[Scan]
initial_time=2016-02-15T17:22:52
final_time=2016-02-15T17:23:11
ip_count=19
run=1030
dataset=1
scan=15
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.81491E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.56974E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=4.79913E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.10041E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=9.0971E-10
mult1=-1.07879E-8
mult2=-2.81043E-9
rf_tmon=-3.73135E-3
rf_agc=3.45172E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=4.49896E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66334E0
bslens_imon=2.75278E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19993E1
lens5a_imon=1.98873E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05173E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53483E1
cs_ef1b_imon=2.98038E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02075E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05007E1
cs_ea1_imon=2.48418E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00411E0
lens1_imon=1.34812E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64634E1
os_ef1alow_imon=2.98855E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04212E1
cs_ea2_imon=1.55092E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84414E1
cs_ef1a_imon=2.97376E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=4.16958E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11526E1
os_restr1_imon=2.87607E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15529E1
os_ea1_imon=1.87537E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63538E1
os_ef1bup_imon=3.0882E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23365E0
cs_ionrep_imon=1.22419E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.935E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01646E1
cs_anode1_imon=3.06445E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=8.35121E-10
tplens_vset=1.4E-1
tplens_vmon=1.60517E0
tplens_imon=-3.39E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.49252E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26867E1
iondef2_imon=1.57077E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02993E2
lens6_imon=2.9851E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=4.33695E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26355E0
ionrepsh_imon=1.88682E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33804E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74612E1
cs_ef2b_imon=3.13412E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.78124E-1
os_ea2_imon=-4.84047E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00455E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.16643E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62218E0
os_ef2alow_imon=-2.51773E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4077E-1
os_ef2bup_imon=-5.24233E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1078E1
os_restr2_imon=2.87256E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.29508E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01854E1
cs_anode2_imon=2.26342E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72883E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.08834E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.08519E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=3.48651E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12625E0
cs_ionaccel_imon=-1.94945E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02104E2
cs_ionfocb_imon=1.47199E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56165E1
einzel_imon=7.84742E-6
window_vset=0.0E0
window_vmon=2.19817E-1
window_imon=-9.95844E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.39255E-4
mask2_vset=0.0E0
mask2_vmon=-1.8685E1
mask2_imon=-6.57216E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.33701E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.56215E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=7.09272E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=6.18045E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33865E1
os_fil1_imon=5.09986E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.03205E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66471E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30782E1
cs_fil1_imon=9.99676E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.6208E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66896E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.9895E-2
os_fil2_imon=-2.49009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.98885E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.52244E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-1.86733E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.34014E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22351E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.51832E-2
