[Scan]
initial_time=2016-02-15T17:33:04
final_time=2016-02-15T17:33:23
ip_count=19
run=1030
dataset=1
scan=38
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.38649E-2
qbias_imon=-3.79155E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.37293E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=4.42958E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.0101E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=9.03976E-10
mult1=-9.44025E-9
mult2=-2.79185E-9
rf_tmon=-3.91957E-3
rf_agc=3.41114E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=4.52983E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63489E0
bslens_imon=2.53775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20127E1
lens5a_imon=2.00146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53569E1
cs_ef1b_imon=2.97487E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04862E1
cs_ea1_imon=2.47298E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00951E0
lens1_imon=1.54639E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64805E1
os_ef1alow_imon=2.97904E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.55985E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=2.9787E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=4.50647E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11245E1
os_restr1_imon=2.87513E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15179E1
os_ea1_imon=1.89475E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.08782E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2569E0
cs_ionrep_imon=1.21702E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01786E1
cs_anode1_imon=3.05203E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=8.14247E-10
tplens_vset=1.4E-1
tplens_vmon=1.6198E0
tplens_imon=-2.23642E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26154E1
iondef3_imon=1.50433E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26726E1
iondef2_imon=1.57607E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02991E2
lens6_imon=2.98494E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.44722E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29235E0
ionrepsh_imon=1.87925E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33477E1
lens5b_imon=2.18098E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74646E1
cs_ef2b_imon=3.12813E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.8537E-1
os_ea2_imon=-3.9668E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00608E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.18235E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.60481E0
os_ef2alow_imon=-2.53288E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.45102E-1
os_ef2bup_imon=-5.26095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1077E1
os_restr2_imon=2.8661E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.31478E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.2628E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.11536E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6774E1
iondef4_imon=1.07773E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.10501E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=3.53646E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11972E0
cs_ionaccel_imon=-1.87953E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.4716E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56208E1
einzel_imon=7.78862E-6
window_vset=0.0E0
window_vmon=2.06681E-1
window_imon=-1.1254E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39161E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-6.63193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.4513E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.30853E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.26745E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49179E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33866E1
os_fil1_imon=5.28335E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.5886E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66259E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30806E1
cs_fil1_imon=9.9785E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62088E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66532E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.44329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=6.43889E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73269E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32399E-1
cs_fil2_imon=-2.25795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.19186E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22377E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.50424E-2
