[Scan]
initial_time=2016-02-15T17:33:31
final_time=2016-02-15T17:33:50
ip_count=19
run=1030
dataset=1
scan=39
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.76254E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-6.5378E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=4.77219E-10
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.98855E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=8.88944E-10
mult1=-9.83671E-9
mult2=-2.81642E-9
rf_tmon=-3.95366E-3
rf_agc=3.37962E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=4.3515E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66975E0
bslens_imon=2.72377E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20226E1
lens5a_imon=1.98757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=2.97333E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=2.47283E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06428E0
lens1_imon=1.64071E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64494E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03779E1
cs_ea2_imon=1.53488E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=2.97621E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=4.16303E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11322E1
os_restr1_imon=2.87855E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15199E1
os_ea1_imon=1.90546E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.08073E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25151E0
cs_ionrep_imon=1.22802E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93523E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=3.0519E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=8.28552E-10
tplens_vset=1.4E-1
tplens_vmon=1.61666E0
tplens_imon=-3.27202E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.50551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26843E1
iondef2_imon=1.5901E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02953E2
lens6_imon=2.98523E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=4.67265E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3046E0
ionrepsh_imon=1.89697E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33894E1
lens5b_imon=2.19215E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74537E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.51625E-1
os_ea2_imon=-4.68779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06151E2
lens4b_imon=2.00676E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.18416E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.61558E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.10929E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=2.84791E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.31946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.2702E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73111E1
iondef1_imon=1.08998E-5
iondef4_vset=2.691E1
iondef4_vmon=2.684E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.10277E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=4.35376E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10071E0
cs_ionaccel_imon=-1.89871E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02053E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56273E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=2.11937E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.38954E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.53382E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.34812E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=6.88965E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33853E1
os_fil1_imon=5.25074E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=7.17887E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66463E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30765E1
cs_fil1_imon=9.98714E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62732E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66632E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07863E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.3978E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76224E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-1.97521E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22416E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.50424E-2
chamber_ion_pmon=1.70246E-8
