[Scan]
initial_time=2016-02-15T17:27:18
final_time=2016-02-15T17:27:37
ip_count=19
run=1030
dataset=1
scan=25
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.77336E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.35076E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=4.55725E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.97961E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=9.02128E-10
mult1=-9.65327E-9
mult2=-2.77121E-9
rf_tmon=-4.98001E-3
rf_agc=3.25539E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=4.63986E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65796E0
bslens_imon=2.53618E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19901E1
lens5a_imon=1.98474E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=2.96288E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05082E1
cs_ea1_imon=2.48415E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99821E0
lens1_imon=1.56284E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=3.0018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04062E1
cs_ea2_imon=1.55435E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=2.96864E-5
olens2_vset=9.7E-1
olens2_vmon=9.70864E-1
olens2_imon=4.37999E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=2.88828E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=1.88245E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63713E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23617E0
cs_ionrep_imon=1.23049E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93392E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01545E1
cs_anode1_imon=3.05983E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2058E0
olens4_imon=8.18896E-10
tplens_vset=1.4E-1
tplens_vmon=1.62138E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26044E1
iondef3_imon=1.49277E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26616E1
iondef2_imon=1.59541E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02986E2
lens6_imon=2.98604E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=4.45426E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27628E0
ionrepsh_imon=1.88493E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33534E1
lens5b_imon=2.20242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.60474E-1
os_ea2_imon=-3.66136E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06154E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71023E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6414E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.3976E-1
os_ef2bup_imon=-5.38375E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=2.84971E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.30247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.26407E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72809E1
iondef1_imon=1.09741E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67683E1
iondef4_imon=1.08449E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.08796E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=3.83091E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09951E0
cs_ionaccel_imon=-1.92033E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02141E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=2.02927E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.8662E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.83114E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.39413E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.64355E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41146E0
defgridb_imon=6.05081E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33863E1
os_fil1_imon=4.72216E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.32903E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66416E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30799E1
cs_fil1_imon=9.99255E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62762E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66553E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16727E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.55687E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75718E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22368E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29721E-3
inlet_lpb_pmon=2.50959E-2
chamber_ion_pmon=1.72327E-8
chamber_cvt_pmon=2.51854E-3
