[Scan]
initial_time=2016-02-15T17:32:37
final_time=2016-02-15T17:32:57
ip_count=19
run=1030
dataset=1
scan=37
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.76414E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.46043E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=4.15778E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.01542E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=8.84628E-10
mult1=-9.60575E-9
mult2=-2.6625E-9
rf_tmon=-5.25865E-3
rf_agc=3.3026E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=4.35209E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66397E0
bslens_imon=2.72585E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20054E1
lens5a_imon=1.99296E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12503E2
lens4a_imon=2.0509E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=2.97982E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02264E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04808E1
cs_ea1_imon=2.49006E-5
lens1_vset=-2.7E0
lens1_vmon=-2.9902E0
lens1_imon=1.48485E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0398E1
cs_ea2_imon=1.57095E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=2.99243E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=4.45068E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=2.8598E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15618E1
os_ea1_imon=1.88833E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.09767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26021E0
cs_ionrep_imon=1.22089E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.93486E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=3.04108E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=8.11672E-10
tplens_vset=1.4E-1
tplens_vmon=1.64027E0
tplens_imon=-2.63683E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26231E1
iondef3_imon=1.4983E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2639E1
iondef2_imon=1.5859E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98534E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=4.87137E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25963E0
ionrepsh_imon=1.89354E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33715E1
lens5b_imon=2.18832E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74489E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.49213E-1
os_ea2_imon=-5.07017E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0611E2
lens4b_imon=2.00598E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.17515E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61798E0
os_ef2alow_imon=-2.44651E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52374E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10589E1
os_restr2_imon=2.86593E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.31597E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01623E1
cs_anode2_imon=2.25578E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7308E1
iondef1_imon=1.0888E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67812E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.07225E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81498E-1
olens1_imon=3.12221E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0935E0
cs_ionaccel_imon=-2.03566E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56327E1
einzel_imon=7.57972E-6
window_vset=0.0E0
window_vmon=1.91514E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39001E-4
mask2_vset=0.0E0
mask2_vmon=-1.86536E1
mask2_imon=-5.07579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.58906E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.66092E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.3214E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3978E0
defgridb_imon=6.23682E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33848E1
os_fil1_imon=5.26276E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.46718E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66278E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30764E1
cs_fil1_imon=9.98221E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62996E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66466E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2575E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=9.56018E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8069E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33536E-1
cs_fil2_imon=-2.5999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22326E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28056E-3
inlet_lpb_pmon=2.52354E-2
