[Scan]
initial_time=2016-02-15T17:30:51
final_time=2016-02-15T17:31:10
ip_count=19
run=1030
dataset=1
scan=33
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.77533E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.34515E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=4.40431E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.0052E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=8.86977E-10
mult1=-9.63202E-9
mult2=-2.71262E-9
rf_tmon=-5.91836E-3
rf_agc=3.28049E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=4.4508E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65773E0
bslens_imon=2.73963E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19803E1
lens5a_imon=1.98992E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05151E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=2.95927E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02388E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05108E1
cs_ea1_imon=2.48092E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03475E0
lens1_imon=1.51395E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64452E1
os_ef1alow_imon=2.98919E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03648E1
cs_ea2_imon=1.55805E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.98126E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=4.26984E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=2.86593E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15522E1
os_ea1_imon=1.88285E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08649E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2539E0
cs_ionrep_imon=1.22747E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01791E1
cs_anode1_imon=3.05442E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=8.04305E-10
tplens_vset=1.4E-1
tplens_vmon=1.62581E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26194E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.5822E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02981E2
lens6_imon=2.98504E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=4.48978E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24969E0
ionrepsh_imon=1.87492E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33688E1
lens5b_imon=2.18891E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.12037E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.67946E-1
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06143E2
lens4b_imon=2.00695E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59876E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.40962E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=2.86449E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.31947E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.25398E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.08183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67595E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=2.08414E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.69465E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13435E0
cs_ionaccel_imon=-1.93115E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.51125E-6
window_vset=0.0E0
window_vmon=2.22749E-1
window_imon=-8.3554E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39008E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-5.58035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=8.01368E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.36261E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.2314E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46472E0
defgridb_imon=6.20038E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33859E1
os_fil1_imon=4.91437E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.28098E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66428E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30768E1
cs_fil1_imon=9.97753E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62246E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66705E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=8.65919E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87963E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.19338E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22336E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.51832E-2
chamber_ion_pmon=1.70096E-8
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.19959E-1
