[Scan]
initial_time=2016-02-15T17:29:58
final_time=2016-02-15T17:30:17
ip_count=19
run=1030
dataset=1
scan=31
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.21643E-2
qbias_imon=-3.76697E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.25086E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=4.52745E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.97619E-9
ql4_vset=
ql4_vmon=8.34465E-4
ql4_imon=8.70085E-10
mult1=-1.00294E-8
mult2=-2.73258E-9
rf_tmon=-4.54247E-3
rf_agc=3.35499E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=4.48561E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05075E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=2.96937E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04646E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0473E1
cs_ea1_imon=2.49101E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01372E0
lens1_imon=1.50674E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03997E1
cs_ea2_imon=1.54759E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=2.98018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=4.29308E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=2.87134E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15474E1
os_ea1_imon=1.88934E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63461E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=1.22711E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93665E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=3.05406E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=8.10337E-10
tplens_vset=1.4E-1
tplens_vmon=1.57775E0
tplens_imon=-3.28186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26813E1
iondef2_imon=1.58076E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02977E2
lens6_imon=2.98587E-4
ql6_vset=1.0E-1
ql6_vmon=9.30548E-2
ql6_imon=4.5296E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23227E0
ionrepsh_imon=1.88105E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33808E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.43312E-1
os_ea2_imon=-6.56236E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7154E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61077E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.27747E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=2.87206E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23053E2
cs_ionfoca_imon=6.31046E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.2702E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72919E1
iondef1_imon=1.10202E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.08663E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=3.78203E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09891E0
cs_ionaccel_imon=-1.91673E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=2.2395E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86404E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.45851E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.71229E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.00789E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.67826E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3385E1
os_fil1_imon=5.7553E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.23893E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66463E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30767E1
cs_fil1_imon=9.99351E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62228E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66532E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.22848E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.87833E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.71207E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33924E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22462E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=2.51832E-2
chamber_ion_pmon=1.72103E-8
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.99536E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.282E3	1.0E0	1.47E2	4.1E1	-7.33239E-2	-8.80021E1	-2.86102E-4	-8.80002E1	4.05312E-4	4.8399E-3	9.31263E-2	2.72802E1	-3.26608E1	-3.26023E1	2.67752E1	1.71357E-8	2.52757E-3	2.52757E-3	6.31288E-3	2.52928E-2
