-28T23:07:25
final_time=2016-01-28T23:07:45
ip_count=19
run=1026
dataset=10
scan=800
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09665E0
qbias_imon=-1.08762E-4
ql1_vset=
ql1_vmon=-8.1594E-1
ql1_imon=1.38388E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.04637E-9
ql3_vset=
ql3_vmon=-9.13203E0
ql3_imon=3.13568E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=-1.83213E-10
mult1=-1.03831E-8
mult2=-2.7809E-9
rf_tmon=-4.89503E-3
rf_agc=3.35365E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.68171E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65206E0
bslens_imon=2.6636E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19866E1
lens5a_imon=1.99925E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.04923E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53499E1
cs_ef1b_imon=3.18304E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02358E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05206E1
cs_ea1_imon=1.10591E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40441E0
lens1_imon=2.52202E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6473E1
os_ef1alow_imon=2.96132E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.39826E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84168E1
cs_ef1a_imon=3.04716E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.17746E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11355E1
os_restr1_imon=4.2986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15364E1
os_ea1_imon=2.44734E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63913E1
os_ef1bup_imon=3.09651E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26626E0
cs_ionrep_imon=9.59376E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93516E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01705E1
cs_anode1_imon=1.9528E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.15668E-8
tplens_vset=1.4E-1
tplens_vmon=1.64143E0
tplens_imon=-1.39614E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26027E1
iondef3_imon=1.48993E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98604E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.99883E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23853E0
ionrepsh_imon=8.64166E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33994E1
lens5b_imon=2.18791E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74658E1
cs_ef2b_imon=3.13578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4916E0
os_ea2_imon=-7.12998E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.008E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71113E1
cs_ef2a_imon=3.19729E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07657E0
os_ef2alow_imon=-2.56416E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00127E-1
os_ef2bup_imon=-5.23315E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.37453E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.31344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01746E1
cs_anode2_imon=2.09286E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.10626E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67818E1
iondef4_imon=1.10588E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.08219E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=7.33834E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1481E0
cs_ionaccel_imon=-1.042E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5633E1
einzel_imon=7.72954E-6
window_vset=0.0E0
window_vmon=2.24057E-1
window_imon=-8.78659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82671E2
mask1_imon=2.39028E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-4.33827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92616E3
multa_neg_imon=7.5763E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.48616E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.41348E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63293E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33173E1
os_fil1_imon=9.41453E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07393E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61244E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31652E1
cs_fil1_imon=7.42642E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0056E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62042E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.90173E-2
os_fil2_imon=-2.37379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15562E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.33509E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31525E-1
cs_fil2_imon=-2.30428E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40844E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21692E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.00909E-1
res40_imon=-2.22706E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.15821E-1	-7.98011E-1	-9.13186E0	-9.14176E0	4.62532E-3	9.41992E-2	2.72797E1	-3.26419E1	-3.2652E1	2.68106E1	1.20106E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.98665E-1
2.0E0	2.2E1	0.0E0	3.16E2	1.6E2	-2.09356E0	-8.15845E-1	-7.98392E-1	-9.13193E0	-9.14156E0	4.76837E-3	9.38416E-2	2.72542E1	-3.26439E1	-3.26048E1	2.67802E1	1.198E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.98156E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.15868E-1	-7.98392E-1	-9.13172E0	-9.14142E0	4.8399E-3	9.39608E-2	2.73127E1	-3.26515E1	-3.25923E1	2.67719E1	1.19967E-7	2.51447E-3	2.51447E-3	6.32784E-3	2.99663E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16011E-1	-7.98225E-1	-9.13146E0	-9.14166E0	4.79221E-3	9.39846E-2	2.72847E1	-3.26633E1	-3.26332E1	2.68175E1	1.1995E-7	2.51758E-3	2.51758E-3	6.31321E-3	3.01748E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.1594E-1	-7.98321E-1	-9.13157E0	-9.14199E0	4.74453E-3	9.42945E-2	2.73063E1	-3.26627E1	-3.2623E1	2.6834E1	1.20174E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16083E-1	-7.98464E-1	-9.13169E0	-9.1418E0	4.57764E-3	9.40084E-2	2.73051E1	-3.26573E1	-3.25977E1	2.67836E1	1.20062E-7	2.51268E-3	2.51268E-3	6.3428E-3	2.99346E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16178E-1	-7.98273E-1	-9.1315E0	-9.14199E0	4.52995E-3	9.41038E-2	2.73786E1	-3.26542E1	-3.25893E1	2.68202E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.15964E-1	-7.98249E-1	-9.13165E0	-9.14235E0	4.14848E-3	9.4223E-2	2.72486E1	-3.2641E1	-3.26386E1	2.68313E1	1.19978E-7	2.51581E-3	2.51581E-3	6.32978E-3	2.98554E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16059E-1	-7.98202E-1	-9.13181E0	-9.14218E0	4.29153E-3	9.377E-2	2.72943E1	-3.2641E1	-3.26416E1	2.68166E1	1.19965E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16059E-1	-7.98583E-1	-9.13172E0	-9.14214E0	4.26769E-3	9.36508E-2	2.72756E1	-3.25989E1	-3.26472E1	2.68024E1	1.20226E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.01871E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16178E-1	-7.98368E-1	-9.13172E0	-9.14204E0	4.55379E-3	9.35078E-2	2.72654E1	-3.26759E1	-3.26122E1	2.67908E1	1.19953E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16059E-1	-7.98297E-1	-9.13205E0	-9.14192E0	4.14848E-3	9.37939E-2	2.73528E1	-3.26327E1	-3.26248E1	2.68112E1	1.20226E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16035E-1	-7.98321E-1	-9.13198E0	-9.14207E0	4.31538E-3	9.408E-2	2.73844E1	-3.26699E1	-3.25828E1	2.68178E1	1.19978E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.00942E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.15916E-1	-7.98321E-1	-9.13193E0	-9.14164E0	4.64916E-3	9.38416E-2	2.72886E1	-3.26797E1	-3.26124E1	2.67842E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.15988E-1	-7.9844E-1	-9.13188E0	-9.14204E0	4.52995E-3	9.38654E-2	2.72962E1	-3.26455E1	-3.26307E1	2.68124E1	1.198E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.04063E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09696E0	-8.15868E-1	-7.98345E-1	-9.13169E0	-9.14211E0	4.48227E-3	9.377E-2	2.73135E1	-3.26765E1	-3.26074E1	2.68004E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00966E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09742E0	-8.15964E-1	-7.98512E-1	-9.13153E0	-9.14221E0	4.36306E-3	9.377E-2	2.73009E1	-3.26723E1	-3.26356E1	2.68123E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0975E0	-8.15868E-1	-7.98726E-1	-9.13188E0	-9.14204E0	4.62532E-3	9.39608E-2	2.73167E1	-3.26695E1	-3.26457E1	2.68214E1	1.19653E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09711E0	-8.15845E-1	-7.98583E-1	-9.13193E0	-9.14192E0	4.72069E-3	9.36985E-2	2.72862E1	-3.26909E1	-3.26071E1	2.67653E1	1.19941E-7	2.51287E-3	2.51287E-3	6.32858E-3	3.01356E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09665E0	-8.1594E-1	-7.98535E-1	-9.13203E0	-9.14214E0	4.55379E-3	9.35793E-2	2.73045E1	-3.26597E1	-3.26027E1	2.67818E1	1.19851E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.02511E-1