[Scan]
initial_time=2016-02-15T17:22:25
final_time=2016-02-15T17:22:44
ip_count=19
run=1030
dataset=1
scan=14
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.71351E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.61683E-10
ql2_vset=
ql2_vmon=-4.76837E-5
ql2_imon=4.35972E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.05019E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=8.67522E-10
mult1=-9.36486E-9
mult2=-2.81548E-9
rf_tmon=-5.62962E-3
rf_agc=3.24162E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=4.13597E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62468E0
bslens_imon=2.65311E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20043E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12534E2
lens4a_imon=2.05176E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53632E1
cs_ef1b_imon=2.97279E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05132E1
cs_ea1_imon=2.46361E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00531E0
lens1_imon=1.36975E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64707E1
os_ef1alow_imon=2.99017E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.55624E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84058E1
cs_ef1a_imon=2.98217E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=4.26066E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11245E1
os_restr1_imon=2.86818E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15426E1
os_ea1_imon=1.876E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63711E1
os_ef1bup_imon=3.08956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2527E0
cs_ionrep_imon=1.23649E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01728E1
cs_anode1_imon=3.0562E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=8.42786E-10
tplens_vset=1.4E-1
tplens_vmon=1.60598E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26089E1
iondef3_imon=1.49712E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26413E1
iondef2_imon=1.59157E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.71854E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26231E0
ionrepsh_imon=1.89655E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33586E1
lens5b_imon=2.19144E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74559E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.4932E-1
os_ea2_imon=-4.72384E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.18235E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60944E0
os_ef2alow_imon=-2.49813E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.48577E-1
os_ef2bup_imon=-5.30613E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10897E1
os_restr2_imon=2.86436E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01914E1
cs_anode2_imon=2.26627E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73155E1
iondef1_imon=1.07498E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68143E1
iondef4_imon=1.08121E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71792E1
olens3_imon=2.06473E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=3.47269E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11856E0
cs_ionaccel_imon=-1.88301E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02044E2
cs_ionfocb_imon=1.47275E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56272E1
einzel_imon=7.70174E-6
window_vset=0.0E0
window_vmon=2.13631E-1
window_imon=-1.03505E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.3915E-4
mask2_vset=0.0E0
mask2_vmon=-1.86871E1
mask2_imon=-5.93688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.3035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.41525E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49781E0
defgridb_imon=6.23283E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33823E1
os_fil1_imon=4.64622E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.40326E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65096E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30777E1
cs_fil1_imon=9.99982E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62007E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66809E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.04791E-2
os_fil2_imon=-2.48963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.06067E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69918E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30526E-1
cs_fil2_imon=-2.48963E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.75572E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22306E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.51613E-2
