[Scan]
initial_time=2016-02-15T17:24:38
final_time=2016-02-15T17:24:58
ip_count=19
run=1030
dataset=1
scan=19
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.12368E-2
qbias_imon=-3.79789E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.45304E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=4.60231E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.04394E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=8.95107E-10
mult1=-1.08234E-8
mult2=-2.67034E-9
rf_tmon=-3.97266E-3
rf_agc=3.38164E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=4.56262E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.60985E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19604E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.05212E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=2.97765E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0494E1
cs_ea1_imon=2.50182E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02393E0
lens1_imon=1.45627E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04087E1
cs_ea2_imon=1.5804E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=2.98666E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=4.19092E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=2.87062E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15101E1
os_ea1_imon=1.88682E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2527E0
cs_ionrep_imon=1.24009E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=3.04757E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=8.24523E-10
tplens_vset=1.4E-1
tplens_vmon=1.60839E0
tplens_imon=-2.23642E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26343E1
iondef3_imon=1.4928E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26803E1
iondef2_imon=1.59338E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0299E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=4.62854E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27914E0
ionrepsh_imon=1.88357E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33844E1
lens5b_imon=2.1817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.1247E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.45715E-1
os_ea2_imon=-4.97618E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06227E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71035E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62158E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54176E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=2.86954E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30938E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.25794E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73193E1
iondef1_imon=1.09553E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67833E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.13583E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=4.10461E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-2.01043E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47251E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.0593E-1
window_imon=-9.40055E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.50538E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.56809E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.17733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36247E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33848E1
os_fil1_imon=5.46698E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.3891E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66313E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30768E1
cs_fil1_imon=9.97651E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61927E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66495E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.91894E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.81826E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56512E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.5999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1182E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22266E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.51395E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.52538E-3
foreline_cvt_pmon=2.52538E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.17556E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.295E3	1.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80016E1	-5.24521E-4	-8.80002E1	2.14577E-4	4.72069E-3	9.31978E-2	2.72991E1	-3.26813E1	-3.2602E1	2.67992E1	1.72702E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.50959E-2
2.0E0	2.889E3	4.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80013E1	-6.19888E-4	-8.80003E1	1.90735E-4	5.26905E-3	9.31978E-2	2.73405E1	-3.26608E1	-3.26472E1	2.67943E1	1.72658E-8	2.51525E-3	2.51525E-3	6.32896E-3	2.53432E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80014E1	-4.05312E-4	-8.80003E1	1.19209E-4	5.07832E-3	9.34124E-2	2.73134E1	-3.26443E1	-3.26372E1	2.68593E1	1.73077E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.5227E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80018E1	-7.15256E-5	-8.80002E1	4.76837E-5	5.50747E-3	9.33886E-2	2.72907E1	-3.26777E1	-3.26002E1	2.68046E1	1.72732E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.51066E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80022E1	-4.05312E-4	-8.80002E1	7.15256E-5	5.36442E-3	9.34124E-2	2.7308E1	-3.26756E1	-3.26154E1	2.68001E1	1.72852E-8	2.52099E-3	2.52099E-3	6.3514E-3	2.51395E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80019E1	-9.53674E-5	-8.80004E1	4.76837E-4	5.72205E-3	9.32217E-2	2.73177E1	-3.26681E1	-3.26122E1	2.67843E1	1.72953E-8	2.52276E-3	2.52276E-3	6.3074E-3	2.52139E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80017E1	-2.86102E-4	-8.80002E1	3.33786E-4	5.26905E-3	9.34124E-2	2.72961E1	-3.26867E1	-3.25966E1	2.68371E1	1.73077E-8	2.51771E-3	2.51771E-3	6.30192E-3	2.51395E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80017E1	-3.8147E-4	-8.80002E1	1.43051E-4	5.67436E-3	9.30548E-2	2.72907E1	-3.26837E1	-3.26134E1	2.68136E1	1.72552E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.51613E-2
1.2E1	8.2E1	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80015E1	-2.6226E-4	-8.80004E1	4.76837E-5	5.88894E-3	9.3174E-2	2.72877E1	-3.26729E1	-3.26254E1	2.68166E1	1.72777E-8	2.51334E-3	2.51334E-3	6.29098E-3	2.51177E-2
1.3E1	8.0E0	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80018E1	-3.33786E-4	-8.80003E1	-7.15256E-5	5.48363E-3	9.29594E-2	2.72961E1	-3.26458E1	-3.26044E1	2.67631E1	1.72627E-8	2.51552E-3	2.51552E-3	6.36244E-3	2.5227E-2
1.4E1	5.2E1	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80014E1	-1.90735E-4	-8.80004E1	-3.09944E-4	5.36442E-3	9.3174E-2	2.7298E1	-3.26484E1	-3.26396E1	2.6795E1	1.72702E-8	2.52318E-3	2.52318E-3	6.30192E-3	2.51832E-2
1.5E1	3.5E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80014E1	-3.8147E-4	-8.80004E1	-2.38419E-5	5.53131E-3	9.32455E-2	2.72961E1	-3.26813E1	-3.2629E1	2.67806E1	1.72511E-8	2.51525E-3	2.51525E-3	6.32896E-3	2.51066E-2
1.6E1	2.78E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80017E1	-3.57628E-4	-8.80004E1	-1.19209E-4	5.38826E-3	9.32693E-2	2.73222E1	-3.26679E1	-3.26113E1	2.67926E1	1.72852E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.51832E-2
1.7E1	4.13E2	2.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80014E1	-4.05312E-4	-8.80006E1	4.29153E-4	5.126E-3	9.32217E-2	2.73357E1	-3.26651E1	-3.26422E1	2.6825E1	1.72953E-8	2.51954E-3	2.51954E-3	6.29128E-3	2.5128E-2
1.8E1	1.698E3	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80017E1	-4.52995E-4	-8.80004E1	1.19209E-4	5.74589E-3	9.30309E-2	2.72984E1	-3.26493E1	-3.26223E1	2.6792E1	1.72927E-8	2.5188E-3	2.5188E-3	6.29645E-3	2.51832E-2
1.9E1	2.779E3	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80017E1	-7.86781E-4	-8.80002E1	-1.19209E-4	5.62668E-3	9.31978E-2	2.72856E1	-3.26514E1	-3.26508E1	2.68157E1	1.72365E-8	2.51693E-3	2.51693E-3	6.3074E-3	2.5263E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80017E1	-5.00679E-4	-8.80001E1	1.66893E-4	5.31673E-3	9.32455E-2	2.73117E1	-3.26801E1	-3.26176E1	2.6783E1	1.69883E-8	2.52815E-3	2.52815E-3	6.29128E-3	2.50852E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80015E1	-2.86102E-4	-8.80002E1	7.15256E-5	5.62668E-3	9.32693E-2	2.73147E1	-3.26633E1	-3.26158E1	2.68274E1	1.70244E-8	2.51225E-3	2.51225E-3	6.34037E-3	2.52489E-2
2.2E1	1.3E1	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80019E1	-4.76837E-4	-8.80003E1	1.43051E-4	5.24521E-3	9.35793E-2	2.7321E1	-3.26585E1	-3.26425E1	2.67514E1	1.7017E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.51395E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.12368E-2	-8.80021E1	-8.10623E-4	-8.80001E1	2.6226E-4	5.38826E-3	9.32932E-2	2.73193E1	-3.26803E1	-3.26343E1	2.67833E1	1.70096E-8	2.52538E-3	2.52538E-3	6.30192E-3	2.51395E-2