[Scan]
initial_time=2016-02-15T17:27:44
final_time=2016-02-15T17:28:04
ip_count=19
run=1030
dataset=1
scan=26
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.77499E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.24621E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=4.2969E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.98613E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=8.9848E-10
mult1=-9.10224E-9
mult2=-2.66272E-9
rf_tmon=-4.62658E-3
rf_agc=3.37181E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=4.5855E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65565E0
bslens_imon=2.51E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19988E1
lens5a_imon=2.00227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05196E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=2.96828E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.02209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05129E1
cs_ea1_imon=2.49151E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00227E0
lens1_imon=1.52197E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.55123E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.99964E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=4.44567E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=2.8717E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=1.884E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26985E0
cs_ionrep_imon=1.21552E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93325E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=3.04865E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=8.04281E-10
tplens_vset=1.4E-1
tplens_vmon=1.61205E0
tplens_imon=-3.51244E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25984E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26993E1
iondef2_imon=1.57658E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02975E2
lens6_imon=2.98471E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.35805E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27903E0
ionrepsh_imon=1.89245E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33725E1
lens5b_imon=2.17821E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74519E1
cs_ef2b_imon=3.11677E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.73863E-1
os_ea2_imon=-3.95319E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00479E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.19606E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59455E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27147E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=2.86305E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.31104E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.25722E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73381E1
iondef1_imon=1.09982E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67828E1
iondef4_imon=1.06287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.10811E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81569E-1
olens1_imon=3.51906E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.77257E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02032E2
cs_ionfocb_imon=1.4701E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56129E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=1.73494E-1
window_imon=-1.23198E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86548E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.87621E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.25276E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.18569E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48935E0
defgridb_imon=6.18664E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3387E1
os_fil1_imon=5.03451E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.03181E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66262E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30798E1
cs_fil1_imon=9.98312E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61134E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66329E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31827E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.95952E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.78345E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.52181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23833E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22376E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.5227E-2
chamber_ion_pmon=1.72927E-8
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.90837E-1