foreline_cvt_pmon=2.51854E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.00738E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.341E3	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80018E1	-6.91414E-4	-8.80005E1	3.09944E-4	5.48363E-3	9.33886E-2	2.73051E1	-3.2675E1	-3.2629E1	2.6858E1	1.72702E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.50523E-2
2.0E0	3.021E3	1.0E0	3.16E2	1.6E2	-7.286E-2	-8.80019E1	-3.57628E-4	-8.80003E1	3.09944E-4	5.24521E-3	9.33409E-2	2.73143E1	-3.26511E1	-3.26395E1	2.68157E1	1.72732E-8	2.51417E-3	2.51417E-3	6.32356E-3	2.5128E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80018E1	-1.90735E-4	-8.80005E1	2.38419E-5	5.45979E-3	9.35078E-2	2.73015E1	-3.26633E1	-3.2617E1	2.68064E1	1.72477E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.50959E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.8002E1	-2.6226E-4	-8.80001E1	1.19209E-4	5.22137E-3	9.34839E-2	2.73033E1	-3.26567E1	-3.26001E1	2.68302E1	1.72327E-8	2.51552E-3	2.51552E-3	6.33486E-3	2.50741E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80019E1	-2.6226E-4	-8.80002E1	1.19209E-4	5.38826E-3	9.34839E-2	2.73147E1	-3.26717E1	-3.26062E1	2.67457E1	1.72028E-8	2.51225E-3	2.51225E-3	6.31288E-3	2.51177E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80019E1	-1.66893E-4	-8.80002E1	9.53674E-5	5.36442E-3	9.3174E-2	2.72829E1	-3.26621E1	-3.25996E1	2.68076E1	1.7185E-8	2.51632E-3	2.51632E-3	6.30202E-3	2.5128E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80018E1	-3.8147E-4	-8.80002E1	1.66893E-4	5.53131E-3	9.3317E-2	2.73261E1	-3.2635E1	-3.26224E1	2.68112E1	1.7017E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.50959E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80017E1	-1.90735E-4	-8.80002E1	9.53674E-5	5.48363E-3	9.33409E-2	2.72877E1	-3.26476E1	-3.26134E1	2.681E1	1.69875E-8	2.51334E-3	2.51334E-3	6.33486E-3	2.52051E-2
1.2E1	7.3E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.8002E1	-5.72205E-4	-8.8E1	1.66893E-4	5.55515E-3	9.31978E-2	2.72883E1	-3.26651E1	-3.26326E1	2.67583E1	1.7017E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.52709E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.08504E-2	-8.8002E1	-4.29153E-4	-8.80002E1	3.09944E-4	5.76973E-3	9.31501E-2	2.72998E1	-3.26596E1	-3.26054E1	2.67833E1	1.7017E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.52051E-2
1.4E1	3.8E1	0.0E0	5.66E2	3.82E2	-7.06958E-2	-8.80016E1	-6.91414E-4	-8.80003E1	1.19209E-4	5.48363E-3	9.3317E-2	2.73027E1	-3.26705E1	-3.26182E1	2.68693E1	1.70318E-8	2.52384E-3	2.52384E-3	6.30202E-3	2.51494E-2
1.5E1	2.9E1	0.0E0	6.06E2	4.11E2	-7.06958E-2	-8.80016E1	-5.96046E-4	-8.80003E1	2.6226E-4	5.60284E-3	9.33886E-2	2.72945E1	-3.26531E1	-3.26467E1	2.67682E1	1.70985E-8	2.5199E-3	2.5199E-3	6.30192E-3	2.51395E-2
1.6E1	2.45E2	0.0E0	6.47E2	4.41E2	-7.08504E-2	-8.80017E1	-9.53674E-5	-8.80005E1	1.43051E-4	5.76973E-3	9.35078E-2	2.72985E1	-3.26723E1	-3.26464E1	2.6789E1	1.72103E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.50741E-2
1.7E1	3.83E2	1.0E0	6.87E2	4.7E2	-7.05415E-2	-8.80018E1	-1.90735E-4	-8.80005E1	2.86102E-4	5.79357E-3	9.33409E-2	2.73345E1	-3.26735E1	-3.26308E1	2.68286E1	1.72327E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.52489E-2
1.8E1	1.624E3	1.0E0	7.27E2	5.0E2	-7.12368E-2	-8.80019E1	2.38419E-5	-8.80004E1	1.19209E-4	5.50747E-3	9.33409E-2	2.73435E1	-3.26897E1	-3.26254E1	2.67902E1	1.73026E-8	2.51847E-3	2.51847E-3	6.34518E-3	2.51924E-2
1.9E1	2.626E3	0.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80018E1	-9.53674E-5	-8.80003E1	9.53674E-5	5.38826E-3	9.31263E-2	2.72632E1	-3.26602E1	-3.26307E1	2.67734E1	1.72852E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.51504E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80017E1	-1.66893E-4	-8.80005E1	3.09944E-4	5.38826E-3	9.35078E-2	2.72793E1	-3.26765E1	-3.26278E1	2.67896E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80014E1	-5.72205E-4	-8.80001E1	1.19209E-4	5.38826E-3	9.3317E-2	2.72915E1	-3.26579E1	-3.26455E1	2.6796E1	1.71753E-8	2.51701E-3	2.51701E-3	6.31283E-3	2.51553E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80015E1	-3.57628E-4	-8.8E1	3.09944E-4	5.45979E-3	9.32455E-2	2.72635E1	-3.26676E1	-3.26454E1	2.68302E1					
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80013E1	-5.72205E-4	-8.80005E1	1.43051E-4	5.57899E-3	9.31978E-2	2.72809E1	-3.26616E1	-3.26044E1	2.67683E1	1.72327E-8	2.51854E-3	2.51854E-3	6.29721E-3	2.50959E-2