[Scan]
initial_time=2016-02-15T17:25:05
final_time=2016-02-15T17:25:24
ip_count=19
run=1030
dataset=1
scan=20
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.76487E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.25718E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=3.76809E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.97644E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=8.49688E-10
mult1=-9.81854E-9
mult2=-2.70562E-9
rf_tmon=-3.98446E-3
rf_agc=3.30908E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=4.36139E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67155E0
bslens_imon=2.63869E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=1.97622E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12533E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53804E1
cs_ef1b_imon=2.9727E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=2.47298E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01071E0
lens1_imon=1.39138E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64611E1
os_ef1alow_imon=2.98555E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.57211E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84342E1
cs_ef1a_imon=2.97674E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=4.5439E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11129E1
os_restr1_imon=2.86695E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=1.8879E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63651E1
os_ef1bup_imon=3.09754E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23648E0
cs_ionrep_imon=1.23504E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01766E1
cs_anode1_imon=3.05238E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=8.12149E-10
tplens_vset=1.4E-1
tplens_vmon=1.59637E0
tplens_imon=-9.38636E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.49568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.58905E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98472E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=4.64535E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.90665E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33892E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74593E1
cs_ef2b_imon=3.12655E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.60736E-1
os_ea2_imon=-3.28186E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06197E2
lens4b_imon=2.00652E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71227E1
cs_ef2a_imon=3.18237E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62096E0
os_ef2alow_imon=-2.56062E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40304E-1
os_ef2bup_imon=-5.2742E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10872E1
os_restr2_imon=2.86144E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.32452E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02115E1
cs_anode2_imon=2.26181E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73204E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67016E1
iondef4_imon=1.08678E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.0714E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=3.22342E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14667E0
cs_ionaccel_imon=-1.98412E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02025E2
cs_ionfocb_imon=1.47171E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56264E1
einzel_imon=7.72089E-6
window_vset=0.0E0
window_vmon=2.12571E-1
window_imon=-1.01839E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39022E-4
mask2_vset=0.0E0
mask2_vmon=-1.86681E1
mask2_imon=-6.21818E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.25303E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.22922E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.10883E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27825E0
defgridb_imon=6.04898E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33853E1
os_fil1_imon=4.8143E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.64783E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65389E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30799E1
cs_fil1_imon=9.99562E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62965E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66934E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06081E-2
os_fil2_imon=-2.45007E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.4454E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61797E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31565E-1
cs_fil2_imon=-2.41947E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2525E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22319E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=2.51292E-2
