[Scan]
initial_time=2016-02-15T17:21:05
final_time=2016-02-15T17:21:25
ip_count=19
run=1030
dataset=1
scan=11
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.73501E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.3575E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=4.53341E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.94712E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=8.11946E-10
mult1=-1.06106E-8
mult2=-2.81145E-9
rf_tmon=-3.34147E-3
rf_agc=3.41586E-2
counter1=7
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=4.24147E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63268E0
bslens_imon=2.54162E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20222E1
lens5a_imon=2.00965E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.0509E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=2.96288E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02243E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05092E1
cs_ea1_imon=2.48693E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01222E0
lens1_imon=1.57871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03945E1
cs_ea2_imon=1.55322E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=2.97477E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.33517E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=2.88035E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15381E1
os_ea1_imon=1.90988E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63419E1
os_ef1bup_imon=3.07172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27991E0
cs_ionrep_imon=1.23445E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93486E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=3.0555E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=8.52954E-10
tplens_vset=1.4E-1
tplens_vmon=1.61826E0
tplens_imon=-1.07253E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26349E1
iondef3_imon=1.50664E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26638E1
iondef2_imon=1.58381E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02969E2
lens6_imon=2.98509E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=4.42505E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27238E0
ionrepsh_imon=1.88902E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33588E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.74126E-1
os_ea2_imon=-4.79207E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0615E2
lens4b_imon=2.0064E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61798E0
os_ef2alow_imon=-2.71321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.36156E-1
os_ef2bup_imon=-5.41978E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10781E1
os_restr2_imon=2.86341E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2309E2
cs_ionfoca_imon=6.32118E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.26335E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72903E1
iondef1_imon=1.11626E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.0744E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.04018E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=4.06086E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08449E0
cs_ionaccel_imon=-1.85907E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47104E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.69865E-6
window_vset=0.0E0
window_vmon=1.82504E-1
window_imon=-1.17071E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86458E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92594E3
multa_neg_imon=8.06183E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.35616E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51091E0
defgridb_imon=5.97611E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33863E1
os_fil1_imon=5.23272E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.07385E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66161E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3078E1
cs_fil1_imon=9.99447E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62516E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66562E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00876E-2
os_fil2_imon=-2.68399E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.49681E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75718E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.09747E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2239E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98335E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.355E3	1.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80019E1	-3.09944E-4	-8.80001E1	2.86102E-4	5.65052E-3	9.34362E-2	2.72763E1	-3.26554E1	-3.26224E1	2.6807E1	1.72658E-8	2.51739E-3	2.51739E-3	6.29665E-3	2.51494E-2
