[Scan]
initial_time=2016-02-15T17:31:17
final_time=2016-02-15T17:31:37
ip_count=19
run=1030
dataset=1
scan=34
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.70327E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-6.39713E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=4.52101E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.05307E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=9.28783E-10
mult1=-9.71215E-9
mult2=-2.76833E-9
rf_tmon=-5.20556E-3
rf_agc=3.21588E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=4.37152E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.56449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20001E1
lens5a_imon=1.99182E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05132E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=2.97244E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.049E1
cs_ea1_imon=2.48769E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01354E0
lens1_imon=1.49559E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64684E1
os_ef1alow_imon=2.98252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03891E1
cs_ea2_imon=1.56674E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84354E1
cs_ef1a_imon=2.98148E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.35841E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11309E1
os_restr1_imon=2.88452E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=1.90015E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63682E1
os_ef1bup_imon=3.08852E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26508E0
cs_ionrep_imon=1.20713E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93639E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01705E1
cs_anode1_imon=3.05446E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=8.28612E-10
tplens_vset=1.4E-1
tplens_vmon=1.59601E0
tplens_imon=-3.97991E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26301E1
iondef3_imon=1.50338E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26478E1
iondef2_imon=1.57488E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02999E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.55201E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27156E0
ionrepsh_imon=1.8867E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34106E1
lens5b_imon=2.18861E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74472E1
cs_ef2b_imon=3.11527E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.62833E-1
os_ea2_imon=-4.36924E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00623E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7113E1
cs_ef2a_imon=3.18652E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62797E0
os_ef2alow_imon=-2.53288E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.54949E-1
os_ef2bup_imon=-5.26095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=2.86332E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.30919E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01612E1
cs_anode2_imon=2.26384E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67648E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.07856E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=3.87621E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11161E0
cs_ionaccel_imon=-1.91081E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47188E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56127E1
einzel_imon=7.7782E-6
window_vset=0.0E0
window_vmon=1.93359E-1
window_imon=-1.1393E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39188E-4
mask2_vset=0.0E0
mask2_vmon=-1.86448E1
mask2_imon=-6.56243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92602E3
multa_neg_imon=7.84883E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=7.10556E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=7.17634E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=6.14284E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33858E1
os_fil1_imon=4.83736E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.83766E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66209E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30763E1
cs_fil1_imon=9.99264E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62285E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66443E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17994E-2
os_fil2_imon=-2.62285E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.24978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61671E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32648E-1
cs_fil2_imon=-2.33904E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06671E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22404E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.51924E-2
