[Scan]
initial_time=2016-02-15T17:33:57
final_time=2016-02-15T17:34:17
ip_count=19
run=1030
dataset=1
scan=40
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2O
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.81616E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.48654E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=4.26185E-10
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.99156E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=8.95643E-10
mult1=-9.55978E-9
mult2=-2.7266E-9
rf_tmon=-5.13728E-3
rf_agc=3.25465E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.24492E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67695E0
bslens_imon=2.72161E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20199E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12522E2
lens4a_imon=2.04848E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=2.96937E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04958E1
cs_ea1_imon=2.4838E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02033E0
lens1_imon=1.60767E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03762E1
cs_ea2_imon=1.5512E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=2.98018E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=4.35591E-10
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=2.87098E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15047E1
os_ea1_imon=1.91205E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.21233E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.9338E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01719E1
cs_anode1_imon=3.04505E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=8.11875E-10
tplens_vset=1.4E-1
tplens_vmon=1.56993E0
tplens_imon=-1.58753E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.50722E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.58112E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03029E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=4.58765E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2569E0
ionrepsh_imon=1.89439E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33886E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.6374E-1
os_ea2_imon=-4.32729E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06208E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.18308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.62098E0
os_ef2alow_imon=-2.64833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.34955E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10739E1
os_restr2_imon=2.86881E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.3238E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.25182E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.06273E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67733E1
iondef4_imon=1.08882E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.03729E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=3.47281E-10
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11392E0
cs_ionaccel_imon=-1.87348E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56255E1
einzel_imon=7.71307E-6
window_vset=0.0E0
window_vmon=2.06531E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-6.0849E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.10162E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.6474E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.23861E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47375E0
defgridb_imon=6.2112E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33835E1
os_fil1_imon=4.91437E0
os_fil1_emis_iset=0.0E0
os_fil1_emis_imon=8.09187E-3
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.66554E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30764E1
cs_fil1_imon=9.99135E2
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62342E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66716E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.24138E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=7.7582E-4
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70949E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.56018E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2232E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=2.52051E-2
chamber_ion_pmon=1.70244E-8
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=0
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.92328E-1