chamber_ion_pmon=1.70028E-8
chamber_cvt_pmon=2.53031E-3
foreline_cvt_pmon=2.53031E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.74469E-1
res40_imon=-2.59196E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.191E3	3.0E0	1.47E2	4.1E1	-7.24736E-2	-8.8002E1	-1.43051E-4	-8.79998E1	4.29153E-4	5.36442E-3	9.29594E-2	2.72919E1	-3.26711E1	-3.26278E1	2.678E1	1.70028E-8	2.51417E-3	2.51417E-3	6.31278E-3	2.50424E-2
2.0E0	2.931E3	3.0E0	3.16E2	1.6E2	-7.33239E-2	-8.8002E1	-9.53674E-4	-8.79999E1	2.6226E-4	5.36442E-3	9.2721E-2	2.73111E1	-3.26506E1	-3.2617E1	2.68088E1	1.7017E-8	2.5188E-3	2.5188E-3	6.32936E-3	2.50088E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80019E1	-9.05991E-4	-8.79999E1	1.43051E-4	5.57899E-3	9.31501E-2	2.73128E1	-3.26585E1	-3.26508E1	2.67879E1	1.70096E-8	2.52209E-3	2.52209E-3	6.31288E-3	2.52051E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80022E1	-5.24521E-4	-8.80002E1	2.38419E-4	5.65052E-3	9.30309E-2	2.73122E1	-3.2629E1	-3.2636E1	2.67986E1	1.70028E-8	2.51739E-3	2.51739E-3	6.31278E-3	2.52785E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80019E1	-7.15256E-4	-8.8E1	3.57628E-4	5.57899E-3	9.31025E-2	2.73255E1	-3.26218E1	-3.26458E1	2.6787E1	1.70096E-8	2.5188E-3	2.5188E-3	6.32386E-3	2.51613E-2
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80016E1	-3.33786E-4	-8.8E1	5.24521E-4	5.53131E-3	9.29117E-2	2.73122E1	-3.26649E1	-3.25977E1	2.67982E1	1.70391E-8	2.52276E-3	2.52276E-3	6.29665E-3	2.51709E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80018E1	-3.09944E-4	-8.80002E1	2.6226E-4	5.26905E-3	9.29832E-2	2.72806E1	-3.26689E1	-3.25954E1	2.68369E1	1.72252E-8	2.5188E-3	2.5188E-3	6.33486E-3	2.52489E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.8002E1	7.15256E-5	-8.80003E1	2.6226E-4	5.17368E-3	9.30309E-2	2.73141E1	-3.265E1	-3.25767E1	2.6771E1	1.7054E-8	2.52099E-3	2.52099E-3	6.29098E-3	2.53148E-2
1.2E1	7.1E1	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80018E1	-2.14577E-4	-8.80003E1	5.00679E-4	5.19753E-3	9.29594E-2	2.73022E1	-3.2659E1	-3.2626E1	2.68104E1	1.70092E-8	2.51693E-3	2.51693E-3	6.32418E-3	2.5196E-2
1.3E1	7.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80019E1	-5.24521E-4	-8.8E1	3.09944E-4	5.31673E-3	9.30786E-2	2.73305E1	-3.26559E1	-3.26203E1	2.68319E1	1.69898E-8	2.51886E-3	2.51886E-3	6.3126E-3	2.50855E-2
1.4E1	5.3E1	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80017E1	-3.8147E-4	-8.80001E1	3.33786E-4	5.4121E-3	9.29594E-2	2.73027E1	-3.26248E1	-3.26482E1	2.67837E1	1.70165E-8	2.51952E-3	2.51952E-3	6.30171E-3	2.51412E-2
1.5E1	3.1E1	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80018E1	-5.24521E-4	-8.80001E1	4.76837E-4	5.65052E-3	9.28879E-2	2.72663E1	-3.26793E1	-3.26173E1	2.67657E1	1.70096E-8	2.51552E-3	2.51552E-3	6.32386E-3	2.52051E-2
1.6E1	2.63E2	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80021E1	-8.10623E-4	-8.80002E1	4.52995E-4	5.17368E-3	9.29117E-2	2.73161E1	-3.26456E1	-3.2645E1	2.67812E1	1.70028E-8	2.51954E-3	2.51954E-3	6.28592E-3	2.52139E-2
1.7E1	3.85E2	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80018E1	-2.6226E-4	-8.80004E1	5.48363E-4	5.24521E-3	9.29594E-2	2.73183E1	-3.26506E1	-3.25846E1	2.67824E1	1.70168E-8	2.52697E-3	2.52697E-3	6.3074E-3	2.51292E-2
1.8E1	1.431E3	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80016E1	-6.4373E-4	-8.79999E1	4.52995E-4	5.03063E-3	9.31978E-2	2.73291E1	-3.26633E1	-3.265E1	2.6828E1	1.70318E-8	2.52318E-3	2.52318E-3	6.32386E-3	2.51177E-2
1.9E1	2.671E3	1.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80016E1	-9.53674E-4	-8.79999E1	1.19209E-4	5.67436E-3	9.3174E-2	2.73015E1	-3.26921E1	-3.26014E1	2.6771E1	1.70246E-8	2.52492E-3	2.52492E-3	6.31278E-3	2.53216E-2
2.0E1	1.8E1	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80014E1	-9.05991E-4	-8.8E1	5.72205E-4	5.19753E-3	9.31501E-2	2.73187E1	-3.2682E1	-3.26242E1	2.68166E1	1.70096E-8	2.52209E-3	2.52209E-3	6.28552E-3	2.5227E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80014E1	-4.76837E-4	-8.8E1	4.29153E-4	5.10216E-3	9.32693E-2	2.72974E1	-3.26455E1	-3.26236E1	2.67972E1	1.70244E-8	2.5199E-3	2.5199E-3	6.31288E-3	2.5227E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.40192E-2	-8.80019E1	-4.76837E-4	-8.79999E1	1.90735E-4	5.10216E-3	9.31978E-2	2.72871E1	-3.26759E1	-3.25906E1	2.68064E1	1.69955E-8	2.52384E-3	2.52384E-3	6.30202E-3	2.53E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.38649E-2	-8.80018E1	-4.76837E-4	-8.79999E1	2.86102E-4	5.53131E-3	9.32693E-2	2.73063E1	-3.26726E1	-3.26154E1	2.6774E1	1.70028E-8	2.53031E-3	2.53031E-3	6.31278E-3	2.50424E-2