chamber_ion_pmon=1.69738E-8
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.24078E-1
res40_imon=-2.58848E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.194E3	2.0E0	1.47E2	4.1E1	-7.16233E-2	-8.80018E1	-4.05312E-4	-8.80001E1	4.05312E-4	5.26905E-3	9.32217E-2	2.7285E1	-3.26638E1	-3.26183E1	2.67824E1	1.70391E-8	2.51847E-3	2.51847E-3	6.3074E-3	2.52354E-2
2.0E0	2.978E3	5.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80019E1	-4.52995E-4	-8.80002E1	4.76837E-5	5.126E-3	9.30309E-2	2.72971E1	-3.2667E1	-3.2604E1	2.68256E1	1.70173E-8	2.51739E-3	2.51739E-3	6.3074E-3	2.52139E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80019E1	-4.05312E-4	-8.8E1	0.0E0	5.19753E-3	9.30786E-2	2.73299E1	-3.26703E1	-3.26272E1	2.68046E1	1.70243E-8	2.52139E-3	2.52139E-3	6.31299E-3	2.53526E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80018E1	-2.6226E-4	-8.8E1	-2.14577E-4	5.88894E-3	9.2864E-2	2.73105E1	-3.26651E1	-3.26152E1	2.67734E1	1.70173E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.51924E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80016E1	-7.15256E-5	-8.80002E1	7.15256E-5	5.57899E-3	9.29117E-2	2.73081E1	-3.2638E1	-3.2641E1	2.68058E1	1.72103E-8	2.51662E-3	2.51662E-3	6.33486E-3	2.52489E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80018E1	-2.86102E-4	-8.79999E1	2.14577E-4	5.14984E-3	9.3174E-2	2.72996E1	-3.26701E1	-3.26376E1	2.68244E1	1.72028E-8	2.5188E-3	2.5188E-3	6.31288E-3	2.52051E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80019E1	-5.00679E-4	-8.79999E1	1.43051E-4	5.50747E-3	9.30071E-2	2.72805E1	-3.26573E1	-3.2611E1	2.68094E1	1.729E-8	2.51581E-3	2.51581E-3	6.30182E-3	2.5196E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80021E1	-6.19888E-4	-8.8E1	-9.53674E-5	5.31673E-3	9.3174E-2	2.73117E1	-3.26573E1	-3.25984E1	2.67637E1	1.72702E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.51832E-2
1.2E1	6.4E1	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.8002E1	-9.29832E-4	-8.8E1	-9.53674E-5	5.19753E-3	9.32932E-2	2.72892E1	-3.26372E1	-3.25853E1	2.68394E1	1.72658E-8	2.51739E-3	2.51739E-3	6.31817E-3	2.52354E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80019E1	-8.34465E-4	-8.8E1	0.0E0	5.36442E-3	9.31263E-2	2.73128E1	-3.26744E1	-3.26148E1	2.67491E1	1.70096E-8	2.51443E-3	2.51443E-3	6.29098E-3	2.52489E-2
1.4E1	4.5E1	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80014E1	-9.29832E-4	-8.80003E1	4.05312E-4	5.48363E-3	9.33647E-2	2.73449E1	-3.26517E1	-3.26425E1	2.68107E1	1.71923E-8	2.51739E-3	2.51739E-3	6.29665E-3	2.52785E-2
1.5E1	4.1E1	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80021E1	-6.91414E-4	-8.80003E1	2.38419E-5	5.4121E-3	9.29594E-2	2.73099E1	-3.26651E1	-3.26356E1	2.67662E1	1.72976E-8	2.52139E-3	2.52139E-3	6.33538E-3	2.52854E-2
1.6E1	2.43E2	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80021E1	-9.77516E-4	-8.80006E1	2.38419E-5	5.57899E-3	9.30786E-2	2.72805E1	-3.26518E1	-3.26428E1	2.67763E1	1.70392E-8	2.5199E-3	2.5199E-3	6.29098E-3	2.52489E-2
1.7E1	3.8E2	1.0E0	6.87E2	4.7E2	-7.23964E-2	-8.8002E1	-5.48363E-4	-8.80004E1	-4.76837E-5	5.57899E-3	9.32217E-2	2.73159E1	-3.26705E1	-3.26068E1	2.68229E1	1.70754E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.53432E-2
1.8E1	1.462E3	1.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80021E1	-3.8147E-4	-8.80002E1	5.96046E-4	5.79357E-3	9.30786E-2	2.73393E1	-3.26714E1	-3.26555E1	2.67386E1	1.71804E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.5227E-2
1.9E1	2.732E3	4.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80019E1	-5.00679E-4	-8.80004E1	3.57628E-4	5.43594E-3	9.30071E-2	2.72913E1	-3.26536E1	-3.26458E1	2.68076E1	1.70096E-8	2.51771E-3	2.51771E-3	6.29098E-3	2.52709E-2
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80021E1	-2.6226E-4	-8.80002E1	7.15256E-5	5.45979E-3	9.31978E-2	2.72006E1	-3.25407E1	-3.26639E1	2.67962E1	1.70023E-8	2.5199E-3	2.5199E-3	6.32936E-3	2.52051E-2
2.1E1	0.0E0	1.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80021E1	-5.72205E-4	-8.80002E1	2.6226E-4	5.55515E-3	9.32693E-2	2.72985E1	-3.26771E1	-3.2626E1	2.68436E1	1.70023E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.52051E-2
2.2E1	7.0E0	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.8002E1	-4.76837E-4	-8.80003E1	3.33786E-4	5.29289E-3	9.32932E-2	2.73069E1	-3.26508E1	-3.26278E1	2.6804E1	1.70096E-8	2.52428E-3	2.52428E-3	6.3074E-3	2.51613E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80022E1	-8.10623E-4	-8.80002E1	2.86102E-4	5.26905E-3	9.33886E-2	2.73063E1	-3.26478E1	-3.26301E1	2.67648E1	1.69738E-8	2.52492E-3	2.52492E-3	6.29128E-3	2.51924E-2