[Scan]
initial_time=2016-02-15T17:28:11
final_time=2016-02-15T17:28:31
ip_count=19
run=1030
dataset=1
scan=27
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.07733E-2
qbias_imon=-3.79769E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.44612E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=4.30286E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.04059E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=9.12893E-10
mult1=-9.38751E-9
mult2=-2.76475E-9
rf_tmon=-2.06036E-3
rf_agc=3.7079E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=5.08261E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66621E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=1.97554E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5365E1
cs_ef1b_imon=2.97731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04846E1
cs_ea1_imon=2.48663E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99703E0
lens1_imon=1.56638E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.99677E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03602E1
cs_ea2_imon=1.55081E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=2.97592E-5
olens2_vset=9.7E-1
olens2_vmon=9.7084E-1
olens2_imon=4.84824E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11228E1
os_restr1_imon=2.87826E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15394E1
os_ea1_imon=1.89201E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6349E1
os_ef1bup_imon=3.07809E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=1.21386E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93417E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01873E1
cs_anode1_imon=3.0482E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=8.24356E-10
tplens_vset=1.4E-1
tplens_vmon=1.57536E0
tplens_imon=-3.20124E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26772E1
iondef2_imon=1.56603E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02963E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.72903E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26685E0
ionrepsh_imon=1.89095E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33846E1
lens5b_imon=2.19711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74576E1
cs_ef2b_imon=3.13508E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.65783E-1
os_ea2_imon=-6.70525E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00771E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71316E1
cs_ef2a_imon=3.17783E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62392E0
os_ef2alow_imon=-2.59891E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.29463E-1
os_ef2bup_imon=-5.25053E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=2.86332E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.31733E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01838E1
cs_anode2_imon=2.26905E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73326E1
iondef1_imon=1.09246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67826E1
iondef4_imon=1.0687E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.16615E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=3.35395E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10697E0
cs_ionaccel_imon=-1.7301E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47139E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56034E1
einzel_imon=7.71912E-6
window_vset=0.0E0
window_vmon=2.04364E-1
window_imon=-9.86392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.39154E-4
mask2_vset=0.0E0
mask2_vmon=-1.8661E1
mask2_imon=-6.28441E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.65416E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.61004E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=7.26483E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44985E0
defgridb_imon=6.1393E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33884E1
os_fil1_imon=4.48984E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.25845E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66308E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30801E1
cs_fil1_imon=9.98725E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62314E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66355E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.23059E-2
os_fil2_imon=-2.40275E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.4082E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73946E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34022E-1
