[Scan]
initial_time=2016-02-15T17:31:44
final_time=2016-02-15T17:32:04
ip_count=19
run=1030
dataset=1
scan=35
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.79065E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.40631E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=4.17435E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.98277E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=8.80873E-10
mult1=-9.99052E-9
mult2=-2.7382E-9
rf_tmon=-3.97066E-3
rf_agc=3.30651E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=4.61829E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.60625E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19989E1
lens5a_imon=1.97586E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05161E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=2.97621E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02143E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0506E1
cs_ea1_imon=2.48668E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00891E0
lens1_imon=1.48511E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0384E1
cs_ea2_imon=1.5685E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.98847E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=4.36807E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=2.86593E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15498E1
os_ea1_imon=1.89547E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24429E0
cs_ionrep_imon=1.22675E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93391E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01749E1
cs_anode1_imon=3.05622E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=7.79819E-10
tplens_vset=1.4E-1
tplens_vmon=1.60298E0
tplens_imon=-1.04678E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26474E1
iondef3_imon=1.48595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26542E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.9849E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.65119E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=1.89799E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74579E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.52925E-1
os_ea2_imon=-4.72384E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.17695E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.63119E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.31351E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11159E1
os_restr2_imon=2.86377E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.27308E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73314E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.08794E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=3.27229E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10071E0
cs_ionaccel_imon=-1.95998E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56279E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=2.26352E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86572E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.44409E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.5753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.00068E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.29411E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33851E1
os_fil1_imon=4.83028E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.18487E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66335E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30778E1
cs_fil1_imon=9.98336E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61345E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6655E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.65996E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.31661E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77265E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.08333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.68282E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32273E-3
inlet_lpb_pmon=2.52997E-2
chamber_ion_pmon=1.70112E-8
chamber_cvt_pmon=2.5165E-3
foreline_cvt_pmon=2.5165E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.76421E-1
