[Scan]
initial_time=2016-01-28T23:08:49
final_time=2016-01-28T23:09:09
ip_count=19
run=1026
dataset=10
scan=803
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=1.38437E-8
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=2.01945E-9
ql3_vset=
ql3_vmon=-9.1316E0
ql3_imon=2.70677E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=-1.99282E-10
mult1=-9.71631E-9
mult2=-2.81043E-9
rf_tmon=-4.8549E-3
rf_agc=3.18976E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.64143E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63309E0
bslens_imon=2.62067E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20133E1
lens5a_imon=1.99461E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05169E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=3.19353E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.0237E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05186E1
cs_ea1_imon=1.07102E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3996E0
lens1_imon=2.72161E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.41565E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=3.04433E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.17713E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.3122E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=2.4409E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63623E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28214E0
cs_ionrep_imon=9.38356E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.9369E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=1.9653E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.15525E-8
tplens_vset=1.4E-1
tplens_vmon=1.64864E0
tplens_imon=-2.38062E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2599E1
iondef3_imon=1.49857E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.58653E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.41277E-2
ql6_imon=3.97669E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=8.52918E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.17197E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48882E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.19137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.19994E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=3.38166E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.32019E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.11198E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73333E1
iondef1_imon=1.09337E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68045E1
iondef4_imon=1.10828E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.03479E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.35157E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47367E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56477E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.20346E-1
window_imon=-9.22035E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.86879E1
mask2_imon=-4.355E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=8.16148E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.59693E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.53061E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46773E0
defgridb_imon=6.31935E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33166E1
os_fil1_imon=9.43916E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08585E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61271E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31498E1
cs_fil1_imon=7.94771E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01101E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62154E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.95074E-2
os_fil2_imon=-2.27554E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.91622E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27969E-1
cs_fil2_imon=-2.11336E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.51463E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21697E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.02922E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.07655E-1
res40_imon=-2.35641E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=188
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16345E-1	-7.98392E-1	-9.13157E0	-9.1418E0	4.74453E-3	9.41277E-2	2.72591E1	-3.26372E1	-3.26354E1	2.6804E1	1.20055E-7	2.51203E-3	2.51203E-3	6.29665E-3	3.0071E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16298E-1	-7.98583E-1	-9.1316E0	-9.14164E0	4.69685E-3	9.38177E-2	2.72997E1	-3.26657E1	-3.26386E1	2.68082E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.16059E-1	-7.98559E-1	-9.13155E0	-9.14176E0	4.74453E-3	9.41515E-2	2.72974E1	-3.26661E1	-3.26313E1	2.67956E1	1.19809E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.97187E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.1594E-1	-7.9813E-1	-9.13165E0	-9.14204E0	4.76837E-3	9.39131E-2	2.7285E1	-3.26685E1	-3.2613E1	2.6825E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.1594E-1	-7.98392E-1	-9.13169E0	-9.14185E0	4.43459E-3	9.41753E-2	2.72774E1	-3.26207E1	-3.26419E1	2.67914E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09673E0	-8.16154E-1	-7.98535E-1	-9.13177E0	-9.14195E0	4.57764E-3	9.38654E-2	2.72624E1	-3.26561E1	-3.26278E1	2.68059E1	1.19544E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09665E0	-8.16178E-1	-7.98321E-1	-9.13169E0	-9.14197E0	4.52995E-3	9.408E-2	2.73417E1	-3.26428E1	-3.26236E1	2.68202E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09719E0	-8.16298E-1	-7.98059E-1	-9.13167E0	-9.14178E0	4.43459E-3	9.39608E-2	2.72967E1	-3.26807E1	-3.26266E1	2.6807E1	1.19749E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.9943E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09665E0	-8.16226E-1	-7.9813E-1	-9.13162E0	-9.1418E0	4.50611E-3	9.37939E-2	2.7299E1	-3.26921E1	-3.26285E1	2.67677E1	1.20137E-7	2.52027E-3	2.52027E-3	6.29624E-3	2.99083E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09719E0	-8.16131E-1	-7.98106E-1	-9.13157E0	-9.14168E0	4.43459E-3	9.39131E-2	2.73381E1	-3.26621E1	-3.26428E1	2.67776E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.16369E-1	-7.98082E-1	-9.13124E0	-9.14202E0	4.36306E-3	9.377E-2	2.72892E1	-3.2682E1	-3.26443E1	2.68233E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.16035E-1	-7.98464E-1	-9.13141E0	-9.14199E0	4.14848E-3	9.377E-2	2.73261E1	-3.26326E1	-3.26278E1	2.68034E1	1.20122E-7	2.52757E-3	2.52757E-3	6.31837E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09711E0	-8.16131E-1	-7.98512E-1	-9.13146E0	-9.14195E0	4.36306E-3	9.37223E-2	2.7221E1	-3.25984E1	-3.27354E1	2.678E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9926E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09642E0	-8.16059E-1	-7.98678E-1	-9.13174E0	-9.14199E0	4.72069E-3	9.36747E-2	2.72928E1	-3.26915E1	-3.26277E1	2.6783E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09719E0	-8.16321E-1	-7.98297E-1	-9.13188E0	-9.14204E0	4.48227E-3	9.36985E-2	2.72917E1	-3.26565E1	-3.26152E1	2.68101E1	1.19725E-7	2.51549E-3	2.51549E-3	6.32784E-3	3.00392E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.16083E-1	-7.9844E-1	-9.13162E0	-9.14192E0	4.93526E-3	9.38654E-2	2.72939E1	-3.26671E1	-3.26392E1	2.68178E1	1.1984E-7	2.51065E-3	2.51065E-3	6.3016E-3	3.00363E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09657E0	-8.15988E-1	-7.98202E-1	-9.13155E0	-9.14214E0	4.60148E-3	9.38892E-2	2.72669E1	-3.2657E1	-3.25755E1	2.67736E1	1.19947E-7	2.51959E-3	2.51959E-3	6.30278E-3	3.00505E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09627E0	-8.16011E-1	-7.98345E-1	-9.13136E0	-9.14221E0	4.50611E-3	9.408E-2	2.73204E1	-3.26213E1	-3.26472E1	2.67758E1	1.20022E-7	2.51562E-3	2.51562E-3	6.31384E-3	3.01301E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.15916E-1	-7.98178E-1	-9.13172E0	-9.14207E0	4.3869E-3	9.37939E-2	2.72638E1	-3.26679E1	-3.26431E1	2.67862E1	1.20055E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.15988E-1	-7.98345E-1	-9.1316E0	-9.14218E0	4.48227E-3	9.41277E-2	2.73333E1	-3.26705E1	-3.2599E1	2.68045E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02922E-1