[Scan]
initial_time=2016-02-15T17:32:11
final_time=2016-02-15T17:32:30
ip_count=19
run=1030
dataset=1
scan=36
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.82487E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.51407E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=4.56929E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.0303E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=9.18412E-10
mult1=-9.70033E-9
mult2=-2.80361E-9
rf_tmon=-6.58003E-3
rf_agc=3.19169E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.48363E-3
ql5_imon=4.09341E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6323E0
bslens_imon=2.56871E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19801E1
lens5a_imon=2.00015E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.05154E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5325E1
cs_ef1b_imon=2.9696E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02292E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04971E1
cs_ea1_imon=2.4979E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03263E0
lens1_imon=1.39734E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64642E1
os_ef1alow_imon=2.97833E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03729E1
cs_ea2_imon=1.56551E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=2.98772E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=4.08113E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11101E1
os_restr1_imon=2.86189E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15361E1
os_ea1_imon=1.87798E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63445E1
os_ef1bup_imon=3.09409E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23644E0
cs_ionrep_imon=1.23457E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.9346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=3.05584E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2057E0
olens4_imon=7.92921E-10
tplens_vset=1.4E-1
tplens_vmon=1.60172E0
tplens_imon=-3.41238E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25894E1
iondef3_imon=1.49569E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26744E1
iondef2_imon=1.58128E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02968E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=4.38416E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25937E0
ionrepsh_imon=1.8961E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3368E1
lens5b_imon=2.20321E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74652E1
cs_ef2b_imon=3.12462E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.56944E-1
os_ea2_imon=-3.37882E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00448E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71079E1
cs_ef2a_imon=3.18468E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62554E0
os_ef2alow_imon=-2.5596E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.48398E-1
os_ef2bup_imon=-5.33789E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=2.8582E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.31539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01547E1
cs_anode2_imon=2.25658E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7301E1
iondef1_imon=1.10502E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6816E1
iondef4_imon=1.08621E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.01501E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=4.09234E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09994E0
cs_ionaccel_imon=-1.84825E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.4729E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56293E1
einzel_imon=7.61402E-6
window_vset=0.0E0
window_vmon=2.15768E-1
window_imon=-1.12684E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39262E-4
mask2_vset=0.0E0
mask2_vmon=-1.86478E1
mask2_imon=-5.46353E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.4421E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.63994E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=6.99907E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58191E0
defgridb_imon=6.26067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33849E1
os_fil1_imon=4.37419E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.47795E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66286E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30788E1
cs_fil1_imon=1.00039E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62612E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66462E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33255E-2
os_fil2_imon=-2.44849E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=5.7698E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76318E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32545E-1
