[Scan]
initial_time=2016-02-15T17:30:24
final_time=2016-02-15T17:30:44
ip_count=19
run=1030
dataset=1
scan=32
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.72574E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.12152E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=4.29511E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.00995E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=8.77774E-10
mult1=-9.6561E-9
mult2=-2.69067E-9
rf_tmon=-4.45835E-3
rf_agc=3.3616E-2
counter1=4
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=4.28998E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.5738E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1964E1
lens5a_imon=1.95748E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05071E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53526E1
cs_ef1b_imon=2.96612E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=2.49858E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01432E0
lens1_imon=1.47429E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04123E1
cs_ea2_imon=1.57066E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84496E1
cs_ef1a_imon=2.97802E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.23014E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=2.87314E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15185E1
os_ea1_imon=1.89295E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26291E0
cs_ionrep_imon=1.23829E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=3.05262E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=8.31604E-10
tplens_vset=1.4E-1
tplens_vmon=1.618E0
tplens_imon=-1.40728E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26579E1
iondef3_imon=1.48415E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.56562E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02956E2
lens6_imon=2.98501E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=4.80592E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28334E0
ionrepsh_imon=1.90232E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33568E1
lens5b_imon=2.17666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74531E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.75156E-1
os_ea2_imon=-3.6784E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.18236E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60176E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.30751E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10691E1
os_restr2_imon=2.86845E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.31731E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.26587E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73225E1
iondef1_imon=1.0995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67917E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.10086E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81522E-1
olens1_imon=3.99613E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10912E0
cs_ionaccel_imon=-1.99241E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02138E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=2.26953E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39062E-4
mask2_vset=0.0E0
mask2_vmon=-1.8665E1
mask2_imon=-7.31025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.55585E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.48518E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50111E3
multb_neg_imon=7.12686E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38953E0
defgridb_imon=6.2112E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33849E1
os_fil1_imon=4.90837E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.44316E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66521E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30811E1
cs_fil1_imon=9.98768E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62516E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.663E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.11859E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.4981E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22416E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.53432E-2
chamber_ion_pmon=1.70173E-8
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.73107E-1