res40_imon=-2.62311E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.184E3	3.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80019E1	-7.15256E-4	-8.80001E1	5.24521E-4	5.60284E-3	9.34839E-2	2.73098E1	-3.2685E1	-3.26349E1	2.68516E1	1.70096E-8	2.51771E-3	2.51771E-3	6.34588E-3	2.51177E-2
2.0E0	3.107E3	4.0E0	3.16E2	1.6E2	-7.24736E-2	-8.8002E1	-4.76837E-4	-8.80003E1	4.76837E-4	5.55515E-3	9.32217E-2	2.73185E1	-3.26551E1	-3.26267E1	2.67987E1	1.69883E-8	2.52384E-3	2.52384E-3	6.33977E-3	2.50424E-2
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80019E1	-7.39098E-4	-8.80002E1	5.48363E-4	5.14984E-3	9.31263E-2	2.72762E1	-3.27027E1	-3.25883E1	2.67955E1	1.71717E-8	2.51925E-3	2.51925E-3	6.31519E-3	2.51967E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.80021E1	-7.86781E-4	-8.80003E1	3.33786E-4	5.07832E-3	9.33647E-2	2.72961E1	-3.26188E1	-3.26122E1	2.67812E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80018E1	-7.86781E-4	-8.80001E1	1.90735E-4	5.126E-3	9.30309E-2	2.72929E1	-3.26413E1	-3.26181E1	2.68172E1	1.71953E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.52489E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13143E-2	-8.80022E1	-5.24521E-4	-8.80004E1	4.05312E-4	5.19753E-3	9.30071E-2	2.73069E1	-3.26549E1	-3.26413E1	2.67902E1	1.70985E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.52051E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.8002E1	-8.34465E-4	-8.80004E1	1.43051E-4	5.05447E-3	9.30071E-2	2.73186E1	-3.26223E1	-3.26499E1	2.6816E1	1.70911E-8	2.51552E-3	2.51552E-3	6.35692E-3	2.5227E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.8002E1	-5.96046E-4	-8.80002E1	5.00679E-4	5.24521E-3	9.3317E-2	2.72662E1	-3.26602E1	-3.2626E1	2.67776E1	1.72777E-8	2.50898E-3	2.50898E-3	6.28006E-3	2.52051E-2
1.2E1	9.6E1	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80019E1	-5.24521E-4	-8.80003E1	3.33786E-4	5.05447E-3	9.3174E-2	2.73008E1	-3.26517E1	-3.26456E1	2.67986E1	1.72177E-8	2.5199E-3	2.5199E-3	6.33486E-3	2.52051E-2
1.3E1	8.0E0	1.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80017E1	-9.77516E-4	-8.80002E1	1.43051E-4	5.43594E-3	9.31025E-2	2.73128E1	-3.26649E1	-3.26614E1	2.68316E1	1.73002E-8	2.51334E-3	2.51334E-3	6.29645E-3	2.53148E-2
1.4E1	4.0E1	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.8002E1	-8.34465E-4	-8.80003E1	4.76837E-4	5.43594E-3	9.32217E-2	2.73147E1	-3.26777E1	-3.26386E1	2.67644E1	1.73077E-8	2.52318E-3	2.52318E-3	6.33486E-3	2.51177E-2
1.5E1	3.5E1	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80022E1	-6.19888E-4	-8.80001E1	3.09944E-4	5.36442E-3	9.29832E-2	2.72991E1	-3.26392E1	-3.2626E1	2.67914E1	1.72402E-8	2.5188E-3	2.5188E-3	6.28552E-3	2.52489E-2
1.6E1	2.57E2	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80018E1	-5.24521E-4	-8.80002E1	3.33786E-4	5.45979E-3	9.30786E-2	2.73225E1	-3.26891E1	-3.26452E1	2.6807E1	1.70985E-8	2.52099E-3	2.52099E-3	6.30192E-3	2.5227E-2
1.7E1	3.64E2	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80019E1	-4.29153E-4	-8.80002E1	2.14577E-4	5.43594E-3	9.31263E-2	2.73075E1	-3.26695E1	-3.26321E1	2.6807E1	1.69949E-8	2.5188E-3	2.5188E-3	6.29098E-3	2.51395E-2
1.8E1	1.516E3	0.0E0	7.27E2	5.0E2	-7.14689E-2	-8.80019E1	-6.19888E-4	-8.80001E1	1.19209E-4	5.45979E-3	9.3174E-2	2.73028E1	-3.26408E1	-3.26345E1	2.68314E1	1.70244E-8	2.52209E-3	2.52209E-3	6.3074E-3	2.52051E-2
1.9E1	2.722E3	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80021E1	-5.00679E-4	-8.8E1	2.6226E-4	5.36442E-3	9.30786E-2	2.73153E1	-3.26729E1	-3.26104E1	2.67842E1	1.70176E-8	2.52342E-3	2.52342E-3	6.2863E-3	2.51169E-2
2.0E1	2.1E1	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80022E1	-4.76837E-4	-8.80004E1	-1.19209E-4	5.14984E-3	9.32455E-2	2.73251E1	-3.26923E1	-3.26222E1	2.67867E1	1.7017E-8	2.52318E-3	2.52318E-3	6.31288E-3	2.52928E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80018E1	-2.86102E-4	-8.80003E1	-1.43051E-4	5.126E-3	9.30309E-2	2.73097E1	-3.26373E1	-3.2634E1	2.68095E1	1.70025E-8	2.51498E-3	2.51498E-3	6.31176E-3	2.5287E-2
2.2E1	1.7E1	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80022E1	-5.72205E-4	-8.80001E1	-9.53674E-5	5.29289E-3	9.29832E-2	2.73264E1	-3.26624E1	-3.2612E1	2.67903E1	1.6983E-8	2.52191E-3	2.52191E-3	6.32555E-3	2.53009E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.8002E1	-2.14577E-4	-8.80003E1	0.0E0	5.48363E-3	9.30786E-2	2.73314E1	-3.26542E1	-3.26474E1	2.68076E1	1.70112E-8	2.5165E-3	2.5165E-3	6.32273E-3	2.52997E-2