cs_fil2_imon=-2.09058E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02996E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22334E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.52928E-2
chamber_ion_pmon=1.7017E-8
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.30812E-1
res40_imon=-2.67369E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=251
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.235E3	0.0E0	1.47E2	4.1E1	-7.37103E-2	-8.80017E1	-7.15256E-4	-8.80003E1	-1.19209E-4	5.50747E-3	9.35793E-2	2.7287E1	-3.26535E1	-3.26329E1	2.68114E1	1.71077E-8	2.52466E-3	2.52466E-3	6.32273E-3	2.52383E-2
2.0E0	3.024E3	0.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80019E1	-3.8147E-4	-8.8E1	2.38419E-4	5.26905E-3	9.31025E-2	2.73228E1	-3.26566E1	-3.26229E1	2.6801E1	1.70083E-8	2.52918E-3	2.52918E-3	6.32483E-3	2.52231E-2
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80017E1	-4.76837E-4	-8.80002E1	1.43051E-4	4.98295E-3	9.29117E-2	2.73057E1	-3.26408E1	-3.26296E1	2.68076E1	1.70469E-8	2.52027E-3	2.52027E-3	6.32978E-3	2.52183E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80015E1	-6.91414E-4	-8.80002E1	2.38419E-5	5.26905E-3	9.34601E-2	2.73213E1	-3.26536E1	-3.26104E1	2.68169E1	1.701E-8	2.52061E-3	2.52061E-3	6.31817E-3	2.52139E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80019E1	-8.34465E-4	-8.79998E1	1.43051E-4	4.98295E-3	9.30309E-2	2.72961E1	-3.26621E1	-3.2611E1	2.67992E1	1.70318E-8	2.51632E-3	2.51632E-3	6.32356E-3	2.53E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.8002E1	-3.8147E-4	-8.80002E1	3.33786E-4	5.36442E-3	9.31025E-2	2.72797E1	-3.26526E1	-3.26225E1	2.68244E1	1.72252E-8	2.51116E-3	2.51116E-3	6.30192E-3	2.52928E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80019E1	-4.52995E-4	-8.79999E1	1.90735E-4	5.10216E-3	9.29356E-2	2.72898E1	-3.26517E1	-3.25917E1	2.6822E1	1.72103E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.52709E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80018E1	-6.4373E-4	-8.79999E1	0.0E0	5.03063E-3	9.34362E-2	2.7301E1	-3.26638E1	-3.26077E1	2.67926E1	1.70466E-8	2.5188E-3	2.5188E-3	6.3074E-3	2.51613E-2
1.2E1	6.9E1	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80016E1	-5.96046E-4	-8.8E1	-1.90735E-4	4.86374E-3	9.31025E-2	2.72935E1	-3.26591E1	-3.26132E1	2.68363E1	1.70244E-8	2.51662E-3	2.51662E-3	6.31837E-3	2.51832E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.42513E-2	-8.80015E1	-4.76837E-4	-8.80001E1	-3.09944E-4	5.00679E-3	9.30071E-2	2.72871E1	-3.26771E1	-3.25948E1	2.67607E1	1.69942E-8	2.52027E-3	2.52027E-3	6.32418E-3	2.51292E-2
1.4E1	5.1E1	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80017E1	-5.00679E-4	-8.80002E1	1.90735E-4	5.38826E-3	9.34362E-2	2.72991E1	-3.26795E1	-3.26236E1	2.68076E1	1.70318E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.52928E-2
1.5E1	4.1E1	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80018E1	-6.67572E-4	-8.80003E1	4.76837E-5	5.38826E-3	9.33409E-2	2.72847E1	-3.26771E1	-3.26452E1	2.68094E1	1.69949E-8	2.51662E-3	2.51662E-3	6.33486E-3	2.50523E-2
1.6E1	2.5E2	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80016E1	-5.48363E-4	-8.8E1	-7.15256E-5	5.29289E-3	9.34839E-2	2.73075E1	-3.26467E1	-3.26236E1	2.68192E1	1.70096E-8	2.52977E-3	2.52977E-3	6.31288E-3	2.52051E-2
1.7E1	3.6E2	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80017E1	-6.19888E-4	-8.79997E1	-1.43051E-4	5.62668E-3	9.32217E-2	2.73155E1	-3.26836E1	-3.26132E1	2.67469E1	1.70104E-8	2.51919E-3	2.51919E-3	6.32858E-3	2.52435E-2
1.8E1	1.481E3	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80018E1	-4.76837E-4	-8.80003E1	4.76837E-5	5.74589E-3	9.29117E-2	2.73135E1	-3.26404E1	-3.2614E1	2.67355E1	1.70243E-8	2.52473E-3	2.52473E-3	6.29624E-3	2.52854E-2
1.9E1	2.551E3	2.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80018E1	-5.00679E-4	-8.8E1	2.14577E-4	5.65052E-3	9.31263E-2	2.73159E1	-3.26747E1	-3.26212E1	2.68394E1	1.70244E-8	2.52428E-3	2.52428E-3	6.33486E-3	2.52489E-2
2.0E1	2.4E1	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.8002E1	-4.76837E-4	-8.80001E1	1.90735E-4	5.53131E-3	9.35316E-2	2.72889E1	-3.26543E1	-3.26603E1	2.67992E1	1.69942E-8	2.51804E-3	2.51804E-3	6.3074E-3	2.5263E-2
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80019E1	-3.8147E-4	-8.80001E1	3.33786E-4	5.91278E-3	9.33647E-2	2.73119E1	-3.26562E1	-3.26226E1	2.67763E1	1.70246E-8	2.52707E-3	2.52707E-3	6.29665E-3	2.51924E-2
2.2E1	6.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.8002E1	-6.67572E-4	-8.80001E1	0.0E0	5.8651E-3	9.35316E-2	2.73357E1	-3.26817E1	-3.2626E1	2.67794E1	1.70176E-8	2.52765E-3	2.52765E-3	6.31269E-3	2.50329E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80018E1	-4.05312E-4	-8.8E1	0.0E0	5.48363E-3	9.34362E-2	2.7301E1	-3.26744E1	-3.25894E1	2.6816E1	1.7017E-8	2.52647E-3	2.52647E-3	6.32386E-3	2.52928E-2