[Scan]
initial_time=2016-02-15T17:26:25
final_time=2016-02-15T17:26:44
ip_count=19
run=1030
dataset=1
scan=23
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.80939E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.37889E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=4.37987E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.03437E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=8.76272E-10
mult1=-9.64702E-9
mult2=-2.71176E-9
rf_tmon=-6.10711E-3
rf_agc=3.29917E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.31673E-3
ql5_imon=4.46653E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65232E0
bslens_imon=2.58462E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19911E1
lens5a_imon=1.97478E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1253E2
lens4a_imon=2.05039E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=2.97982E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=2.48092E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03174E0
lens1_imon=1.53197E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64488E1
os_ef1alow_imon=2.97621E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.55084E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.98703E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=4.24147E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=2.86881E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15119E1
os_ea1_imon=1.87528E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=1.2181E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.9329E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=3.04253E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=8.17239E-10
tplens_vset=1.4E-1
tplens_vmon=1.63843E0
tplens_imon=-1.87592E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26389E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26805E1
iondef2_imon=1.58689E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02976E2
lens6_imon=2.984E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=4.80056E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=1.88862E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3391E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.13767E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.72151E-1
os_ea2_imon=-6.31002E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.17083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61918E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.22942E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10607E1
os_restr2_imon=2.86881E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30289E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.26335E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73094E1
iondef1_imon=1.07607E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.09206E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.1387E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81736E-1
olens1_imon=3.63338E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.93835E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02025E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.59414E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86332E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.64597E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.09584E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.78656E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5339E0
defgridb_imon=5.99851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33859E1
os_fil1_imon=4.26566E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.79755E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66137E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30836E1
cs_fil1_imon=9.99357E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61807E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6657E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1124E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.99846E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90928E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.91727E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22378E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.53368E-2
chamber_ion_pmon=1.71879E-8
