[Scan]
initial_time=2016-02-15T17:24:11
final_time=2016-02-15T17:24:31
ip_count=19
run=1030
dataset=1
scan=18
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.75322E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.89077E-10
ql2_vset=
ql2_vmon=9.53674E-5
ql2_imon=4.25422E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-2.07039E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=8.847E-10
mult1=-1.01023E-8
mult2=-2.74285E-9
rf_tmon=-2.5451E-3
rf_agc=3.58398E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=4.49252E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6415E0
bslens_imon=2.56299E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.97694E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05194E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53919E1
cs_ef1b_imon=2.99446E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.02244E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05156E1
cs_ea1_imon=2.48488E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06118E0
lens1_imon=1.56441E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6467E1
os_ef1alow_imon=2.97606E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03919E1
cs_ea2_imon=1.58076E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84114E1
cs_ef1a_imon=2.99234E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=4.17078E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11395E1
os_restr1_imon=2.85894E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1545E1
os_ea1_imon=1.89547E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6378E1
os_ef1bup_imon=3.08611E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24369E0
cs_ionrep_imon=1.22819E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01915E1
cs_anode1_imon=3.05886E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=8.12089E-10
tplens_vset=1.4E-1
tplens_vmon=1.60238E0
tplens_imon=-1.87592E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26148E1
iondef3_imon=1.50902E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98494E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.52507E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=1.89078E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33826E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7436E1
cs_ef2b_imon=3.11937E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.55929E-1
os_ea2_imon=-4.39939E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06178E2
lens4b_imon=2.0076E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.21031E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62159E0
os_ef2alow_imon=-2.7081E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.68723E-1
os_ef2bup_imon=-5.369E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1074E1
os_restr2_imon=2.87309E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23103E2
cs_ionfoca_imon=6.31587E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01697E1
cs_anode2_imon=2.25705E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73104E1
iondef1_imon=1.11031E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.0968E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.07505E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.58558E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11717E0
cs_ionaccel_imon=-2.08533E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02058E2
cs_ionfocb_imon=1.47258E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56352E1
einzel_imon=7.68076E-6
window_vset=0.0E0
window_vmon=1.91274E-1
window_imon=-1.09811E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39063E-4
mask2_vset=0.0E0
mask2_vmon=-1.86385E1
mask2_imon=-5.2134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.54503E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.66542E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.39723E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49781E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33826E1
os_fil1_imon=4.22645E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79438E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.64775E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30796E1
cs_fil1_imon=9.98369E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62584E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66837E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.08661E-2
os_fil2_imon=-2.41402E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.76475E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.89639E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32258E-1