res40_imon=-2.706E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.264E3	1.0E0	1.47E2	4.1E1	-7.201E-2	-8.80016E1	0.0E0	-8.80003E1	-1.90735E-4	5.45979E-3	9.36508E-2	2.73139E1	-3.2659E1	-3.26083E1	2.6804E1	1.70092E-8	2.52362E-3	2.52362E-3	6.29624E-3	2.52407E-2
2.0E0	3.044E3	2.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80015E1	-2.14577E-4	-8.8E1	1.43051E-4	5.53131E-3	9.31978E-2	2.7291E1	-3.2667E1	-3.2637E1	2.67926E1	1.70827E-8	2.51847E-3	2.51847E-3	6.32356E-3	2.51494E-2
3.0E0	7.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80016E1	-3.09944E-4	-8.80003E1	2.38419E-4	5.19753E-3	9.35316E-2	2.72941E1	-3.26834E1	-3.26034E1	2.67932E1	1.70998E-8	2.51915E-3	2.51915E-3	6.30182E-3	2.5196E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80019E1	-5.00679E-4	-8.80001E1	3.09944E-4	5.55515E-3	9.35078E-2	2.73074E1	-3.2655E1	-3.26382E1	2.67821E1	1.70818E-8	2.51287E-3	2.51287E-3	6.32858E-3	2.52858E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80015E1	-4.29153E-4	-8.80002E1	-2.38419E-5	5.45979E-3	9.31978E-2	2.73082E1	-3.2684E1	-3.26067E1	2.68225E1	1.70318E-8	2.52236E-3	2.52236E-3	6.32328E-3	2.52858E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80018E1	-4.29153E-4	-8.80001E1	9.53674E-5	5.67436E-3	9.32932E-2	2.72877E1	-3.26633E1	-3.26038E1	2.6792E1	1.70318E-8	2.51838E-3	2.51838E-3	6.3074E-3	2.50959E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.8002E1	-9.53674E-5	-8.80003E1	2.38419E-4	5.126E-3	9.31263E-2	2.72862E1	-3.26673E1	-3.26231E1	2.68047E1	1.72103E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.51177E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13143E-2	-8.80021E1	-7.15256E-5	-8.80004E1	1.90735E-4	5.26905E-3	9.3317E-2	2.73111E1	-3.26494E1	-3.26242E1	2.67704E1	1.7163E-8	2.51847E-3	2.51847E-3	6.29665E-3	2.5128E-2
1.2E1	7.2E1	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.8002E1	-4.29153E-4	-8.79998E1	-2.38419E-5	5.74589E-3	9.32455E-2	2.73021E1	-3.2653E1	-3.26422E1	2.68118E1	1.72028E-8	2.51662E-3	2.51662E-3	6.28552E-3	2.51395E-2
1.3E1	1.0E1	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80019E1	-5.24521E-4	-8.80002E1	-1.66893E-4	5.53131E-3	9.3317E-2	2.72903E1	-3.26885E1	-3.26307E1	2.684E1	1.72103E-8	2.51225E-3	2.51225E-3	6.34037E-3	2.52489E-2
1.4E1	5.1E1	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80018E1	-4.76837E-4	-8.80001E1	-7.15256E-5	5.60284E-3	9.32455E-2	2.73027E1	-3.26603E1	-3.26092E1	2.67577E1	1.72879E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.53649E-2
1.5E1	4.6E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80018E1	-7.15256E-4	-8.80002E1	1.90735E-4	5.31673E-3	9.29594E-2	2.73128E1	-3.26543E1	-3.26708E1	2.68018E1	1.72552E-8	2.5199E-3	2.5199E-3	6.29645E-3	2.52051E-2
1.6E1	2.61E2	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80021E1	-4.29153E-4	-8.8E1	-7.15256E-5	5.4121E-3	9.30548E-2	2.73241E1	-3.2637E1	-3.26174E1	2.67812E1	1.72364E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.52569E-2
1.7E1	3.71E2	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80019E1	-3.33786E-4	-8.80002E1	1.90735E-4	5.72205E-3	9.31025E-2	2.73558E1	-3.26885E1	-3.25304E1	2.6801E1	1.71282E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.50305E-2
1.8E1	1.54E3	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80017E1	-1.43051E-4	-8.79999E1	9.53674E-5	5.07832E-3	9.31978E-2	2.73213E1	-3.2653E1	-3.26188E1	2.67974E1	1.7158E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.51395E-2
1.9E1	2.629E3	1.0E0	7.68E2	5.29E2	-7.22418E-2	-8.8002E1	-3.8147E-4	-8.79998E1	1.66893E-4	5.34058E-3	9.30071E-2	2.73051E1	-3.26957E1	-3.26068E1	2.67884E1	1.71879E-8	2.51771E-3	2.51771E-3	6.29098E-3	2.52489E-2
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80019E1	-4.76837E-4	-8.79996E1	-2.38419E-5	5.05447E-3	9.3174E-2	2.73033E1	-3.26639E1	-3.26434E1	2.68605E1	1.70837E-8	2.52099E-3	2.52099E-3	6.34037E-3	2.52051E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80018E1	-2.14577E-4	-8.79996E1	2.38419E-4	5.07832E-3	9.32455E-2	2.72986E1	-3.26561E1	-3.26443E1	2.67806E1	1.69955E-8	2.51739E-3	2.51739E-3	6.30202E-3	2.50852E-2
2.2E1	1.2E1	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80018E1	7.15256E-5	-8.79997E1	1.19209E-4	5.4121E-3	9.32455E-2	2.73243E1	-3.26939E1	-3.2602E1	2.67601E1	1.70244E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.51613E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80018E1	-3.8147E-4	-8.8E1	2.14577E-4	5.10216E-3	9.31025E-2	2.72967E1	-3.26591E1	-3.26194E1	2.67595E1	1.70096E-8	2.52209E-3	2.52209E-3	6.30192E-3	2.51832E-2