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.70239E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.295E3	0.0E0	1.47E2	4.1E1	-7.41738E-2	-8.8002E1	-6.19888E-4	-8.80006E1	2.38419E-4	5.34058E-3	9.3317E-2	2.73075E1	-3.26655E1	-3.26307E1	2.6813E1	1.72747E-8	2.52585E-3	2.52585E-3	6.3074E-3	2.53078E-2
2.0E0	3.042E3	4.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80019E1	-3.57628E-4	-8.80004E1	3.8147E-4	5.31673E-3	9.32455E-2	2.73171E1	-3.26573E1	-3.26218E1	2.6807E1	1.72658E-8	2.51203E-3	2.51203E-3	6.30202E-3	2.52569E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80021E1	-3.57628E-4	-8.80003E1	2.86102E-4	5.4121E-3	9.3174E-2	2.73105E1	-3.26512E1	-3.25978E1	2.68196E1	1.72552E-8	2.51552E-3	2.51552E-3	6.32936E-3	2.52709E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80022E1	-4.29153E-4	-8.80001E1	2.6226E-4	5.38826E-3	9.32455E-2	2.73183E1	-3.26723E1	-3.26392E1	2.68106E1	1.72177E-8	2.52099E-3	2.52099E-3	6.32936E-3	2.51177E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.80023E1	-6.67572E-4	-8.80003E1	2.6226E-4	5.43594E-3	9.34839E-2	2.72985E1	-3.26807E1	-3.26194E1	2.67992E1	1.72805E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.5128E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80018E1	-4.29153E-4	-8.80004E1	-7.15256E-5	5.48363E-3	9.29594E-2	2.72974E1	-3.26502E1	-3.26107E1	2.67491E1	1.72976E-8	2.5147E-3	2.5147E-3	6.32978E-3	2.51737E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80019E1	-4.29153E-4	-8.8E1	1.43051E-4	5.50747E-3	9.29117E-2	2.73081E1	-3.26813E1	-3.2623E1	2.68244E1	1.72217E-8	2.51847E-3	2.51847E-3	6.29128E-3	2.53216E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80021E1	-1.66893E-4	-8.80001E1	1.43051E-4	5.19753E-3	9.31501E-2	2.72805E1	-3.26681E1	-3.25966E1	2.67728E1	1.72584E-8	2.5131E-3	2.5131E-3	6.3074E-3	2.51709E-2
1.2E1	7.3E1	0.0E0	4.85E2	3.23E2	-7.48695E-2	-8.8002E1	-7.15256E-5	-8.8E1	0.0E0	5.10216E-3	9.32217E-2	2.72805E1	-3.26446E1	-3.26254E1	2.68112E1	1.73002E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.53148E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.50241E-2	-8.8002E1	-2.38419E-4	-8.79997E1	-1.66893E-4	5.07832E-3	9.30309E-2	2.73237E1	-3.26452E1	-3.26254E1	2.67776E1	1.70466E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.51613E-2
1.4E1	4.3E1	0.0E0	5.66E2	3.82E2	-7.44059E-2	-8.80017E1	-5.72205E-4	-8.80001E1	2.14577E-4	5.19753E-3	9.30548E-2	2.73027E1	-3.26508E1	-3.26325E1	2.6783E1	1.69791E-8	2.52362E-3	2.52362E-3	6.29624E-3	2.52407E-2
1.5E1	4.1E1	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80019E1	-3.8147E-4	-8.8E1	3.8147E-4	4.95911E-3	9.29356E-2	2.73269E1	-3.26797E1	-3.26183E1	2.67723E1	1.70173E-8	2.51847E-3	2.51847E-3	6.31817E-3	2.50638E-2
1.6E1	2.77E2	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80018E1	-3.09944E-4	-8.8E1	1.19209E-4	5.29289E-3	9.29594E-2	2.73051E1	-3.26789E1	-3.26344E1	2.6807E1	1.701E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.50638E-2
1.7E1	4.34E2	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80017E1	-1.90735E-4	-8.8E1	4.52995E-4	5.8651E-3	9.2864E-2	2.73316E1	-3.26832E1	-3.26573E1	2.67992E1	1.701E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.50852E-2
1.8E1	1.666E3	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.80018E1	-5.24521E-4	-8.80001E1	1.19209E-4	5.31673E-3	9.29356E-2	2.72895E1	-3.26615E1	-3.26074E1	2.6786E1	1.70318E-8	2.51662E-3	2.51662E-3	6.32386E-3	2.50959E-2
1.9E1	2.777E3	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80017E1	-7.15256E-4	-8.80002E1	1.66893E-4	5.29289E-3	9.29832E-2	2.72769E1	-3.26416E1	-3.26278E1	2.67812E1	1.72777E-8	2.51334E-3	2.51334E-3	6.33486E-3	2.51613E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.36328E-2	-8.80017E1	-4.05312E-4	-8.8E1	3.57628E-4	5.26905E-3	9.30071E-2	2.72968E1	-3.26655E1	-3.25971E1	2.68285E1	1.72953E-8	2.51417E-3	2.51417E-3	6.31278E-3	2.51494E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80017E1	-4.05312E-4	-8.80002E1	3.8147E-4	5.26905E-3	9.30309E-2	2.73134E1	-3.26543E1	-3.26502E1	2.68406E1	1.7207E-8	2.51632E-3	2.51632E-3	6.30202E-3	2.50424E-2
2.2E1	7.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.8002E1	-5.00679E-4	-8.80002E1	1.43051E-4	5.19753E-3	9.2864E-2	2.73327E1	-3.26711E1	-3.26356E1	2.67758E1	1.70023E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.52709E-2
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80018E1	-8.82149E-4	-8.80002E1	2.38419E-4	5.31673E-3	9.32217E-2	2.73094E1	-3.26805E1	-3.26389E1	2.67974E1	1.71879E-8	2.5188E-3	2.5188E-3	6.34037E-3	2.53368E-2