[Scan]
initial_time=2016-02-15T17:23:45
final_time=2016-02-15T17:24:04
ip_count=19
run=1030
dataset=1
scan=17
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.74446E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.2058E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=4.56381E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.06196E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=8.82089E-10
mult1=-9.51162E-9
mult2=-2.7266E-9
rf_tmon=-5.76214E-3
rf_agc=3.24624E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=4.37939E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.94872E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19779E1
lens5a_imon=1.96613E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05262E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=2.9809E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02052E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04694E1
cs_ea1_imon=2.49714E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02153E0
lens1_imon=1.40219E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03594E1
cs_ea2_imon=1.56021E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=2.97225E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=4.24886E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=2.8771E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15522E1
os_ea1_imon=1.88934E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23047E0
cs_ionrep_imon=1.22675E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91915E2
cs_nozzle_imon=1.93243E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.0573E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=8.27384E-10
tplens_vset=1.4E-1
tplens_vmon=1.60298E0
tplens_imon=-1.44333E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.50289E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.57932E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02993E2
lens6_imon=2.98688E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=4.59027E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24909E0
ionrepsh_imon=1.89259E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33748E1
lens5b_imon=2.19252E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.28291E-1
os_ea2_imon=-6.02162E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00864E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70999E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61678E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54176E-1
os_ef2bup_imon=-5.35131E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10643E1
os_restr2_imon=2.86125E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.25506E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.10454E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.08701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.10389E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81641E-1
olens1_imon=4.0592E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10792E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02213E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.93316E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86386E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.87308E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93743E3
defgrida_imon=6.64379E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50117E3
multb_neg_imon=7.24222E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39555E0
defgridb_imon=6.25446E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33806E1
os_fil1_imon=4.37979E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.01979E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64843E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30777E1
cs_fil1_imon=9.99891E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62732E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66768E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00922E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.09747E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80616E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.3296E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22318E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.52354E-2
chamber_ion_pmon=1.70682E-8
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.90236E-1
