[Scan]
initial_time=2016-01-28T23:08:21
final_time=2016-01-28T23:08:41
ip_count=19
run=1026
dataset=10
scan=802
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.15821E-1
ql1_imon=1.38537E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=2.01763E-9
ql3_vset=
ql3_vmon=-9.13157E0
ql3_imon=2.61736E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-1.97697E-10
mult1=-1.00668E-8
mult2=-2.85064E-9
rf_tmon=-4.04935E-3
rf_agc=3.34271E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.70617E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65112E0
bslens_imon=2.5738E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20157E1
lens5a_imon=1.99497E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04967E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=3.16866E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02334E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05042E1
cs_ea1_imon=1.09517E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41282E0
lens1_imon=2.70719E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03973E1
cs_ea2_imon=1.40339E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=3.03712E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.17329E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=4.30644E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15414E1
os_ea1_imon=2.47515E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19802E0
cs_ionrep_imon=9.38716E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=1.97395E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.16205E-8
tplens_vset=1.4E-1
tplens_vmon=1.64504E0
tplens_imon=-2.20037E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26531E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26685E1
iondef2_imon=1.59193E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02921E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.97521E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26712E0
ionrepsh_imon=8.46069E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.18639E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74922E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50505E0
os_ea2_imon=-6.02162E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.19966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0906E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11033E1
os_restr2_imon=3.37481E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.31406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0226E1
cs_anode2_imon=2.08171E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72974E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68064E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.03064E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82833E-1
olens1_imon=7.31937E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08809E0
cs_ionaccel_imon=-9.11223E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02115E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=2.04729E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39232E-4
mask2_vset=0.0E0
mask2_vmon=-1.86957E1
mask2_imon=-4.24688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.64597E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.54286E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50097E3
multb_neg_imon=7.73609E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47074E0
defgridb_imon=6.36982E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33203E1
os_fil1_imon=9.41429E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07954E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61118E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31526E1
cs_fil1_imon=7.67141E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.86983E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61694E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95074E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.1985E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29134E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.68282E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2151E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79714E-1
res40_imon=-2.17261E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.15988E-1	-7.98178E-1	-9.13134E0	-9.14159E0	4.74453E-3	9.37939E-2	2.73092E1	-3.26767E1	-3.2606E1	2.68059E1	1.20487E-7	2.51552E-3	2.51552E-3	6.35692E-3	3.01347E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16059E-1	-7.98154E-1	-9.1316E0	-9.14199E0	4.72069E-3	9.36508E-2	2.72763E1	-3.26719E1	-3.26236E1	2.67988E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.02769E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.15964E-1	-7.98345E-1	-9.13146E0	-9.14226E0	4.55379E-3	9.37462E-2	2.7297E1	-3.26654E1	-3.26254E1	2.68192E1	1.19819E-7	2.52139E-3	2.52139E-3	6.29624E-3	3.00144E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.15964E-1	-7.98202E-1	-9.13146E0	-9.14214E0	4.69685E-3	9.37462E-2	2.72733E1	-3.26675E1	-3.262E1	2.67998E1	1.20042E-7	2.51919E-3	2.51919E-3	6.3074E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.15916E-1	-7.98297E-1	-9.13129E0	-9.14199E0	4.93526E-3	9.38892E-2	2.72919E1	-3.26693E1	-3.26122E1	2.68058E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.97445E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09642E0	-8.15725E-1	-7.98249E-1	-9.1315E0	-9.14202E0	4.86374E-3	9.40084E-2	2.7291E1	-3.26529E1	-3.26156E1	2.6804E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0968E0	-8.15964E-1	-7.98202E-1	-9.13138E0	-9.1419E0	4.50611E-3	9.41515E-2	2.73458E1	-3.2649E1	-3.26585E1	2.68148E1	1.19978E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.01742E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.15868E-1	-7.98154E-1	-9.1315E0	-9.14187E0	4.64916E-3	9.41038E-2	2.73141E1	-3.26651E1	-3.2629E1	2.68226E1	1.20466E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.15797E-1	-7.98178E-1	-9.13103E0	-9.14192E0	4.673E-3	9.39846E-2	2.73213E1	-3.26398E1	-3.26476E1	2.6813E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.02922E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.15892E-1	-7.9782E-1	-9.1315E0	-9.14159E0	4.72069E-3	9.40084E-2	2.73016E1	-3.26573E1	-3.26231E1	2.6807E1	1.20487E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.98222E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16131E-1	-7.98202E-1	-9.13146E0	-9.14164E0	4.60148E-3	9.40084E-2	2.72678E1	-3.26759E1	-3.26158E1	2.68184E1	1.20055E-7	2.52169E-3	2.52169E-3	6.28592E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16178E-1	-7.98559E-1	-9.13174E0	-9.14168E0	4.76837E-3	9.41277E-2	2.73261E1	-3.26723E1	-3.2614E1	2.68058E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.16107E-1	-7.98297E-1	-9.13165E0	-9.14199E0	5.19753E-3	9.39846E-2	2.7376E1	-3.2745E1	-3.26194E1	2.6788E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.15988E-1	-7.98273E-1	-9.1315E0	-9.1418E0	4.91142E-3	9.40561E-2	2.73153E1	-3.26326E1	-3.2587E1	2.67856E1	1.20174E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00302E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.15988E-1	-7.98249E-1	-9.13177E0	-9.14168E0	4.69685E-3	9.41038E-2	2.73069E1	-3.26419E1	-3.26419E1	2.68022E1	1.19959E-7	2.52297E-3	2.52297E-3	6.32371E-3	3.00507E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16035E-1	-7.98345E-1	-9.13191E0	-9.14192E0	4.60148E-3	9.42707E-2	2.73339E1	-3.26566E1	-3.2645E1	2.67974E1					
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09634E0	-8.16035E-1	-7.98345E-1	-9.13167E0	-9.14173E0	4.57764E-3	9.39846E-2	2.73237E1	-3.26927E1	-3.2614E1	2.68244E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.15868E-1	-7.98464E-1	-9.13184E0	-9.14168E0	4.3869E-3	9.37223E-2	2.7298E1	-3.26531E1	-3.26089E1	2.68016E1	1.20137E-7	2.52585E-3	2.52585E-3	6.35223E-3	3.0201E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09634E0	-8.16202E-1	-7.98535E-1	-9.13167E0	-9.14168E0	4.64916E-3	9.43422E-2	2.73169E1	-3.26785E1	-3.26219E1	2.67966E1	1.2026E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.15821E-1	-7.98178E-1	-9.13157E0	-9.14211E0	4.673E-3	9.39369E-2	2.72974E1	-3.26685E1	-3.26531E1	2.68064E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1