2.0E0	2.99E3	2.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80017E1	-2.86102E-4	-8.79999E1	4.29153E-4	5.79357E-3	9.32932E-2	2.72978E1	-3.26634E1	-3.26052E1	2.68051E1	1.7207E-8	2.51847E-3	2.51847E-3	6.29665E-3	2.51066E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80017E1	-4.76837E-4	-8.80001E1	4.52995E-4	5.48363E-3	9.29832E-2	2.73116E1	-3.26337E1	-3.26561E1	2.68157E1	1.70244E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.50741E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80017E1	-5.96046E-4	-8.79999E1	4.52995E-4	5.60284E-3	9.28879E-2	2.73177E1	-3.2638E1	-3.26236E1	2.678E1	1.701E-8	2.51525E-3	2.51525E-3	6.31817E-3	2.5128E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80016E1	-5.00679E-4	-8.80005E1	1.43051E-4	5.57899E-3	9.31263E-2	2.73015E1	-3.26621E1	-3.26368E1	2.6813E1	1.70244E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.50741E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80014E1	-6.19888E-4	-8.80003E1	-1.90735E-4	5.31673E-3	9.29356E-2	2.73004E1	-3.26585E1	-3.25995E1	2.67764E1	1.72327E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.50305E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80014E1	-5.96046E-4	-8.80004E1	9.53674E-5	5.26905E-3	9.31025E-2	2.73045E1	-3.26203E1	-3.26197E1	2.67925E1	1.72511E-8	2.51525E-3	2.51525E-3	6.3074E-3	2.52354E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80015E1	-2.86102E-4	-8.80006E1	-3.09944E-4	5.4121E-3	9.3317E-2	2.72682E1	-3.26508E1	-3.26152E1	2.67914E1	1.73002E-8	2.51886E-3	2.51886E-3	6.3126E-3	2.50649E-2
1.2E1	7.3E1	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80012E1	-7.15256E-5	-8.80006E1	7.15256E-5	5.8651E-3	9.29356E-2	2.72997E1	-3.26524E1	-3.26506E1	2.68136E1	1.72525E-8	2.51527E-3	2.51527E-3	6.31321E-3	2.51536E-2
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80015E1	-5.24521E-4	-8.80004E1	2.6226E-4	5.29289E-3	9.30786E-2	2.73187E1	-3.26738E1	-3.26396E1	2.6807E1	1.73002E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.50959E-2
1.4E1	5.6E1	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80014E1	-2.14577E-4	-8.80005E1	2.38419E-5	5.79357E-3	9.3174E-2	2.72877E1	-3.2653E1	-3.26308E1	2.6801E1	1.72879E-8	2.51417E-3	2.51417E-3	6.31817E-3	2.52785E-2
1.5E1	4.7E1	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80017E1	-3.33786E-4	-8.80003E1	4.76837E-5	5.60284E-3	9.31263E-2	2.73387E1	-3.26663E1	-3.2614E1	2.67782E1	1.72852E-8	2.51552E-3	2.51552E-3	6.28552E-3	2.52489E-2
1.6E1	2.56E2	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80016E1	-2.6226E-4	-8.80001E1	2.38419E-4	5.24521E-3	9.29832E-2	2.73087E1	-3.26723E1	-3.262E1	2.68166E1	1.72702E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.51832E-2
1.7E1	3.91E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80017E1	-7.15256E-4	-8.80003E1	9.53674E-5	5.36442E-3	9.2864E-2	2.73183E1	-3.26957E1	-3.26218E1	2.67686E1	1.72702E-8	2.51334E-3	2.51334E-3	6.32386E-3	2.51832E-2
1.8E1	1.542E3	3.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80018E1	-6.67572E-4	-8.80004E1	-2.14577E-4	5.43594E-3	9.28402E-2	2.73234E1	-3.26632E1	-3.26154E1	2.67962E1	1.72552E-8	2.51443E-3	2.51443E-3	6.31837E-3	2.52051E-2
1.9E1	2.619E3	2.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80016E1	-6.67572E-4	-8.80005E1	2.14577E-4	5.48363E-3	9.2864E-2	2.73075E1	-3.26939E1	-3.2623E1	2.67956E1	1.73026E-8	2.51847E-3	2.51847E-3	6.31278E-3	2.5128E-2
2.0E1	1.7E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80015E1	-6.4373E-4	-8.80006E1	1.90735E-4	5.60284E-3	9.30309E-2	2.72997E1	-3.26506E1	-3.26128E1	2.67824E1	1.72252E-8	2.51662E-3	2.51662E-3	6.32936E-3	2.50959E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80016E1	-3.09944E-4	-8.80007E1	2.86102E-4	5.48363E-3	9.30309E-2	2.72854E1	-3.26683E1	-3.26393E1	2.6843E1	1.72927E-8	2.51225E-3	2.51225E-3	6.32386E-3	2.50523E-2
2.2E1	1.0E1	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80016E1	-2.86102E-4	-8.80004E1	4.52995E-4	5.74589E-3	9.33886E-2	2.72955E1	-3.26681E1	-3.26488E1	2.67668E1	1.72471E-8	2.51498E-3	2.51498E-3	6.31798E-3	2.5159E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.21643E-2	-8.80016E1	-2.86102E-4	-8.80002E1	8.34465E-4	5.38826E-3	9.30548E-2	2.72919E1	-3.26813E1	-3.26218E1	2.68124E1	1.72103E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.51832E-2