2.0E0	3.059E3	2.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80018E1	-6.4373E-4	-8.80003E1	1.90735E-4	5.48363E-3	9.33409E-2	2.73106E1	-3.26529E1	-3.26193E1	2.67826E1	1.72777E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.51395E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.8002E1	-1.90735E-4	-8.80002E1	1.66893E-4	5.65052E-3	9.32932E-2	2.73004E1	-3.26508E1	-3.2629E1	2.68001E1	1.73077E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.52489E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80014E1	-4.05312E-4	-8.80005E1	1.90735E-4	5.36442E-3	9.34124E-2	2.73165E1	-3.26597E1	-3.26182E1	2.67974E1	1.72402E-8	2.51225E-3	2.51225E-3	6.31837E-3	2.52928E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80016E1	-1.66893E-4	-8.79999E1	-1.43051E-4	5.22137E-3	9.33647E-2	2.73117E1	-3.26591E1	-3.26296E1	2.67974E1	1.72658E-8	2.51417E-3	2.51417E-3	6.33977E-3	2.51709E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80018E1	-2.14577E-4	-8.80001E1	2.38419E-4	5.29289E-3	9.33647E-2	2.72868E1	-3.2649E1	-3.26325E1	2.6786E1	1.71377E-8	2.51581E-3	2.51581E-3	6.32418E-3	2.5263E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80013E1	-5.00679E-4	-8.80003E1	4.76837E-5	5.31673E-3	9.33409E-2	2.73123E1	-3.26693E1	-3.26188E1	2.68118E1	1.69955E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.53E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80017E1	-3.57628E-4	-8.80002E1	7.15256E-5	5.24521E-3	9.33886E-2	2.73033E1	-3.26664E1	-3.26327E1	2.68004E1	1.69949E-8	2.52318E-3	2.52318E-3	6.29098E-3	2.52489E-2
1.2E1	8.4E1	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80017E1	-3.09944E-4	-8.80001E1	4.05312E-4	5.05447E-3	9.31025E-2	2.7311E1	-3.26467E1	-3.26225E1	2.67938E1	1.72252E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.51395E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80015E1	4.76837E-5	-8.80001E1	1.90735E-4	5.34058E-3	9.3317E-2	2.72708E1	-3.26664E1	-3.26627E1	2.6801E1	1.72852E-8	2.52428E-3	2.52428E-3	6.3074E-3	2.5227E-2
1.4E1	3.8E1	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80017E1	2.38419E-5	-8.80002E1	2.86102E-4	5.24521E-3	9.34362E-2	2.73249E1	-3.26506E1	-3.26044E1	2.67974E1	1.7313E-8	2.51248E-3	2.51248E-3	6.3074E-3	2.51737E-2
1.5E1	3.7E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80016E1	-1.43051E-4	-8.8E1	9.53674E-5	5.00679E-3	9.32217E-2	2.73033E1	-3.26691E1	-3.26248E1	2.6801E1	1.72732E-8	2.51525E-3	2.51525E-3	6.34518E-3	2.50852E-2
1.6E1	3.0E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80016E1	-6.67572E-4	-8.80003E1	1.66893E-4	5.53131E-3	9.31025E-2	2.73165E1	-3.26657E1	-3.26248E1	2.6768E1	1.72702E-8	2.5199E-3	2.5199E-3	6.29098E-3	2.50959E-2
1.7E1	4.66E2	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80016E1	-6.4373E-4	-8.80001E1	3.57628E-4	5.31673E-3	9.31978E-2	2.73147E1	-3.26591E1	-3.26206E1	2.67914E1	1.72852E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.50741E-2
1.8E1	1.739E3	2.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80018E1	-1.66893E-4	-8.80003E1	4.76837E-5	5.05447E-3	9.30786E-2	2.72966E1	-3.26846E1	-3.26442E1	2.68192E1	1.72732E-8	2.5131E-3	2.5131E-3	6.31817E-3	2.52569E-2
1.9E1	2.827E3	1.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80019E1	-1.66893E-4	-8.80001E1	-1.43051E-4	5.10216E-3	9.34601E-2	2.7288E1	-3.26652E1	-3.26187E1	2.68304E1	1.72688E-8	2.51919E-3	2.51919E-3	6.3074E-3	2.51379E-2
2.0E1	2.0E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80018E1	7.15256E-5	-8.80003E1	1.90735E-4	5.26905E-3	9.33409E-2	2.72853E1	-3.26693E1	-3.26488E1	2.67601E1	1.72747E-8	2.51359E-3	2.51359E-3	6.30182E-3	2.52854E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80017E1	-2.14577E-4	-8.79999E1	3.8147E-4	5.26905E-3	9.36985E-2	2.72967E1	-3.26585E1	-3.26236E1	2.68532E1	1.72805E-8	2.52276E-3	2.52276E-3	6.3074E-3	2.51924E-2
2.2E1	1.1E1	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80017E1	0.0E0	-8.80005E1	2.38419E-4	4.673E-3	9.3317E-2	2.72856E1	-3.26649E1	-3.2652E1	2.67897E1	1.72717E-8	2.51484E-3	2.51484E-3	6.32371E-3	2.52856E-2
2.3E1	7.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80019E1	-3.09944E-4	-8.80002E1	0.0E0	4.673E-3	9.34124E-2	2.72903E1	-3.26638E1	-3.26349E1	2.67914E1