res40_imon=-2.67717E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.193E3	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80018E1	-6.91414E-4	-8.80004E1	2.86102E-4	5.48363E-3	9.32932E-2	2.73364E1	-3.26461E1	-3.26024E1	2.6814E1	1.71923E-8	2.52061E-3	2.52061E-3	6.32356E-3	2.51066E-2
2.0E0	3.048E3	3.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80019E1	-3.57628E-4	-8.80004E1	2.38419E-4	5.26905E-3	9.32217E-2	2.73177E1	-3.26963E1	-3.26567E1	2.6772E1	1.7229E-8	2.52276E-3	2.52276E-3	6.32356E-3	2.50852E-2
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80019E1	2.38419E-5	-8.80004E1	0.0E0	5.50747E-3	9.3174E-2	2.73227E1	-3.26602E1	-3.25822E1	2.67869E1	1.70096E-8	2.51771E-3	2.51771E-3	6.29645E-3	2.51177E-2
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30146E-2	-8.8002E1	1.19209E-4	-8.80001E1	-1.43051E-4	5.74589E-3	9.31025E-2	2.73229E1	-3.26814E1	-3.26196E1	2.68088E1	1.70178E-8	2.52197E-3	2.52197E-3	6.31779E-3	2.51269E-2
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.8002E1	-6.4373E-4	-8.80002E1	-9.53674E-5	5.26905E-3	9.32455E-2	2.73207E1	-3.26482E1	-3.26308E1	2.68094E1	1.70158E-8	2.52502E-3	2.52502E-3	6.3074E-3	2.50253E-2
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.8002E1	-5.24521E-4	-8.80004E1	2.38419E-4	5.29289E-3	9.3174E-2	2.73034E1	-3.2688E1	-3.26266E1	2.68348E1	1.70028E-8	2.51632E-3	2.51632E-3	6.3074E-3	2.51709E-2
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80017E1	-6.19888E-4	-8.80004E1	1.90735E-4	5.26905E-3	9.31978E-2	2.72922E1	-3.26425E1	-3.26897E1	2.67625E1	1.69738E-8	2.52276E-3	2.52276E-3	6.31817E-3	2.51066E-2
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80017E1	-3.33786E-4	-8.80003E1	0.0E0	5.07832E-3	9.29594E-2	2.72756E1	-3.26419E1	-3.26266E1	2.6798E1	1.70244E-8	2.51552E-3	2.51552E-3	6.29645E-3	2.51395E-2
1.2E1	6.7E1	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80016E1	-6.67572E-4	-8.79999E1	-7.15256E-5	5.55515E-3	9.31263E-2	2.72907E1	-3.26591E1	-3.2611E1	2.684E1	1.69875E-8	2.51552E-3	2.51552E-3	6.31837E-3	2.50959E-2
1.3E1	9.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80017E1	-2.6226E-4	-8.79998E1	4.76837E-5	5.36442E-3	9.28879E-2	2.72841E1	-3.2644E1	-3.26476E1	2.67817E1	1.69955E-8	2.52061E-3	2.52061E-3	6.29665E-3	2.51709E-2
1.4E1	5.1E1	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80016E1	-2.14577E-4	-8.79999E1	-1.90735E-4	5.19753E-3	9.30071E-2	2.72678E1	-3.26651E1	-3.26374E1	2.67469E1	1.70096E-8	2.52538E-3	2.52538E-3	6.31837E-3	2.51395E-2
1.5E1	3.3E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80016E1	-2.6226E-4	-8.79998E1	-2.38419E-5	5.38826E-3	9.29356E-2	2.73198E1	-3.26832E1	-3.26579E1	2.68406E1	1.7017E-8	2.52428E-3	2.52428E-3	6.31288E-3	2.52709E-2
1.6E1	2.43E2	1.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80015E1	-2.86102E-4	-8.79997E1	3.57628E-4	5.60284E-3	9.29356E-2	2.73016E1	-3.26679E1	-3.26113E1	2.67649E1	1.70246E-8	2.52169E-3	2.52169E-3	6.3074E-3	2.52785E-2
1.7E1	3.68E2	1.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80017E1	-4.76837E-5	-8.8E1	2.38419E-5	5.76973E-3	9.31978E-2	2.7299E1	-3.26646E1	-3.26266E1	2.68196E1	1.70318E-8	2.51203E-3	2.51203E-3	6.3074E-3	2.51924E-2
1.8E1	1.458E3	2.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80017E1	-3.33786E-4	-8.80003E1	2.6226E-4	5.45979E-3	9.30786E-2	2.72931E1	-3.26837E1	-3.2632E1	2.67872E1	1.69942E-8	2.52585E-3	2.52585E-3	6.34099E-3	2.52407E-2
1.9E1	2.501E3	2.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80017E1	-1.43051E-4	-8.79998E1	2.6226E-4	5.34058E-3	9.3174E-2	2.73057E1	-3.26717E1	-3.26098E1	2.68118E1	1.70244E-8	2.52318E-3	2.52318E-3	6.3074E-3	2.51613E-2
2.0E1	1.3E1	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80017E1	-2.38419E-4	-8.8E1	9.53674E-5	5.17368E-3	9.31263E-2	2.73165E1	-3.26765E1	-3.2632E1	2.67565E1	1.70096E-8	2.52099E-3	2.52099E-3	6.31837E-3	2.52489E-2
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80016E1	-3.8147E-4	-8.79998E1	1.90735E-4	5.34058E-3	9.32932E-2	2.73322E1	-3.26697E1	-3.26378E1	2.68012E1	1.71804E-8	2.51771E-3	2.51771E-3	6.31288E-3	2.51832E-2
2.2E1	1.5E1	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.8002E1	-3.33786E-4	-8.80001E1	-4.76837E-5	5.24521E-3	9.35078E-2	2.73183E1	-3.26669E1	-3.26056E1	2.68394E1	1.70682E-8	2.51847E-3	2.51847E-3	6.33436E-3	2.53E-2
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80019E1	-4.29153E-4	-8.80003E1	-7.15256E-5	5.29289E-3	9.32693E-2	2.73093E1	-3.26663E1	-3.26446E1	2.67733E1	1.70244E-8	2.51443E-3	2.51443E-3	6.29645E-3	2.52051E-2