res40_imon=-2.64473E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.355E3	3.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80022E1	-4.05312E-4	-8.8E1	-4.76837E-5	5.38826E-3	9.32932E-2	2.72805E1	-3.26374E1	-3.2635E1	2.6768E1	1.72732E-8	2.51525E-3	2.51525E-3	6.32356E-3	2.50852E-2
2.0E0	3.096E3	3.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80024E1	-5.96046E-4	-8.79999E1	-1.66893E-4	5.48363E-3	9.32455E-2	2.73225E1	-3.26585E1	-3.26242E1	2.6819E1	1.72852E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.5227E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80021E1	-9.53674E-5	-8.80004E1	4.76837E-5	5.26905E-3	9.31263E-2	2.72919E1	-3.26404E1	-3.2632E1	2.68076E1	1.72627E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.52489E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80023E1	-6.19888E-4	-8.80002E1	2.38419E-4	5.38826E-3	9.31025E-2	2.73069E1	-3.26591E1	-3.26272E1	2.6828E1	1.72702E-8	2.52318E-3	2.52318E-3	6.3074E-3	2.50305E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80022E1	-7.15256E-5	-8.79997E1	1.19209E-4	5.4121E-3	9.31263E-2	2.73299E1	-3.26815E1	-3.26201E1	2.68012E1	1.72627E-8	2.51334E-3	2.51334E-3	6.30192E-3	2.50741E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80022E1	-3.33786E-4	-8.79999E1	-1.66893E-4	5.43594E-3	9.3317E-2	2.731E1	-3.26591E1	-3.26376E1	2.67745E1	1.72437E-8	2.51096E-3	2.51096E-3	6.33977E-3	2.51066E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.8002E1	-2.14577E-4	-8.80001E1	-2.14577E-4	5.43594E-3	9.3627E-2	2.72909E1	-3.26461E1	-3.26089E1	2.68052E1	1.72671E-8	2.51581E-3	2.51581E-3	6.32978E-3	2.50404E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80021E1	-5.00679E-4	-8.8E1	2.38419E-5	5.53131E-3	9.36031E-2	2.72823E1	-3.26428E1	-3.26044E1	2.68382E1	1.72437E-8	2.51632E-3	2.51632E-3	6.33977E-3	2.51066E-2
1.2E1	8.5E1	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80021E1	-7.39098E-4	-8.80001E1	7.15256E-5	5.14984E-3	9.34362E-2	2.72961E1	-3.26699E1	-3.26254E1	2.67848E1	1.72777E-8	2.52099E-3	2.52099E-3	6.32386E-3	2.51613E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80021E1	-4.29153E-4	-8.80005E1	2.14577E-4	4.88758E-3	9.3627E-2	2.73157E1	-3.26585E1	-3.26567E1	2.68298E1	1.72477E-8	2.5199E-3	2.5199E-3	6.33486E-3	2.51613E-2
1.4E1	5.5E1	0.0E0	5.66E2	3.82E2	-7.15461E-2	-8.80019E1	-3.09944E-4	-8.80004E1	3.8147E-4	5.43594E-3	9.35793E-2	2.73253E1	-3.2634E1	-3.26891E1	2.67601E1	1.73026E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.52354E-2
1.5E1	4.7E1	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80021E1	-3.8147E-4	-8.80001E1	2.38419E-4	5.17368E-3	9.3317E-2	2.72955E1	-3.26543E1	-3.26302E1	2.67794E1	1.72365E-8	2.52027E-3	2.52027E-3	6.34661E-3	2.5107E-2
1.6E1	2.93E2	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.80019E1	-4.05312E-4	-8.80002E1	1.90735E-4	5.05447E-3	9.33647E-2	2.73358E1	-3.26614E1	-3.25977E1	2.6795E1	1.73152E-8	2.51771E-3	2.51771E-3	6.29098E-3	2.52489E-2
1.7E1	4.25E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80022E1	-1.26362E-3	-8.79999E1	1.43051E-4	5.126E-3	9.30548E-2	2.73123E1	-3.26723E1	-3.26386E1	2.67583E1	1.73618E-8	2.5131E-3	2.5131E-3	6.31278E-3	2.52354E-2
1.8E1	1.776E3	1.0E0	7.27E2	5.0E2	-7.29374E-2	-8.8002E1	-1.66893E-4	-8.80001E1	4.52995E-4	5.43594E-3	9.29594E-2	2.73104E1	-3.26555E1	-3.25782E1	2.67978E1	1.72852E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.50088E-2
1.9E1	2.775E3	0.0E0	7.68E2	5.29E2	-7.09279E-2	-8.80022E1	-5.00679E-4	-8.80002E1	2.86102E-4	5.31673E-3	9.3317E-2	2.73315E1	-3.26825E1	-3.25912E1	2.67986E1	1.72658E-8	2.51954E-3	2.51954E-3	6.31817E-3	2.5128E-2
2.0E1	2.9E1	0.0E0	8.08E2	5.58E2	-7.14689E-2	-8.80019E1	-6.67572E-4	-8.80004E1	3.09944E-4	5.53131E-3	9.35078E-2	2.72991E1	-3.26585E1	-3.26344E1	2.67553E1	1.72627E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.51177E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80022E1	-6.67572E-4	-8.80006E1	2.86102E-4	5.55515E-3	9.30309E-2	2.73111E1	-3.26681E1	-3.2641E1	2.68298E1	1.72777E-8	2.51662E-3	2.51662E-3	6.30192E-3	2.52051E-2
2.2E1	9.0E0	0.0E0	8.89E2	6.17E2	-7.17779E-2	-8.8002E1	-1.90735E-4	-8.80003E1	2.14577E-4	5.4121E-3	9.3317E-2	2.73175E1	-3.2659E1	-3.26178E1	2.67499E1	1.72252E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.52051E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80019E1	-4.29153E-4	-8.80004E1	2.14577E-4	4.72069E-3	9.31501E-2	2.73111E1	-3.26723E1	-3.26272E1	2.68442E1	1.70682E-8	2.51632E-3	2.51632E-3	6.32896E-3	2.52354E-2