chamber_ion_pmon=1.71338E-8
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.30771E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.154E3	1.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80019E1	-3.8147E-4	-8.80002E1	2.14577E-4	5.38826E-3	9.36747E-2	2.72829E1	-3.26705E1	-3.26368E1	2.67943E1	1.72732E-8	2.51203E-3	2.51203E-3	6.3074E-3	2.5021E-2
2.0E0	2.967E3	3.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80022E1	-1.66893E-4	-8.8E1	1.43051E-4	5.36442E-3	9.35078E-2	2.73075E1	-3.26518E1	-3.26488E1	2.67812E1	1.71777E-8	2.52169E-3	2.52169E-3	6.31817E-3	2.51924E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80022E1	-4.76837E-4	-8.79999E1	-2.38419E-5	5.8651E-3	9.32217E-2	2.7308E1	-3.26644E1	-3.26632E1	2.67842E1	1.71804E-8	2.5188E-3	2.5188E-3	6.31837E-3	2.51613E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.13143E-2	-8.8002E1	-5.24521E-4	-8.79999E1	-4.76837E-5	5.91278E-3	9.35078E-2	2.72957E1	-3.2672E1	-3.26242E1	2.67806E1	1.7229E-8	2.51632E-3	2.51632E-3	6.31278E-3	2.51924E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17007E-2	-8.80019E1	-4.76837E-4	-8.80001E1	1.90735E-4	5.48363E-3	9.31025E-2	2.73106E1	-3.26646E1	-3.26303E1	2.68118E1	1.7054E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.51177E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.08504E-2	-8.8002E1	-3.57628E-4	-8.8E1	-4.76837E-5	5.31673E-3	9.31263E-2	2.7321E1	-3.26596E1	-3.26219E1	2.67986E1	1.71506E-8	2.50898E-3	2.50898E-3	6.28006E-3	2.52051E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.8002E1	-7.62939E-4	-8.79998E1	-1.19209E-4	5.76973E-3	9.32455E-2	2.72793E1	-3.26723E1	-3.26218E1	2.6798E1	1.72327E-8	2.52318E-3	2.52318E-3	6.34037E-3	2.52928E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.16233E-2	-8.80017E1	-5.72205E-4	-8.8E1	-7.15256E-5	5.50747E-3	9.33409E-2	2.73057E1	-3.26711E1	-3.26044E1	2.68118E1	1.72927E-8	2.51662E-3	2.51662E-3	6.31288E-3	2.53148E-2
1.2E1	8.8E1	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.80016E1	-3.09944E-4	-8.80004E1	3.09944E-4	5.38826E-3	9.35078E-2	2.72757E1	-3.26476E1	-3.26344E1	2.6852E1	1.72327E-8	2.51662E-3	2.51662E-3	6.29098E-3	2.52489E-2
1.3E1	5.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80016E1	-2.6226E-4	-8.80003E1	2.38419E-4	5.88894E-3	9.29356E-2	2.73075E1	-3.26512E1	-3.26224E1	2.67589E1	1.70023E-8	2.52538E-3	2.52538E-3	6.31837E-3	2.52928E-2
1.4E1	3.8E1	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80015E1	-1.43051E-4	-8.80004E1	-1.19209E-4	5.43594E-3	9.29594E-2	2.73051E1	-3.26693E1	-3.2644E1	2.67595E1	1.701E-8	2.52169E-3	2.52169E-3	6.32356E-3	2.52139E-2
1.5E1	5.1E1	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80015E1	-5.24521E-4	-8.80004E1	7.15256E-5	5.19753E-3	9.30071E-2	2.73135E1	-3.26494E1	-3.26585E1	2.68196E1	1.70092E-8	2.5225E-3	2.5225E-3	6.32978E-3	2.52183E-2
1.6E1	2.61E2	2.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80016E1	-2.6226E-4	-8.80003E1	2.14577E-4	5.53131E-3	9.31501E-2	2.73201E1	-3.26627E1	-3.2617E1	2.67989E1	1.69955E-8	2.51954E-3	2.51954E-3	6.31278E-3	2.5128E-2
1.7E1	3.41E2	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.80017E1	-4.29153E-4	-8.80004E1	-1.19209E-4	5.53131E-3	9.30548E-2	2.73228E1	-3.26744E1	-3.26378E1	2.67812E1	1.69949E-8	2.5199E-3	2.5199E-3	6.31837E-3	2.50959E-2
1.8E1	1.453E3	2.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80017E1	-5.48363E-4	-8.80004E1	3.33786E-4	5.65052E-3	9.30786E-2	2.73039E1	-3.26621E1	-3.26482E1	2.68208E1	1.69949E-8	2.5188E-3	2.5188E-3	6.29645E-3	2.5227E-2
1.9E1	2.563E3	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80017E1	-4.76837E-4	-8.80004E1	9.53674E-5	5.55515E-3	9.30071E-2	2.72973E1	-3.26837E1	-3.26452E1	2.67812E1	1.70023E-8	2.51443E-3	2.51443E-3	6.31288E-3	2.52928E-2
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80018E1	-4.76837E-4	-8.80002E1	4.05312E-4	5.60284E-3	9.29832E-2	2.73177E1	-3.26482E1	-3.26386E1	2.68094E1	1.70318E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.51924E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80017E1	-1.90735E-4	-8.80002E1	2.14577E-4	5.76973E-3	9.31263E-2	2.73057E1	-3.26486E1	-3.26295E1	2.67897E1	1.73077E-8	2.51007E-3	2.51007E-3	6.32936E-3	2.52051E-2
2.2E1	5.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80018E1	-5.96046E-4	-8.8E1	1.19209E-4	5.34058E-3	9.31263E-2	2.73195E1	-3.26891E1	-3.26164E1	2.68166E1	1.7163E-8	2.52061E-3	2.52061E-3	6.33436E-3	2.5128E-2
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80019E1	-1.90735E-4	-8.80001E1	9.53674E-5	5.60284E-3	9.30786E-2	2.7308E1	-3.2639E1	-3.26231E1	2.67812E1	1.71338E-8	2.52276E-3	2.52276E-3	6.28056E-3	2.52354E-2