chamber_ion_pmon=1.72477E-8
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.76901E-1
res40_imon=-2.50605E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.356E3	2.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80014E1	-3.09944E-4	-8.8E1	2.38419E-4	5.43594E-3	9.34124E-2	2.72998E1	-3.26514E1	-3.26502E1	2.68285E1	1.70318E-8	2.52521E-3	2.52521E-3	6.31879E-3	2.51185E-2
2.0E0	3.037E3	2.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80016E1	-4.05312E-4	-8.79997E1	4.76837E-5	5.67436E-3	9.33647E-2	2.73093E1	-3.26741E1	-3.26585E1	2.67758E1	1.70318E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.50638E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80016E1	-2.14577E-4	-8.8E1	3.33786E-4	5.31673E-3	9.30548E-2	2.73204E1	-3.26585E1	-3.26309E1	2.68082E1	1.72518E-8	2.5147E-3	2.5147E-3	6.32418E-3	2.52183E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80018E1	-6.19888E-4	-8.8E1	2.6226E-4	5.26905E-3	9.32217E-2	2.73187E1	-3.26555E1	-3.26266E1	2.68215E1	1.72702E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.51613E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80016E1	-5.96046E-4	-8.79999E1	2.14577E-4	5.34058E-3	9.33647E-2	2.73045E1	-3.26741E1	-3.26374E1	2.67625E1	1.731E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.50852E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80016E1	-5.96046E-4	-8.8E1	1.43051E-4	5.10216E-3	9.34362E-2	2.73086E1	-3.26697E1	-3.26266E1	2.6825E1	1.73077E-8	2.51771E-3	2.51771E-3	6.33486E-3	2.5227E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80019E1	-5.00679E-4	-8.8E1	-1.19209E-4	5.43594E-3	9.31501E-2	2.72886E1	-3.26676E1	-3.26438E1	2.68178E1	1.72879E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.52139E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80018E1	-3.33786E-4	-8.79999E1	1.43051E-4	5.6982E-3	9.34124E-2	2.73129E1	-3.26524E1	-3.26212E1	2.67716E1	1.72289E-8	2.52697E-3	2.52697E-3	6.33538E-3	2.52183E-2
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80018E1	-7.15256E-5	-8.80001E1	2.14577E-4	5.36442E-3	9.36031E-2	2.73201E1	-3.26699E1	-3.26062E1	2.68322E1	1.72927E-8	2.51116E-3	2.51116E-3	6.3074E-3	2.50741E-2
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80015E1	-6.91414E-4	-8.80001E1	1.90735E-4	5.45979E-3	9.34839E-2	2.73033E1	-3.26524E1	-3.26332E1	2.68136E1	1.72627E-8	2.51334E-3	2.51334E-3	6.31837E-3	2.51613E-2
1.4E1	3.6E1	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.8002E1	-4.76837E-4	-8.79999E1	-1.90735E-4	5.79357E-3	9.34362E-2	2.72955E1	-3.26711E1	-3.26164E1	2.68016E1	1.72702E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.51832E-2
1.5E1	5.6E1	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80019E1	-9.05991E-4	-8.80001E1	0.0E0	5.36442E-3	9.33886E-2	2.73165E1	-3.26675E1	-3.2617E1	2.68124E1	1.72552E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.51613E-2
1.6E1	2.57E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80016E1	-5.96046E-4	-8.80001E1	3.09944E-4	5.26905E-3	9.35793E-2	2.73165E1	-3.26927E1	-3.26585E1	2.67637E1	1.73002E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.52051E-2
1.7E1	4.61E2	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80015E1	-6.67572E-4	-8.8E1	2.14577E-4	5.45979E-3	9.31263E-2	2.73063E1	-3.26723E1	-3.26663E1	2.67992E1	1.72702E-8	2.5199E-3	2.5199E-3	6.34037E-3	2.52051E-2
1.8E1	1.727E3	2.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80016E1	-5.48363E-4	-8.79999E1	2.86102E-4	5.53131E-3	9.28879E-2	2.73069E1	-3.26729E1	-3.2632E1	2.68208E1	1.72777E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.51395E-2
1.9E1	2.761E3	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80018E1	-4.76837E-4	-8.80002E1	2.14577E-4	5.62668E-3	9.31978E-2	2.72883E1	-3.26747E1	-3.26254E1	2.67998E1	1.72552E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.5227E-2
2.0E1	1.6E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80014E1	-4.76837E-4	-8.80001E1	2.14577E-4	5.53131E-3	9.32693E-2	2.73275E1	-3.26797E1	-3.26077E1	2.678E1	1.73227E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.5227E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80013E1	-5.72205E-4	-8.80002E1	1.43051E-4	5.55515E-3	9.30309E-2	2.72889E1	-3.27167E1	-3.26188E1	2.68208E1	1.72732E-8	2.51417E-3	2.51417E-3	6.32896E-3	2.52139E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80016E1	-2.14577E-4	-8.79999E1	1.19209E-4	5.38826E-3	9.31025E-2	2.73405E1	-3.26933E1	-3.26098E1	2.67968E1	1.72327E-8	2.5199E-3	2.5199E-3	6.29098E-3	2.53368E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80012E1	-4.52995E-4	-8.80003E1	3.57628E-4	5.26905E-3	9.33409E-2	2.72883E1	-3.26867E1	-3.26356E1	2.68178E1	1.72477E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.51832E-2