cs_fil2_imon=-2.03069E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35442E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22299E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.51832E-2
chamber_ion_pmon=1.70244E-8
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.46825E-1
res40_imon=-2.69748E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.238E3	1.0E0	1.47E2	4.1E1	-7.18554E-2	-8.80018E1	-4.05312E-4	-8.80001E1	-1.43051E-4	5.43594E-3	9.32932E-2	2.73271E1	-3.26602E1	-3.25999E1	2.67923E1	1.72953E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.51924E-2
2.0E0	3.036E3	4.0E0	3.16E2	1.6E2	-7.13915E-2	-8.80018E1	-3.8147E-4	-8.8E1	2.38419E-5	5.26905E-3	9.31501E-2	2.72861E1	-3.26505E1	-3.26162E1	2.68154E1	1.72511E-8	2.52492E-3	2.52492E-3	6.3074E-3	2.52139E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80019E1	-3.8147E-4	-8.80003E1	2.86102E-4	5.10216E-3	9.31978E-2	2.73169E1	-3.26549E1	-3.26183E1	2.67163E1	1.72747E-8	2.51804E-3	2.51804E-3	6.31299E-3	2.5196E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.19325E-2	-8.80015E1	-3.8147E-4	-8.80003E1	7.15256E-5	5.38826E-3	9.32932E-2	2.7318E1	-3.26517E1	-3.26505E1	2.68665E1	1.73026E-8	2.51525E-3	2.51525E-3	6.32896E-3	2.51924E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80016E1	-6.19888E-4	-8.80006E1	3.09944E-4	5.19753E-3	9.35793E-2	2.72895E1	-3.26675E1	-3.26092E1	2.67259E1	1.7313E-8	2.52139E-3	2.52139E-3	6.3074E-3	2.50626E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80017E1	-6.4373E-4	-8.80002E1	2.38419E-5	5.19753E-3	9.32693E-2	2.73122E1	-3.26384E1	-3.26661E1	2.67914E1	1.72852E-8	2.50898E-3	2.50898E-3	6.31288E-3	2.52489E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10825E-2	-8.80019E1	-6.67572E-4	-8.80001E1	-3.57628E-4	5.45979E-3	9.32932E-2	2.72943E1	-3.26561E1	-3.26068E1	2.6792E1	1.731E-8	2.52492E-3	2.52492E-3	6.29665E-3	2.49997E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80021E1	-8.10623E-4	-8.8E1	-2.38419E-5	5.07832E-3	9.35793E-2	2.73015E1	-3.26831E1	-3.26122E1	2.68136E1	1.73002E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.51395E-2
1.2E1	7.7E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.8002E1	-3.8147E-4	-8.8E1	-9.53674E-5	5.50747E-3	9.30548E-2	2.72985E1	-3.26711E1	-3.2635E1	2.67806E1	1.72777E-8	2.5188E-3	2.5188E-3	6.30192E-3	2.51177E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80018E1	-4.05312E-4	-8.80002E1	-3.57628E-4	5.31673E-3	9.30786E-2	2.73219E1	-3.26639E1	-3.26585E1	2.67848E1	1.72402E-8	2.51662E-3	2.51662E-3	6.29645E-3	2.50959E-2
1.4E1	5.8E1	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80017E1	-3.09944E-4	-8.80001E1	9.53674E-5	5.4121E-3	9.29117E-2	2.73033E1	-3.26807E1	-3.26512E1	2.68184E1	1.72777E-8	2.51771E-3	2.51771E-3	6.34037E-3	2.51177E-2
1.5E1	4.1E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80018E1	-3.57628E-4	-8.80001E1	1.90735E-4	5.43594E-3	9.30309E-2	2.72986E1	-3.26419E1	-3.26213E1	2.67569E1	1.72477E-8	2.5188E-3	2.5188E-3	6.29645E-3	2.51395E-2
1.6E1	2.77E2	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80016E1	-4.76837E-4	-8.80001E1	1.43051E-4	5.60284E-3	9.33409E-2	2.72738E1	-3.26654E1	-3.26092E1	2.679E1	1.72511E-8	2.52169E-3	2.52169E-3	6.26985E-3	2.50852E-2
1.7E1	4.08E2	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80016E1	-7.86781E-4	-8.80001E1	7.15256E-5	5.48363E-3	9.31501E-2	2.72907E1	-3.26404E1	-3.26454E1	2.68444E1	1.72616E-8	2.51919E-3	2.51919E-3	6.30212E-3	2.51801E-2
1.8E1	1.656E3	0.0E0	7.27E2	5.0E2	-7.201E-2	-8.80016E1	-4.29153E-4	-8.80001E1	-1.66893E-4	5.36442E-3	9.32217E-2	2.73291E1	-3.26518E1	-3.25936E1	2.67746E1	1.73081E-8	2.51874E-3	2.51874E-3	6.3016E-3	2.51768E-2
1.9E1	2.686E3	0.0E0	7.68E2	5.29E2	-7.14689E-2	-8.8002E1	-4.52995E-4	-8.80001E1	1.90735E-4	5.79357E-3	9.31978E-2	2.73069E1	-3.26609E1	-3.26116E1	2.68124E1	1.72364E-8	2.51632E-3	2.51632E-3	6.3074E-3	2.52569E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.16233E-2	-8.80018E1	-5.48363E-4	-8.8E1	-4.76837E-5	5.36442E-3	9.32932E-2	2.72986E1	-3.26626E1	-3.26413E1	2.67974E1	1.73227E-8	2.51552E-3	2.51552E-3	6.29645E-3	2.52051E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80017E1	-4.29153E-4	-8.80001E1	9.53674E-5	5.81741E-3	9.3174E-2	2.73111E1	-3.26825E1	-3.26434E1	2.6777E1	1.71923E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.51066E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80018E1	-4.76837E-5	-8.80001E1	1.43051E-4	5.96046E-3	9.35078E-2	2.73045E1	-3.26554E1	-3.2617E1	2.67938E1	1.70023E-8	2.51225E-3	2.51225E-3	6.34037E-3	2.51395E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80015E1	9.53674E-5	-8.80003E1	-2.38419E-5	5.48363E-3	9.31025E-2	2.73104E1	-3.26744E1	-3.26148E1	2.67926E1	1.70244E-8	2.52209E-3	2.52209E-3	6.34037E-3	2.51832E-2