res40_imon=-2.64833E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.211E3	1.0E0	1.47E2	4.1E1	-7.201E-2	-8.80018E1	-6.91414E-4	-8.79998E1	4.29153E-4	5.22137E-3	9.32932E-2	2.72945E1	-3.26691E1	-3.26124E1	2.6816E1	1.72028E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.51832E-2
2.0E0	3.046E3	2.0E0	3.16E2	1.6E2	-7.15461E-2	-8.80018E1	-5.24521E-4	-8.80001E1	4.05312E-4	5.22137E-3	9.31978E-2	2.73181E1	-3.26514E1	-3.26402E1	2.67972E1	1.72437E-8	2.51632E-3	2.51632E-3	6.33436E-3	2.51924E-2
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80018E1	-4.76837E-4	-8.80002E1	3.57628E-4	4.98295E-3	9.3627E-2	2.73222E1	-3.26714E1	-3.25912E1	2.68358E1	1.72143E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.51066E-2
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80018E1	9.53674E-5	-8.80002E1	2.14577E-4	5.126E-3	9.33886E-2	2.72815E1	-3.26691E1	-3.26349E1	2.67885E1	1.72658E-8	2.51739E-3	2.51739E-3	6.30202E-3	2.51066E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80019E1	-2.14577E-4	-8.80004E1	5.24521E-4	5.24521E-3	9.32932E-2	2.73087E1	-3.26543E1	-3.26368E1	2.681E1	1.72732E-8	2.51096E-3	2.51096E-3	6.31817E-3	2.51066E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.8002E1	-1.90735E-4	-8.80002E1	9.53674E-5	5.07832E-3	9.32693E-2	2.73057E1	-3.26408E1	-3.26573E1	2.67806E1	1.71953E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.52489E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80021E1	-7.15256E-5	-8.80001E1	3.33786E-4	5.17368E-3	9.32217E-2	2.73087E1	-3.26506E1	-3.26332E1	2.68052E1	1.73248E-8	2.51096E-3	2.51096E-3	6.31278E-3	2.52569E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80019E1	-3.09944E-4	-8.80001E1	3.09944E-4	5.4121E-3	9.35078E-2	2.72666E1	-3.26302E1	-3.26158E1	2.68046E1	1.72552E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.52489E-2
1.2E1	7.2E1	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80022E1	-3.57628E-4	-8.8E1	4.29153E-4	5.24521E-3	9.34124E-2	2.73051E1	-3.26591E1	-3.26182E1	2.68478E1	1.72477E-8	2.51771E-3	2.51771E-3	6.32386E-3	2.50741E-2
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.8002E1	-3.33786E-4	-8.80002E1	4.05312E-4	5.26905E-3	9.29832E-2	2.72733E1	-3.26813E1	-3.25924E1	2.68146E1	1.72627E-8	2.51662E-3	2.51662E-3	6.30192E-3	2.51832E-2
1.4E1	4.2E1	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80019E1	-3.8147E-4	-8.80001E1	2.86102E-4	5.10216E-3	9.32932E-2	2.73291E1	-3.26633E1	-3.26308E1	2.67182E1	1.72402E-8	2.51443E-3	2.51443E-3	6.32386E-3	2.51613E-2
1.5E1	4.9E1	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.8002E1	-1.66893E-4	-8.80002E1	1.90735E-4	5.36442E-3	9.33409E-2	2.73134E1	-3.26119E1	-3.26337E1	2.684E1	1.73002E-8	2.5199E-3	2.5199E-3	6.34037E-3	2.52489E-2
1.6E1	2.6E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80018E1	-3.33786E-4	-8.80003E1	3.8147E-4	5.36442E-3	9.30548E-2	2.7298E1	-3.2662E1	-3.26331E1	2.6825E1	1.72584E-8	2.52061E-3	2.52061E-3	6.32896E-3	2.51494E-2
1.7E1	3.78E2	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.8002E1	-2.14577E-4	-8.79999E1	2.14577E-4	5.72205E-3	9.3317E-2	2.72955E1	-3.27125E1	-3.26729E1	2.67908E1	1.73026E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.52354E-2
1.8E1	1.568E3	1.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80018E1	-1.66893E-4	-8.8E1	-1.19209E-4	5.67436E-3	9.30548E-2	2.73207E1	-3.26585E1	-3.26284E1	2.67734E1	1.72252E-8	2.51552E-3	2.51552E-3	6.33486E-3	2.51613E-2
1.9E1	2.661E3	2.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80019E1	-1.19209E-4	-8.79999E1	-1.66893E-4	5.55515E-3	9.29832E-2	2.73189E1	-3.26819E1	-3.26224E1	2.68082E1	1.72627E-8	2.51116E-3	2.51116E-3	6.34037E-3	2.51832E-2
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80019E1	-4.05312E-4	-8.79998E1	7.15256E-5	5.29289E-3	9.31263E-2	2.72703E1	-3.26366E1	-3.26366E1	2.67671E1	1.72627E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.51395E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80017E1	-4.76837E-4	-8.8E1	3.09944E-4	5.31673E-3	9.31263E-2	2.73123E1	-3.26639E1	-3.26296E1	2.68196E1	1.72658E-8	2.52061E-3	2.52061E-3	6.3074E-3	2.52569E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80017E1	-4.05312E-4	-8.79998E1	9.53674E-5	5.60284E-3	9.33409E-2	2.73045E1	-3.26561E1	-3.2613E1	2.68076E1	1.70244E-8	2.52099E-3	2.52099E-3	6.31288E-3	2.52489E-2
2.3E1	4.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80016E1	-5.48363E-4	-8.79999E1	3.09944E-4	5.34058E-3	9.30309E-2	2.73225E1	-3.26549E1	-3.26579E1	2.67917E1	1.70173E-8	2.52384E-3	2.52384E-3	6.3074E-3	2.53432E-2