chamber_ion_pmon=1.729E-8
chamber_cvt_pmon=2.51693E-3
foreline_cvt_pmon=2.51693E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.2121E-1
res40_imon=-2.74054E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.264E3	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.80018E1	-4.05312E-4	-8.80003E1	1.19209E-4	5.4121E-3	9.3174E-2	2.72895E1	-3.26718E1	-3.26295E1	2.6781E1	1.72327E-8	2.51225E-3	2.51225E-3	6.31288E-3	2.51832E-2
2.0E0	3.019E3	3.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80018E1	-9.53674E-4	-8.80005E1	3.09944E-4	5.65052E-3	9.33647E-2	2.72898E1	-3.26634E1	-3.26272E1	2.67283E1	1.73026E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.5128E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80019E1	-7.86781E-4	-8.80004E1	2.6226E-4	5.74589E-3	9.33886E-2	2.72955E1	-3.26855E1	-3.26002E1	2.6843E1	1.72441E-8	2.51693E-3	2.51693E-3	6.31858E-3	2.53975E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80017E1	-1.00136E-3	-8.80004E1	4.05312E-4	5.48363E-3	9.33647E-2	2.72915E1	-3.26573E1	-3.26366E1	2.66472E1	1.72732E-8	2.52169E-3	2.52169E-3	6.29665E-3	2.52785E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.80017E1	-5.48363E-4	-8.80004E1	1.90735E-4	4.95911E-3	9.35078E-2	2.72968E1	-3.26744E1	-3.26254E1	2.69009E1	1.72852E-8	2.52428E-3	2.52428E-3	6.31837E-3	2.52051E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80017E1	-7.39098E-4	-8.80004E1	3.09944E-4	5.34058E-3	9.31025E-2	2.73063E1	-3.26591E1	-3.26297E1	2.68937E1	1.72658E-8	2.5131E-3	2.5131E-3	6.31278E-3	2.52354E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80019E1	-5.24521E-4	-8.80004E1	1.90735E-4	5.126E-3	9.34839E-2	2.73075E1	-3.26561E1	-3.26038E1	2.66879E1	1.72518E-8	2.52027E-3	2.52027E-3	6.29624E-3	2.5107E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80021E1	-3.8147E-4	-8.80004E1	2.38419E-4	5.74589E-3	9.3317E-2	2.7278E1	-3.26502E1	-3.2616E1	2.69167E1	1.72511E-8	2.51847E-3	2.51847E-3	6.32896E-3	2.5128E-2
1.2E1	8.9E1	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80017E1	-4.05312E-4	-8.80003E1	2.38419E-4	5.57899E-3	9.36508E-2	2.73167E1	-3.26556E1	-3.26422E1	2.66993E1	1.73152E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.52051E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80019E1	-5.00679E-4	-8.79998E1	3.09944E-4	5.34058E-3	9.34601E-2	2.73232E1	-3.26497E1	-3.2626E1	2.68793E1	1.72833E-8	2.51814E-3	2.51814E-3	6.31269E-3	2.51801E-2
1.4E1	3.8E1	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80018E1	-3.8147E-4	-8.80007E1	2.38419E-4	5.45979E-3	9.32932E-2	2.72709E1	-3.26639E1	-3.2629E1	2.68094E1	1.72441E-8	2.51414E-3	2.51414E-3	6.3074E-3	2.52407E-2
1.5E1	3.5E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80016E1	-6.4373E-4	-8.80003E1	3.33786E-4	5.60284E-3	9.34362E-2	2.73165E1	-3.26765E1	-3.262E1	2.67932E1					
1.6E1	2.67E2	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80018E1	-5.00679E-4	-8.80004E1	1.66893E-4	5.50747E-3	9.32455E-2	2.73021E1	-3.26657E1	-3.26248E1	2.67295E1	1.72627E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.53368E-2
1.7E1	4.14E2	1.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80018E1	-6.4373E-4	-8.80004E1	1.66893E-4	5.34058E-3	9.33647E-2	2.73293E1	-3.26974E1	-3.26071E1	2.68136E1	1.72627E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.5227E-2
1.8E1	1.749E3	1.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80019E1	-5.48363E-4	-8.80003E1	-2.38419E-5	5.38826E-3	9.35078E-2	2.73039E1	-3.26549E1	-3.26302E1	2.68124E1	1.70682E-8	2.52169E-3	2.52169E-3	6.31817E-3	2.50852E-2
1.9E1	2.73E3	1.0E0	7.68E2	5.29E2	-7.21643E-2	-8.80018E1	-6.91414E-4	-8.80004E1	0.0E0	5.19753E-3	9.32693E-2	2.73165E1	-3.26663E1	-3.26284E1	2.67085E1	1.69875E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.5227E-2
2.0E1	1.1E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80013E1	-6.19888E-4	-8.80003E1	5.24521E-4	5.67436E-3	9.33409E-2	2.73327E1	-3.26615E1	-3.26308E1	2.67692E1	1.69875E-8	2.52318E-3	2.52318E-3	6.31837E-3	2.51177E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80014E1	-6.4373E-4	-8.80001E1	3.57628E-4	5.60284E-3	9.31978E-2	2.73141E1	-3.26681E1	-3.26338E1	2.68244E1	1.70536E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.50424E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80018E1	-2.86102E-4	-8.80005E1	5.24521E-4	5.38826E-3	9.33886E-2	2.73015E1	-3.26711E1	-3.26062E1	2.67577E1	1.72627E-8	2.51443E-3	2.51443E-3	6.33486E-3	2.52928E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80018E1	-3.33786E-4	-8.79999E1	2.38419E-4	5.48363E-3	9.31263E-2	2.73204E1	-3.26744E1	-3.26266E1	2.67016E1	1.729E-8	2.51693E-3	2.51693E-3	6.31858E-3	2.51292E-2