res40_imon=-2.63392E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=184
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.269E3	1.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80017E1	-1.90735E-4	-8.80002E1	7.15256E-5	5.74589E-3	9.37462E-2	2.72968E1	-3.26868E1	-3.26254E1	2.678E1	1.71357E-8	2.52209E-3	2.52209E-3	6.32936E-3	2.5227E-2
2.0E0	2.97E3	1.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80018E1	-3.57628E-4	-8.80005E1	2.14577E-4	5.55515E-3	9.34124E-2	2.73075E1	-3.26585E1	-3.2626E1	2.68262E1	1.709E-8	2.52384E-3	2.52384E-3	6.31817E-3	2.50424E-2
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80014E1	-4.76837E-4	-8.80006E1	3.57628E-4	5.31673E-3	9.3317E-2	2.72886E1	-3.26649E1	-3.26384E1	2.67677E1	1.7158E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.51613E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80018E1	-3.8147E-4	-8.80007E1	3.57628E-4	5.22137E-3	9.34601E-2	2.73189E1	-3.26603E1	-3.2626E1	2.68184E1	1.71804E-8	2.51662E-3	2.51662E-3	6.29645E-3	2.51395E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.38649E-2	-8.80015E1	-3.57628E-4	-8.80005E1	4.29153E-4	5.31673E-3	9.30786E-2	2.72991E1	-3.26609E1	-3.26092E1	2.68076E1	1.701E-8	2.51739E-3	2.51739E-3	6.32356E-3	2.51066E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80012E1	-1.43051E-4	-8.80005E1	5.24521E-4	5.67436E-3	9.33409E-2	2.72937E1	-3.26639E1	-3.26122E1	2.67619E1	1.7017E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.51613E-2
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80015E1	-4.52995E-4	-8.80001E1	4.29153E-4	5.22137E-3	9.30071E-2	2.72997E1	-3.26561E1	-3.26122E1	2.68442E1	1.69727E-8	2.52647E-3	2.52647E-3	6.31288E-3	2.50741E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80019E1	-4.52995E-4	-8.80002E1	2.14577E-4	5.14984E-3	9.34124E-2	2.72998E1	-3.26449E1	-3.26071E1	2.67686E1	1.7017E-8	2.52318E-3	2.52318E-3	6.3074E-3	2.50741E-2
1.2E1	8.4E1	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80018E1	-4.76837E-5	-8.80002E1	2.86102E-4	5.67436E-3	9.31263E-2	2.72841E1	-3.26987E1	-3.26086E1	2.67976E1	1.7017E-8	2.52867E-3	2.52867E-3	6.32386E-3	2.51613E-2
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80017E1	-7.15256E-5	-8.80002E1	3.33786E-4	5.74589E-3	9.32217E-2	2.72968E1	-3.26461E1	-3.26219E1	2.67952E1	1.69666E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.50424E-2
1.4E1	5.8E1	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80018E1	-2.6226E-4	-8.80002E1	4.05312E-4	5.67436E-3	9.33409E-2	2.73399E1	-3.26791E1	-3.26172E1	2.68178E1	1.70318E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.50959E-2
1.5E1	4.1E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80016E1	-3.8147E-4	-8.80002E1	2.14577E-4	5.48363E-3	9.3317E-2	2.73045E1	-3.26676E1	-3.26352E1	2.67385E1	1.71192E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.51709E-2
1.6E1	2.7E2	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80017E1	-1.90735E-4	-8.80001E1	2.38419E-4	5.36442E-3	9.33647E-2	2.73237E1	-3.26573E1	-3.26014E1	2.68214E1	1.72852E-8	2.51225E-3	2.51225E-3	6.31837E-3	2.5227E-2
1.7E1	3.92E2	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80018E1	-3.09944E-4	-8.79999E1	0.0E0	5.76973E-3	9.32217E-2	2.73009E1	-3.26657E1	-3.2638E1	2.67644E1	1.72927E-8	2.5199E-3	2.5199E-3	6.32386E-3	2.52709E-2
1.8E1	1.503E3	1.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80021E1	-3.33786E-4	-8.79998E1	7.15256E-5	5.62668E-3	9.34124E-2	2.73411E1	-3.26484E1	-3.26325E1	2.67698E1	1.71282E-8	2.51552E-3	2.51552E-3	6.30192E-3	2.5227E-2
1.9E1	2.637E3	3.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80019E1	-4.29153E-4	-8.8E1	-7.15256E-5	5.74589E-3	9.35078E-2	2.73255E1	-3.26627E1	-3.26302E1	2.67992E1	1.71997E-8	2.52169E-3	2.52169E-3	6.3074E-3	2.52354E-2
2.0E1	1.5E1	0.0E0	8.08E2	5.58E2	-7.18554E-2	-8.80017E1	-5.24521E-4	-8.80002E1	4.76837E-5	5.57899E-3	9.3317E-2	2.73228E1	-3.26933E1	-3.26107E1	2.68296E1	1.72327E-8	2.52209E-3	2.52209E-3	6.29645E-3	2.5227E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80018E1	-3.8147E-4	-8.79999E1	4.05312E-4	5.65052E-3	9.34839E-2	2.72898E1	-3.26685E1	-3.26579E1	2.67824E1	1.72732E-8	2.51525E-3	2.51525E-3	6.31278E-3	2.51494E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80017E1	-3.8147E-4	-8.79996E1	1.66893E-4	5.4121E-3	9.34124E-2	2.73027E1	-3.26645E1	-3.2626E1	2.68353E1	1.73174E-8	2.51203E-3	2.51203E-3	6.28592E-3	2.5128E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80016E1	-5.72205E-4	-8.80005E1	2.38419E-4	5.57899E-3	9.34601E-2	2.73381E1	-3.26993E1	-3.25984E1	2.67828E1	1.72927E-8	2.51552E-3	2.51552E-3	6.29645E-3	2.5227E-2