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.72817E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=199
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.137E3	1.0E0	1.47E2	4.1E1	-7.20871E-2	-8.8002E1	-4.05312E-4	-8.80003E1	3.33786E-4	5.10216E-3	9.29117E-2	2.73104E1	-3.26708E1	-3.26201E1	2.67995E1	1.71192E-8	2.51847E-3	2.51847E-3	6.32896E-3	2.50638E-2
2.0E0	2.902E3	3.0E0	3.16E2	1.6E2	-7.20871E-2	-8.8002E1	-6.91414E-4	-8.80003E1	2.14577E-4	5.34058E-3	9.2864E-2	2.73099E1	-3.26506E1	-3.26422E1	2.67607E1	1.72327E-8	2.52318E-3	2.52318E-3	6.32936E-3	2.50305E-2
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.8002E1	-2.6226E-4	-8.79999E1	4.29153E-4	5.48363E-3	9.29594E-2	2.72973E1	-3.26458E1	-3.26116E1	2.68022E1	1.70754E-8	2.51847E-3	2.51847E-3	6.29665E-3	2.5128E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80021E1	-4.52995E-4	-8.80001E1	4.52995E-4	5.48363E-3	9.31025E-2	2.73228E1	-3.26608E1	-3.26042E1	2.67992E1	1.72702E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.51613E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.11597E-2	-8.80022E1	-3.57628E-4	-8.80003E1	3.09944E-4	5.6982E-3	9.34124E-2	2.73339E1	-3.26855E1	-3.26416E1	2.67637E1	1.71411E-8	2.5131E-3	2.5131E-3	6.33436E-3	2.53216E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.8002E1	-7.39098E-4	-8.80004E1	-9.53674E-5	5.8651E-3	9.34362E-2	2.73081E1	-3.26543E1	-3.26194E1	2.67532E1	1.70318E-8	2.51771E-3	2.51771E-3	6.32936E-3	2.52928E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80016E1	-2.6226E-4	-8.8E1	-1.90735E-4	5.57899E-3	9.31263E-2	2.73069E1	-3.2653E1	-3.26158E1	2.68462E1	1.70318E-8	2.52209E-3	2.52209E-3	6.31837E-3	2.52928E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80015E1	-1.43051E-4	-8.8E1	-1.43051E-4	5.53131E-3	9.32455E-2	2.72925E1	-3.26476E1	-3.26134E1	2.67908E1	1.70096E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.5227E-2
1.2E1	6.7E1	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80016E1	-6.4373E-4	-8.80002E1	9.53674E-5	5.48363E-3	9.32217E-2	2.73009E1	-3.26843E1	-3.26206E1	2.6798E1	1.70092E-8	2.51693E-3	2.51693E-3	6.33538E-3	2.51737E-2
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80017E1	-4.29153E-4	-8.80003E1	1.43051E-4	5.29289E-3	9.3317E-2	2.73207E1	-3.27059E1	-3.2626E1	2.68117E1	1.701E-8	2.52061E-3	2.52061E-3	6.34518E-3	2.52785E-2
1.4E1	5.7E1	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80018E1	-4.52995E-4	-8.79999E1	9.53674E-5	5.55515E-3	9.31501E-2	2.73081E1	-3.26801E1	-3.26386E1	2.68007E1	1.70096E-8	2.51552E-3	2.51552E-3	6.3074E-3	2.52489E-2
1.5E1	5.7E1	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80018E1	-4.52995E-4	-8.8E1	2.86102E-4	5.45979E-3	9.33647E-2	2.72961E1	-3.26669E1	-3.26386E1	2.67636E1	1.70318E-8	2.51771E-3	2.51771E-3	6.31837E-3	2.5227E-2
1.6E1	2.37E2	0.0E0	6.47E2	4.41E2	-7.17779E-2	-8.8002E1	-4.29153E-4	-8.8E1	1.43051E-4	5.4121E-3	9.29594E-2	2.73311E1	-3.26655E1	-3.25977E1	2.67866E1	1.71357E-8	2.5199E-3	2.5199E-3	6.3074E-3	2.51177E-2
1.7E1	3.48E2	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80018E1	-4.52995E-4	-8.8E1	1.66893E-4	5.43594E-3	9.30309E-2	2.73027E1	-3.26663E1	-3.26302E1	2.67854E1	1.7229E-8	2.52384E-3	2.52384E-3	6.29665E-3	2.52354E-2
1.8E1	1.443E3	0.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80017E1	-6.67572E-4	-8.8E1	1.90735E-4	5.31673E-3	9.29117E-2	2.73063E1	-3.26773E1	-3.2616E1	2.67716E1	1.7017E-8	2.52318E-3	2.52318E-3	6.29098E-3	2.5227E-2
1.9E1	2.552E3	1.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80016E1	-6.67572E-4	-8.80004E1	2.14577E-4	5.8651E-3	9.28879E-2	2.73243E1	-3.26699E1	-3.2629E1	2.67955E1	1.70172E-8	2.51484E-3	2.51484E-3	6.31555E-3	2.51878E-2
2.0E1	1.4E1	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80015E1	-7.39098E-4	-8.8E1	1.43051E-4	5.67436E-3	9.32455E-2	2.73269E1	-3.26366E1	-3.26419E1	2.6807E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80018E1	-4.76837E-4	-8.80002E1	0.0E0	5.19753E-3	9.32217E-2	2.73201E1	-3.26609E1	-3.2629E1	2.67974E1	1.70837E-8	2.52538E-3	2.52538E-3	6.31288E-3	2.51832E-2
2.2E1	8.0E0	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80019E1	-6.67572E-4	-8.8E1	1.19209E-4	5.29289E-3	9.32693E-2	2.72957E1	-3.26809E1	-3.26567E1	2.6795E1	1.701E-8	2.51954E-3	2.51954E-3	6.32356E-3	2.51494E-2
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.8002E1	-5.24521E-4	-8.80004E1	7.15256E-5	5.34058E-3	9.29594E-2	2.73111E1	-3.26843E1	-3.2629E1	2.684E1	1.70246E-8	2.51847E-3	2.51847E-3	6.29128E-3	2.50424E-2