chamber_ion_pmon=1.72627E-8
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.75424E-1
res40_imon=-2.67536E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.362E3	0.0E0	1.47E2	4.1E1	-7.41738E-2	-8.80015E1	-3.33786E-4	-8.80004E1	1.19209E-4	5.19753E-3	9.35316E-2	2.72951E1	-3.26667E1	-3.26455E1	2.67938E1	1.69955E-8	2.51417E-3	2.51417E-3	6.28592E-3	2.52785E-2
2.0E0	3.05E3	5.0E0	3.16E2	1.6E2	-7.3401E-2	-8.8002E1	-6.67572E-4	-8.80005E1	2.38419E-4	4.74453E-3	9.3174E-2	2.73213E1	-3.26735E1	-3.26242E1	2.6786E1	1.70028E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.51494E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80017E1	-5.72205E-4	-8.80003E1	4.76837E-5	5.29289E-3	9.29356E-2	2.72933E1	-3.26632E1	-3.26484E1	2.68322E1	1.69875E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.50959E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80017E1	-4.76837E-4	-8.80003E1	4.76837E-5	5.79357E-3	9.29832E-2	2.73057E1	-3.26885E1	-3.26416E1	2.68285E1	1.71282E-8	2.5188E-3	2.5188E-3	6.27461E-3	2.51613E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80016E1	-3.8147E-4	-8.80001E1	1.90735E-4	5.67436E-3	9.31263E-2	2.7266E1	-3.26543E1	-3.26128E1	2.67962E1	1.72437E-8	2.51417E-3	2.51417E-3	6.33977E-3	2.5128E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80015E1	-1.90735E-4	-8.80004E1	1.90735E-4	5.24521E-3	9.31978E-2	2.73003E1	-3.26476E1	-3.26398E1	2.67842E1	1.72648E-8	2.51843E-3	2.51843E-3	6.30187E-3	2.51785E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30146E-2	-8.80015E1	-3.09944E-4	-8.80007E1	9.53674E-5	5.07832E-3	9.30071E-2	2.73009E1	-3.26693E1	-3.25984E1	2.67812E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80014E1	-6.4373E-4	-8.80002E1	1.19209E-4	5.19753E-3	9.29117E-2	2.72931E1	-3.26705E1	-3.26176E1	2.68064E1	1.72953E-8	2.50989E-3	2.50989E-3	6.32356E-3	2.52569E-2
1.2E1	8.1E1	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80014E1	-2.14577E-4	-8.80003E1	2.38419E-4	5.4121E-3	9.31025E-2	2.7347E1	-3.26703E1	-3.25829E1	2.67902E1	1.72552E-8	2.51334E-3	2.51334E-3	6.3074E-3	2.52051E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80017E1	-3.09944E-4	-8.80004E1	3.33786E-4	5.48363E-3	9.34839E-2	2.73092E1	-3.26885E1	-3.25936E1	2.68111E1	1.731E-8	2.52276E-3	2.52276E-3	6.3074E-3	2.52569E-2
1.4E1	6.1E1	0.0E0	5.66E2	3.82E2	-7.40967E-2	-8.80016E1	-4.29153E-4	-8.80004E1	2.6226E-4	5.4121E-3	9.34362E-2	2.72951E1	-3.26862E1	-3.26478E1	2.67848E1	1.72805E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.5128E-2
1.5E1	6.0E1	0.0E0	6.06E2	4.11E2	-7.44059E-2	-8.80017E1	-5.00679E-4	-8.80005E1	3.57628E-4	5.22137E-3	9.3174E-2	2.73287E1	-3.26726E1	-3.26124E1	2.6785E1	1.72732E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.51066E-2
1.6E1	2.74E2	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80018E1	-2.86102E-4	-8.80003E1	1.66893E-4	5.24521E-3	9.34839E-2	2.73249E1	-3.26573E1	-3.26134E1	2.67758E1	1.72658E-8	2.52061E-3	2.52061E-3	6.34518E-3	2.52139E-2
1.7E1	4.61E2	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80019E1	-4.76837E-4	-8.80005E1	2.38419E-4	5.36442E-3	9.32455E-2	2.73357E1	-3.26807E1	-3.26134E1	2.68406E1	1.72627E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.52051E-2
1.8E1	1.898E3	1.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80016E1	-9.05991E-4	-8.80004E1	-9.53674E-5	5.24521E-3	9.34362E-2	2.72993E1	-3.26608E1	-3.26382E1	2.67752E1	1.72477E-8	2.52428E-3	2.52428E-3	6.32936E-3	2.51832E-2
1.9E1	2.829E3	1.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80016E1	-4.29153E-4	-8.80003E1	1.90735E-4	5.19753E-3	9.35316E-2	2.72859E1	-3.26422E1	-3.26398E1	2.68064E1	1.72761E-8	2.51393E-3	2.51393E-3	6.30212E-3	2.52646E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80018E1	-3.33786E-4	-8.80005E1	1.19209E-4	5.74589E-3	9.32693E-2	2.73021E1	-3.26443E1	-3.26142E1	2.68136E1	1.72552E-8	2.51116E-3	2.51116E-3	6.34588E-3	2.5227E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80017E1	-1.90735E-4	-8.80005E1	-2.38419E-5	5.50747E-3	9.33409E-2	2.73399E1	-3.26478E1	-3.26472E1	2.6752E1	1.72658E-8	2.52384E-3	2.52384E-3	6.3074E-3	2.52139E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80017E1	-2.86102E-4	-8.80007E1	7.15256E-5	5.48363E-3	9.34362E-2	2.73255E1	-3.26831E1	-3.2635E1	2.67849E1	1.72852E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.50959E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80017E1	-4.76837E-5	-8.80005E1	1.19209E-4	5.19753E-3	9.33886E-2	2.73155E1	-3.26413E1	-3.26089E1	2.68143E1	1.72627E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.51613E-2