cs_fil2_imon=-2.45488E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39107E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22383E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29703E-3
inlet_lpb_pmon=2.52305E-2
chamber_ion_pmon=1.72292E-8
chamber_cvt_pmon=2.51575E-3
foreline_cvt_pmon=2.51575E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.97058E-1
res40_imon=-2.65104E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.275E3	2.0E0	1.47E2	4.1E1	-7.42513E-2	-8.80018E1	-5.24521E-4	-8.8E1	3.8147E-4	5.19753E-3	9.31501E-2	2.7301E1	-3.26638E1	-3.26024E1	2.67908E1	1.73152E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.52051E-2
2.0E0	3.056E3	4.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80018E1	-3.57628E-4	-8.79998E1	2.6226E-4	5.62668E-3	9.34601E-2	2.73105E1	-3.26915E1	-3.26038E1	2.67992E1	1.72616E-8	2.51814E-3	2.51814E-3	6.31798E-3	2.51169E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80017E1	-5.00679E-4	-8.80002E1	2.86102E-4	5.26905E-3	9.32217E-2	2.73381E1	-3.26729E1	-3.25878E1	2.68186E1	1.70922E-8	2.51248E-3	2.51248E-3	6.3074E-3	2.51514E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80019E1	-6.91414E-4	-8.8E1	2.14577E-4	5.29289E-3	9.29594E-2	2.73039E1	-3.26531E1	-3.26307E1	2.68227E1	1.69962E-8	2.51814E-3	2.51814E-3	6.32328E-3	2.51801E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80018E1	-7.86781E-4	-8.80002E1	2.86102E-4	5.38826E-3	9.3174E-2	2.72537E1	-3.26927E1	-3.26205E1	2.6782E1	1.70173E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.50638E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80019E1	-4.52995E-4	-8.79999E1	4.76837E-4	5.26905E-3	9.31263E-2	2.73502E1	-3.26873E1	-3.25924E1	2.68406E1	1.69875E-8	2.52647E-3	2.52647E-3	6.32936E-3	2.51395E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80026E1	-1.19209E-4	-8.79999E1	3.33786E-4	5.43594E-3	9.32932E-2	2.72919E1	-3.26711E1	-3.25954E1	2.67887E1	1.70096E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.51395E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80023E1	-5.48363E-4	-8.8E1	4.05312E-4	5.67436E-3	9.28879E-2	2.72847E1	-3.26446E1	-3.26212E1	2.68163E1	1.70318E-8	2.5188E-3	2.5188E-3	6.34037E-3	2.52928E-2
1.2E1	8.2E1	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80017E1	0.0E0	-8.80002E1	6.4373E-4	5.6982E-3	9.28164E-2	2.72874E1	-3.26372E1	-3.26113E1	2.67758E1	1.7054E-8	2.52099E-3	2.52099E-3	6.3074E-3	2.5238E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80018E1	-3.8147E-4	-8.79999E1	4.05312E-4	5.50747E-3	9.29117E-2	2.73183E1	-3.26651E1	-3.26266E1	2.68166E1	1.71953E-8	2.51771E-3	2.51771E-3	6.29098E-3	2.50959E-2
1.4E1	7.2E1	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80016E1	-4.05312E-4	-8.8E1	2.86102E-4	5.8651E-3	9.30786E-2	2.72971E1	-3.26425E1	-3.26474E1	2.6774E1					
1.5E1	3.7E1	0.0E0	6.06E2	4.11E2	-7.10825E-2	-8.80015E1	-7.15256E-5	-8.79999E1	9.53674E-5	5.24521E-3	9.33409E-2	2.72733E1	-3.26494E1	-3.25653E1	2.68214E1	1.72103E-8	2.5199E-3	2.5199E-3	6.33486E-3	2.50523E-2
1.6E1	2.62E2	0.0E0	6.47E2	4.41E2	-7.09279E-2	-8.80012E1	-7.15256E-5	-8.80003E1	1.19209E-4	5.29289E-3	9.31025E-2	2.73016E1	-3.26744E1	-3.26272E1	2.67914E1	1.72477E-8	2.51662E-3	2.51662E-3	6.3074E-3	2.51832E-2
1.7E1	3.58E2	0.0E0	6.87E2	4.7E2	-7.13915E-2	-8.80014E1	2.14577E-4	-8.80002E1	9.53674E-5	5.72205E-3	9.31263E-2	2.73147E1	-3.26651E1	-3.26164E1	2.67956E1	1.7207E-8	2.51417E-3	2.51417E-3	6.34518E-3	2.53E-2
1.8E1	1.537E3	0.0E0	7.27E2	5.0E2	-7.06187E-2	-8.80016E1	-9.53674E-5	-8.80002E1	2.38419E-5	5.38826E-3	9.29594E-2	2.73273E1	-3.26613E1	-3.26254E1	2.67891E1	1.7268E-8	2.51809E-3	2.51809E-3	6.31827E-3	2.50905E-2
1.9E1	2.634E3	1.0E0	7.68E2	5.29E2	-7.13143E-2	-8.80017E1	1.43051E-4	-8.80005E1	-1.19209E-4	5.4121E-3	9.31501E-2	2.73299E1	-3.26311E1	-3.26585E1	2.68344E1					
2.0E1	2.5E1	0.0E0	8.08E2	5.58E2	-7.06958E-2	-8.80017E1	-4.76837E-5	-8.80001E1	9.53674E-5	5.57899E-3	9.31263E-2	2.73423E1	-3.26756E1	-3.26119E1	2.6783E1	1.70549E-8	2.52293E-3	2.52293E-3	6.30171E-3	2.51866E-2
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.10051E-2	-8.80018E1	-2.86102E-4	-8.80001E1	2.86102E-4	5.38826E-3	9.31263E-2	2.73173E1	-3.26634E1	-3.26181E1	2.68232E1	1.72584E-8	2.51096E-3	2.51096E-3	6.31817E-3	2.50638E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.07733E-2	-8.80019E1	-1.90735E-4	-8.80001E1	1.66893E-4	5.43594E-3	9.31263E-2	2.72833E1	-3.26557E1	-3.26461E1	2.68071E1	1.72777E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.52051E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.07733E-2	-8.80018E1	-3.8147E-4	-8.80001E1	1.90735E-4	5.74589E-3	9.32693E-2	2.73326E1	-3.26772E1	-3.2641E1	2.67826E1	1.72292E-8	2.51575E-3	2.51575E-3	6.29703E-3	2.52305E-2